MKS Newport HXP100-MECA, Руководство пользователя

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3
HXP100-MECA & HXP100HA-MECA 6-Axis-Parallel Kinematic Positioning Systems
Each hexapod (HA and non HA versions) is delivered with a dedicated
controller. It is particularly important for the HXP100HA-MECA hexapod to
verify that it is connected to the appropriate HXP100HA-ELEC
-D
as the
controller includes the calibration performed on the hexapod (the
Hexapod is linked with its own controller through its S/N).
3.0 — Characteristics
3.1 Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of:
• 50 µm for the HXP100-MECA version.
• 10 µm for the HXP100HA-MECA version.
RightPath ™ Trajectory
Control enables minimal
runout in linear and arc
trajectories.
2.0
Z Motion (mm)
0
0.2
0.4
0.6
0.8
1.0
1.2
1.4
1.6
1.8
-30 0
-10 -20 10 20
X Motion (mm)
Hexapod Trajectory
30
Standard Motion
RightPath ™
X Y Z U (Rx) V (Ry) W (Rz)
Travel range (1) ±27.5 mm ±25 mm ±14 mm ±11.5° ±10.5° ±19°
Minimum Incremental Motion 0.5 µm 0.5 µm 0.25 µm 0.25 mdeg 0.25 mdeg 0.5 mdeg
Uni-directional repeatability, typical ±0.25 µm ±0.25 µm ±0.125 µm ±0.125 mdeg ±0.125 mdeg ±0.25 mdeg
Bi-directional repeatability (2) , typical ±2 µm ±2 µm ±1 µm ±1 mdeg ±1 mdeg ±2 mdeg
(±0.5 µm) (±0.5 µm) (±0.25 µm) (±0.25 mdeg) (±0.25 mdeg) (±0.2 mdeg)
Max. speed 2.5 mm/s 2 mm/s 1 mm/s 1.8 °/s 1.7 °/s 3 °/s
Rigidity 5 N/µm 5 N/µm 40 N/µm – – –
Centered load capacity (4) 200 N
1) Travel ranges are interdependent. The listed values are max. travels per axis when all other axis are in their centered position.
2) With standard compensation (with hysteresis compensation).
3) For allowable cantilevered loads, refer to section 3.2: “Max. Cantilever Distance of the Load“.
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