MKS UniMag 971, Руководство по эксплуатации и установке, Страница: 35 / 44

971 UniMag ™ Operation manual 32
Measuring range (N
2
and Air): 1×10
-8
to 5×10
-3
Torr
Cold cathode
Accuracy Cathode
(1)
1×10
-8
to 1x10
-3
Torr: ±30% of reading
Supply Voltage: 9 – 30 VDC
Power consumption: < 2 Watt
Fuse (thermal recoverable): 200 mA
Analog output (MKS standard):
1-9 VDC
Analog output 1 resolution: 16 bit
Analog output 2 resolution: 12 bit
Analog output impedance: 100 Ω
Analog output update rate: 16 Hz
Setpoint relay range:
1×10
-8
to 5×10
-3
Torr
Setpoint relay contact rating: 1A / 30 VDC/AC (resistive load)
Setpoint relay contact resistance: 100 mΩ (max)
Setpoint relay contact endurance (30VDC/1A load): 100.000 (min)
Setpoint relay contact endurance (30VDC/0.2A load): 2.000.000 (min)
Setpoint relay response time: <100 ms
Materials exposed to vacuum:
304 stainless steel
403 stainless steel
Ceramic (Al
2
O
3
), Viton
®
Low out gassing epoxy resin
Internal volume:
KF25 flange 3.6 cm
3
CF2.75” flange 1.9 cm
3
KF40 flange 3.1 cm
3
Housing material:
Stainless steel 304
Flange material: Stainless steel 304
Weight: KF25 flange 360 g
CF2.75” flange 570 g
KF40 flange 390 g
Operating temperature:
0 to 40
o
C (32 to 104
o
F)
Bake out temperature (Power off): 85
o
C (185
o
F)
(1) Accuracy and repeatability are typical values measured in Nitrogen atmosphere after zero adjustment at ambient temperature.