5
4.4.
Loading substrate:
Place the substrate to be processed in the center of the tray. The substrate can be wafers, glass slides,
small fragments, and other substrates suitable for spinning coating.
Notice:
The substrate must be larger than and completely cover the surface of the tray. If the selected
substrate is smaller than the loading tray, it will cause the glue to flow into the vacuum
pipeline of the equipment, thereby blocking or corroding the internal pipeline of the
equipment.
4.5.
Substrate alignment
Align the center of the substrate with the center of the tray. You can turn on the vacuum pump to
adsorb the substrate on the tray plate, try to manually flip the tray plate, and observe whether the
sample rotates eccentrically. If there is eccentricity, it should be adjusted again until the substrate
alignment is completed.
Notice:
The substrate must be placed in the center of the tray. Otherwise, during high-speed rotation,
there may be flying pieces, causing damage to personnel and equipment.