Doc. No: TY-ZT11-004A Ver. 3
User's Manual for ZT11 Pressure Sensor
for Semiconductor Industry
8
.
1
Страница 1: ...Doc No TY ZT11 004A Ver 3 User s Manual for ZT11 Pressure Sensor for Semiconductor Industry 8 1...
Страница 2: ...are classified according to the following definitions Indicates an imminently hazardous situation which if not avoided may result in death or serious injury Indicates the risk that users may suffer fr...
Страница 3: ...sive to materials of wetted parts or gas contact areas Do not use batteries or power supplies not specified They may cause failure fire or electric shock Do not use the product if its failure or malfu...
Страница 4: ...h causes injury or damage to the surrounding environment Install the product in accordance with the installation instructions in the User s Manual For repair please contact us Disassembly or modificat...
Страница 5: ...ifications for Each Grade 9 4 DIMENSIONS 10 4 1 Typical Dimensions 10 5 TRANSPORTATION AND UNPACKING 11 5 1 Precautions for Transportation 11 5 2 Precautions for Unpacking 11 6 INSTALLATION AND REMOVA...
Страница 6: ...6 TY ZT11 004A Ver 3 12 PRODUCT WARRANTY EXPORT ADMINISTRATION REGULATIONS 22 12 1 Product Warranty 22 12 2 Export Administration Regulations 22 13 OTHER 22...
Страница 7: ...s excellent in durability and stability due to use of a widely proven vapor deposited SS sensor element as well as an integrated structure design from the semiconductor strain gauge pressure sensor to...
Страница 8: ...stance Load resistance R max 50E 500 E supply voltage Output 4 to 20 mA DC Transmission system 2 wire system Accuracy 0 25 F S at 23 deg C including linearity hysteresis and repeatability Temperature...
Страница 9: ...he product to an indoor power distribution network that is not affected by lightning surge voltages and power system switching transients 2 The maximum allowable pressure is the upper limit of pressur...
Страница 10: ...factory and does not have an impact on product specifications Type of pressure gauge or absolute can be easily identified by the color of the product label Gauge pressure Green Absolute pressure Yello...
Страница 11: ...fitting needs to be connected in a specified manner using a designated gasket When connecting the sensor to the pressure line do not tighten the main case body with a pipe wrench or similar tool Durin...
Страница 12: ...d to direct sunlight and without external shock Allow room for maintenance and adjustment around the product Avoid snoop test for the sensor as it may cause insulation resistance failure It is recomme...
Страница 13: ...is not tightened sufficiently Also be sure to securely tighten the nut thread for potential loosening due to vibrations tightening torque 0 4 to 0 5 N m Check the rated value specified for this produc...
Страница 14: ...ws the relation between the load resistance and supply voltage R max 50 E 500 E supply voltage 0 100 200 300 400 500 600 700 800 900 1000 1100 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28...
Страница 15: ...inless steel PP white PVC gray Cable length L 3 m or 5 m 3 m or 5 m Conductor cross sectional area 0 34 mm2 22AWG 0 34 mm2 22AWG Insulator outer dia 1 27 mm 1 26 mm Sheath outer dia 4 2 mm 4 7 mm Degr...
Страница 16: ...ustment carefully to make sure that the adjustment is correctly made Observe the following precautions during operation Do not apply pressure exceeding the rated pressure indicated on the ZT11 body la...
Страница 17: ...it is electrically connected to earth ground Keep the product away from electrically charged machines or objects Conductive noise Use the stable power supply that is difficult to generate noise Instal...
Страница 18: ...iodic Inspection Checklist Appearance scratches cracks deformation corrosion etc Corrosion condition of the pressure inlet Clogging at the air inlet Leakage check and thread re tightening Double check...
Страница 19: ...shaft diameter of 2 8 mm or less Recommended product No 9000 by Bessel 0 30 For adjustment use a traceable measuring instrument Do not perform adjustments with moisture adhering to the product Moistu...
Страница 20: ...ent Output in no pressure state mA DC 16 mA DC upper limit pressure range MPa 0 1 MPa 0 1 4 mA DC e g compound range of 0 5 MPa 6 67 mA DC compound range of 1 0 MPa 5 45 mA DC Release the pressure app...
Страница 21: ...he gasket seal is not in close contact with the case Turning the resin cap more than 90 may cause damage Do not apply excessive force should be 50 mN m or less Gasket Seal Do not bite the fall prevent...
Страница 22: ...r other force majeure events and Any secondary damage caused by nonconforming product including the above Please understand that regardless of whether the customer recognizes the handling deficiency a...
Страница 23: ...escribed in this User s Manual Copying or reprinting without permission is strictly prohibited For more information or inquiries contact our sales office nearest you or call the number below User s Ma...
