170
8.1.2.2 Hardware test screen explanations
1 . Cover
1 ) open: Turns red when the processing chamber door is open.
2 ) close: Turns red when the processing chamber door is closed.
3 ) Open: Used to open the processing chamber door.
4 ) Close: Used to close the processing chamber door.
2 . Chuck
1 ) org: Turns red when the origin switch is on.
2 ) Open: Used to open the chuck.
3 ) Pre: Loose chucking
4 ) Main: Secure chucking
5 ) EncClr: Used to reset the encoder value of Chuck PM.
6 ) Pow
↑
: Used to increase the power of Chuck PM.
7 ) Pow
↓
: Used to decrease the power of Chuck PM.
3 . U-
θ
: Upper chuck axis
1 ) org: Turns red when the origin switch is on.
2 ) CW: Used to rotate the upper chuck axis clockwise.
3 ) CCW: Used to rotate the upper chuck axis counterclockwise.
4 ) EncClr: Used to reset the encoder value of U. R. PM.
5 ) Pow
↑
: Used to increase the power of U.R. PM.
6 ) Pow
↓
: Used to decrease the power of U.R. PM.
4 . L-
θ
: Lower chuck axis
1 ) org: Turns red when the origin switch is on.
2 ) CW: Used to rotate the lower chuck axis clockwise.
3 ) CCW: Used to rotate the lower chuck axis counterclockwise.
4 ) EncClr: Used to reset the encoder value of L. R. PM.
5 ) Pow
↑
: Used to increase the power of L. R. PM.
6 ) Pow
↓
: Used to decrease the power of L.R. PM.
5 . LMU: Lens measuring unit
Содержание SE-9090 Supra
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Страница 318: ...LLE7D RDA002B 306 9 5 2 Boards S N 700019 and earlier...
Страница 319: ...LLE7D RDA002B 307 S N 700020 and later...
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Страница 321: ...LLE7D RDA002B 309 9 5 4 Other electrical components...
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