
3
3.
Equipment composition
The overall structure:
1.Chamber upper
cover
2.Loading tray
3.Chamber bottom
cover
4.Touch screen
5.Power switch
6.USB
interface
7.Vacuum interface
8.Vacuum pump communication
port
9.Power cord
The structure of the tray is shown in the figure
:
a.Central exhaust
b.O-ring
c.Vacuum adsorption tank
d.Loading tray