HR8 Motor User Manual
1-1
1. Introduction
1.1
About the Motor
The HR8 motors are high precision ceramic motors belonging to
the Nanomotion LN2000 product line. Designed and manufactured
by Nanomotion, Ltd., the HR8 motors, combine unlimited stroke
with high resolution in compact dimensions. Among its applications
are microscopy, precision motion, robotics, etc.
The motors provide a linear response to the input voltage. The
operation of the motor and driver resembles that of a DC-motor
driven by a voltage amplifier.
The specifications described in this chapter apply only to the motor
driven by the AC-1 Driver Card and the AB-1 driver box. Minor
differences may result if NCD Controller Driver, DC-12 Driver Card,
or DB-121/122 Driver Box are used.
1.2 Vacuum
Motors
Applications of the Nanomotion motors for vacuum and
high-vacuum environments include wafer inspection and metrology,
scanning stages and lithography. The HR8-V and HR8-U motors
are constructed of materials that have been selected and designed
for high vacuum compatibility.
