MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 73 / 122

4 Preparing the Stabil-Ion System for Operation
4-15
Series 370 Stabil-Ion Instruction Manual - 370119
6. Press the SELECT key to store the new setting in memory.
7. Press CANCEL to return to the setup menu.
(Or press CANCEL again to return to the status display for the gauge tube
that is turned ON.)
4.4 Stabil-Ion Gauge Turn ON
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After turning ON the Stabil-Ion Controller make sure a Memory Module is loaded for each
Stabil-Ion Gauge. See See Loading the Stabil-Ion Memory Module on page 4-5 for further
information.
■
When the pressure in the vicinity of IG1 is less than the overpressure setpoint listed in Table
4-3 on page 4-7, as indicated by a Convectron Gauge or another gauge, turn ON IG1. See
Section 4.8 on page 4-28 for automatic operation.
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The N
2
equivalent pressure within IG1 will be displayed in the pressure units you have
specified (Torr, mbar or Pa). See Section 4.3.4.1 on page 4-12 to change pressure units.
■
The above two steps also apply for IG2 if your Stabil-Ion System is equipped with the Dual
Stabil-Ion Operation module.
4.4.1 Alternate ON/OFF Gauge Control
The Stabil-Ion Gauges may be turned ON and OFF in 4 ways:
1. Using the front panel push buttons, IG1 and IG2.
2. Remotely with the available Remote Control module (see Section 3.7 on page 3-9).
3. Automatically using the auto ON function of the Convectron Gauge module (see Section 4.8
on page 4-28).
4. Using the RS-232 or RS-485 Computer Interface modules (see Section 4.14 on page 4-33).
In addition, the Stabil-Ion Gauge will be automatically turned OFF by excessive pressure, filament
over current condition or out of range grid voltage. For information on the cause of unexpected
gauge turn OFF see Section 7.10 on page 7-9.
4.5 Degassing the Stabil-Ion Gauge
Danger, high voltage – 180V is present in the Power Supply, on the cable,
and at the ion gauge when the gauge is turned ON. Voltages as high as
850V peak are present during degas.
Be aware that an electrical discharge through a gas may couple dangerous
high voltage directly to an ungrounded conductor almost as effectively as
would a copper wire connection. A person may be seriously injured or even
killed by merely touching an exposed ungrounded conductor at high
potential.
This hazard is not unique to this product.
Be aware that when high voltage is present in any vacuum system, a life
threatening electrical shock hazard may exist unless all exposed conductors
are maintained at earth ground.
This hazard is not peculiar to this product.
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