MKS Stabil-Ion 370 Series, Инструкция по эксплуатации, Страница: 110 / 122

7 Service and Maintenance
7-6
Series 370 Stabil-Ion Instruction Manual - 370119
7.5 Troubleshooting the Convectron Gauge Module
7.6 Convectron Gauge Test Procedure
The small diameter sensor wire can be damaged by small voltages.
Do not perform electrical continuity tests with instruments applying
in excess of 0.1 volt when the gauge is at vacuum, or 2 volts when at
atmospheric pressure.
The Convectron Gauge should show the following resistances (pin
numbers are embossed on the gauge base):
If the resistance from pin 1 to pin 2 is about 800 ohms, the sensor wire is open.
Table 7-4 Convectron Gauge Module Troubles.
Symptom Possible Cause
Pressure reading grossly in error. Controller out of calibration.
Unknown gas type.
Gauge not mounted horizontally (see Section 3.3 on page 3-3).
Sensor damaged (e.g., by reactive gas).
Gauge very dirty.
Extremes of temperature or mechanical vibration.
CGA over current indicator lit. Cable short, pins 1-3.
CGB over current indicator lit. Cable short, pins 1-3.
Bridge circuit indicators lit. Circuit failure.
CGA unplugged indicator lit. CGA unplugged; open sensor wire.
CGB unplugged indicator lit. CGB unplugged; open sensor wire.
Microprocessor reset LED lit or flashing. Microprocessor failure.
A/D integration failure indicator lit or flashing. Circuit failure.
Display reads blank. Gauge unplugged; open sensor wire.
Figure 7-2 Convectron Module, Top
View, Showing Trouble
Indicator LED’s
Table 7-5 Convectron Gauge Resistances Figure 7-3 Convectron Gauge Base
Pressure Range Overpressure Point (Torr)
Pins 1 to 2 21 to 22 ohms
Pins 2 to 3 51 to 62 ohms
Pins 1 to 5 181 to 182 ohms