Part Numbers
158 66, 158 67
158 44
IONIVAC Sensors
IE 414, IE 514 and Temperature Resistant Gauge Head Cable
Operating Instructions 300265097_002_A1
Страница 1: ...Part Numbers 158 66 158 67 158 44 IONIVAC Sensors IE 414 IE 514 and Temperature Resistant Gauge Head Cable Operating Instructions 300265097_002_A1 ...
Страница 2: ...s 5 1 4 Technical Data 6 2 Installation 8 2 1 Conforming Utilization 8 2 2 Unpacking and Checking 8 2 3 Installation 9 2 4 Connecting the Temperature Resistant Gauge Head Cable 10 3 Operation 14 4 Maintenance 16 4 1 Exchanging the Cathode 16 4 2 Oerlikon Leybold Vacuum Service 17 EC Declaration of Conformity 18 Original Operating Instructions ...
Страница 3: ...ructions It must be operated and maintai ned by trained personnel only Consult local state and national agencies regarding specific requirements and regu lations Address any further safety operation and or main tenance questions to our nearest office DANGER indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING indicates a potentially hazard...
Страница 4: ...perature resistant gauge head cable must not be exposed to a temperature exceeding 200 C max 250 C at the flange of the sensor 1 1 Supplied Equipment UHV ionisation measurement systems Part numbers 158 66 or 158 67 n Installable UHV ionisation measurement system IE 414 or IE 514 n Operating Instructions Temperature resistant gauge head cable Part number 158 44 n Gauge head cable with plug fitted o...
Страница 5: ...lange fixed DN 40 CF 835 37 Weld on flange rotatable DN 40 CF 835 58 Bolts nuts set of 25 pieces and accessories for CF flanges 839 01 Replacement Cathodes Replacement cathode for IE 413 IE 414 158 63 Replacement cathode for IE 511 IE 514 158 61 Gauge head cables IE 414 IE 514 Gauge head cable 5 m with touch protection 158 68 Extension cable 20 m with touch protection 158 69 Description 5 30026509...
Страница 6: ...nt temperature during operation 20 80 C Max flange temp with gauge head cable 158 44 250 C Max bake out temperature without plug 400 C Storage temperature 20 50 C Relative humidity Annual average 65 non condensing On 60 days 85 non condensing Deployment Within indoor rooms only altitude up to 2000 meters above sea level X ray limit 1 10 11 mbar 1 10 12 mbar Upper limit of measuring range 1 10 2 mb...
Страница 7: ...l 205 V Emission current range 0 06 0 6 mA 1 6 mA Cathode heater current 1 5 A typ Cathode heater voltage 3 V typ 3 7 V typ Sensitivity for nitrogen 17 mbar typ 6 25 mbar typ Max power when baking out 90 mA 480 V 45 mA 480 V Description 7 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum 69 4 33 DN 40 CF 66 25 12 8 98 58 12 8 DN 40 CF 55 90 69 4 33 Fig 1 Dimensions in mm IE 414 IE 514 ...
Страница 8: ...nsor immediately after delivery even if it is to be put into operation at a later date Before doing so examine the shipping container for any extenal damage Then remove all the packaging materials The shipping container and packaging materials must be kept in the event of complaints about damage Check for completeness and carry out a careful visual examination If any damage is discovered report it...
Страница 9: ...e cathode When installing several gauge heads at one common com ponent T piece or cross for example an optical separation is required The gauge heads may not directly see each other Interactions may cause incorrect measurements Humidity at the insulators 2 14 caused by condensing water for example can give rise to incorrect measure ments due to leakage currents Connecting the gauge head cable and ...
Страница 10: ...ge head flange 2 1 and plug guide 2 4 For this reason three spacers have been fitted between gauge head flange 2 1 and the plug guide 2 4 Positioning of the plug guide is defined through the different bolt diameters on the gauge head 2 1 Notice the temperature resistant gauge head cable may also be connected after the gauge head has already been installed Connecting the temperature resistant gauge...
Страница 11: ...e gauge head 1 Gauge head 2 Spacer for M 4 screw 3 Spacer for M 5 screw 4 Plug guide 5 Cylinder head screw M 4 6 Cylinder head screw M 5 7 Ion collector cable coax 8 Countersunk screws M 3 x 15 9 Lid 10 Strain relief 11 Temperature resistant gauge head cable 12 Cable groove 13 Housing 14 Insulators 10 pcs Installation ...
Страница 12: ... resistant gauge head cable to the gauge head as depicted in fig 3 The individual wires of the gauge head cable are colour coded n Bolt the housing 2 13 onto the gauge head flange 2 1 again with the bolts 2 5 and 2 6 and the 3 spacers Secure the entire cable with the strain relief 2 10 Installation 12 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum ...
Страница 13: ...gauge head proceed in the reverse order The plug must be unlocked in the gauge head housing and for this reason unscrew the cover 2 9 first Especially note the pin assignment Provide the connec tion with great care Do not subject the pin contacts to any bending forces Risk damaging of the current feedthrough leak Live Voltages If during operation the IM 540 suffers a malfunction then a live voltag...
Страница 14: ...esence of halogen gases like fluorine chlorine bromine and iodine and their compounds the yttrium oxide coating will suffer rapid wear As a result of this the cathodes will burn out Operation 14 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum NOTICE Abb 3 View onto the gauge head Color IE 514 IE 414 ye green LP2 LP2 grey jumper 1 blue reflector 1 red anode anode brown cathode cathode white cathod...
Страница 15: ...peration 15 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum Humidity at the insulators 2 14 caused by condensing water for example can give rise to incorrect measure ments due to leakage currents NOTICE ...
Страница 16: ...e gauge head n Remove the gauge head from the vacuum system n After loosening the hex screws at both terminals remove the faulty cathode n Open the transport packaging remove the replacement cathode in the same way and install it in the place of the old cathode The required 0 89 mm screwdriver is included with the replacement cathode NOTICE Fig 4 View onto the gauge head Anode Katode Klemme Innens...
Страница 17: ... use the form we have prepared for this purpose A copy of the form has been reproduced at the end of these Operating Instructions Declaration of Contamination for Compressors Vacuum Pumps and Components Another suitable form is available from www oerlikon com leyboldvacuum Documents Download Documents Attach the form to the equipment or enclose it with the equipment This statement detailing the ty...
Страница 18: ...18 300265097_002_A1 05 2014 Oerlikon Leybold Vacuum ...
Страница 19: ...pe of oil ForeVacuum Pumps Application Process B Condition of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged explosive 2 If yes which cleaning agent radioactive 2 and which method of cleaning microbiological 2 1 If answered with No go to D other harmful substances C Des...
Страница 20: ...Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 D 50968 Cologne Phone 49 0 221 347 0 Fax 49 0 221 347 1250 info vacuum oerlikon com w w w o e r l i k o n c o m l e y b o l d v a c u u m ...
