manualshive.com logo in svg

MKS Mass-Flo 1679B, Инструкция по эксплуатации, Страница: 1 / 61

Поделиться
Скачать
MKS Mass-Flo 1679B Скачать руководство пользователя страница 1

Artisan Technology Group 

is your source for quality 

new and certified-used/pre-owned equipment

• 

FAST SHIPPING AND 

DELIVERY

• 

TENS OF THOUSANDS OF 

IN-STOCK ITEMS

•  EQUIPMENT DEMOS
• 

HUNDREDS OF 

MANUFACTURERS 

SUPPORTED

•  LEASING/MONTHLY

 

RENTALS

•  ITAR CERTIFIED

           

SECURE ASSET 

SOLUTIONS

SERVICE CENTER REPAIRS

Experienced engineers and technicians on staff 

at our full-service, in-house repair center

WE BUY USED EQUIPMENT

Sell your excess, underutilized, and idle used equipment 

We also offer credit for buy-backs and trade-ins

www.artisantg.com/WeBuyEquipment

                        

REMOTE INSPECTION

Remotely inspect equipment before purchasing with 

our interactive website at

 

www.instraview.com

LOOKING FOR MORE INFORMATION? 

Visit us on the web at

 

www.artisantg.com

    

for more 

information on price quotations, drivers, technical 

specifications, manuals, and documentation

Contact us:

 

 

(888) 88-SOURCE  |  [email protected]  |  www.artisantg.com

SM

View

Instra

Содержание Mass-Flo 1679B

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...9B Mass Flo Controller Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technology Group Quality Instr...

Страница 3: ...ng any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrange ments with respect to the responsibility for shipping the equipment and...

Страница 4: ...118719 P1 REV B 12 97 MKS Type 1679B Mass Flo Controller Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 5: ...ark of MKS Instruments Inc Andover MA Cajon is a registered trademark of Cajon Company Macedonia OH Swagelok VCR and VCO are registered trademarks Swagelok Co Solon OH Kalrez and Viton are registered...

Страница 6: ...llation 9 How To Unpack the Type 1679 Controller 9 Opening the Package 9 Unpacking Checklist 10 Environmental Requirements 10 Setup 11 Dimensions 12 Gas Line Connections 13 Standard Fittings 13 Option...

Страница 7: ...ent Technique 27 Control Circuitry 28 Chapter Six Maintenance 29 General 29 Zero Adjustment 29 Repair 30 Chapter Seven Troubleshooting 31 Troubleshooting Chart 31 Appendix A Product Specifications 33...

Страница 8: ...Table of Contents v Appendix D Model Code Explanation 45 Model Code 45 Index 49 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 9: ...Table of Contents vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 10: ...When Cable Clamp is Not Available 17 Figure 6 Wiring Diagram for an Input Divider 22 Tables Table 1 Definition of Symbols Found on the Unit 2 Table 2 MKS Cables 15 Table 3 9 Pin Type D Connector Pino...

Страница 11: ...List of Figures and Tables viii Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 12: ...hich if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operating procedure practice or the li...

Страница 13: ...IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 5033 a Class ll equipment IEC 417 No...

Страница 14: ...ied service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used observe the proper safety precautions completely purge the instrument when necessary and...

Страница 15: ...uitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use...

Страница 16: ...design that virtually eliminates RFI and EMI interference This all metal instrument is designed to provide maximum performance reliability and cleanliness The 1679 mass flow controller MFC can interfa...

Страница 17: ...esponse to any set point Reliability To help provide excellent reliability the design contains a low mechanical and electronic components count and has successfully passed the following tests STRIFE i...

Страница 18: ...ng the output signal for a gas other than the calibration gas Chapter Four Operation explains how to start up and operate the mass flow controller It also discusses how to override the control valve C...

Страница 19: ...tain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an ERA Number Equipment...

Страница 20: ...rn Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Opening the Package Th...

Страница 21: ...ferential pressure is 10 to 40 psid for 5000 sccm units 15 to 40 psid for 10 000 sccm units The standard orifice is sized for control over this range with the outlet at atmospheric pressure 3 Provide...

Страница 22: ...n the gas stream such that the flow will be in the direction of the arrow on the side of the controller 3 Allow adequate clearance for the cable connector and tubing Straight Shielded connectors requi...

Страница 23: ...elok or compatible 4 44 112 7 Weld stub 4 34 110 2 Figure 1 Outline Dimensions of the 1679 Flow Controller Note The method used to measure the overall length of the unit varies with the type of fittin...

Страница 24: ...er s outlet to the downstream tubing Standard Fittings The 1679 flow controller is equipped with Cajon 4 VCR male compatible fittings For specific information regarding these fittings refer to the man...

Страница 25: ...unit for mounting Refer to Figure 3 for the size and location of the mounting holes 2 75 69 9 0 13 3 2 0 35 8 9 0 38 9 5 2 25 57 2 0 75 19 1 8 32 UNC 2B x 0 25 DP 4 places Figure 3 Mounting Dimension...

Страница 26: ...not CE Mark compliant MKS offers a variety of interface cables listed in Table 2 Note 1 An overall metal braided shielded cable properly grounded at both ends is required to meet CE Mark specification...

Страница 27: ...t one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 4 and 5 page 17 A inch piece of 22 wire ma...

Страница 28: ...sing Optional Plastic or Metal Cable Clamp For Physical Strain Relief Figure 4 Preferred Method Example 2 Alternate Method To Connect Cable shown on a pressure transducer Transducer Overall Insulation...

Страница 29: ...3 Power Supply 15 VDC 4 Power Supply Ground 5 Power Supply 15 VDC 6 Set Point Input 0 to 5 VDC 7 Signal Ground 8 Signal Ground 9 Valve Test Point2 Valve Open 12 VDC Valve Close 12 VDC Valve Normal Fl...

Страница 30: ...13 No Connection 6 15 VDC 14 No Connection 7 15 VDC 15 Chassis Ground 8 Set Point Input 0 to 5 VDC Table 4 15 Pin Type D Connector Pinout Note 1 The No Connection pin assignment refers to a pin with...

Страница 31: ...ction K No Connection 10 Signal Ground L Valve Close TTL low Table 5 20 Pin Edge Card Connector Pinout Note 1 The No Connection pin assignment refers to a pin with no internal connection 2 Pins 1 thro...

Страница 32: ...using is not listed in the appendix you must calculate its GCF using the following equation GCF 0 3106 S d Cp x x x where GCFx Gas Correction Factor for gas X dx Standard Density of gas X g l at 0 C a...

Страница 33: ...gnal directly Using the values from the example above and assuming a 1 Volt F S readout the flow signal must be divided 2 44 to 1 00 Volts 2 44 V 10 K 1 00 V 100 sccm 14 4 K Use 1 RN60C resistors or b...

Страница 34: ...FC instrument When power is first applied the output signal jumps to over 5 5 VDC You can monitor the flow output signal as the heaters stabilize and the output approaches zero Approximately 5 minutes...

Страница 35: ...flow may occur momentarily while the gas pressure equalizes across the flow controller Adjust the Zero Pot 1 Once flow through the controller has stopped reached zero flow remove the set point or valv...

Страница 36: ...scillation Turn the controller gain counter clockwise to decrease the controller gain setting Note Lowering the supply pressure to the MFC will have the same effect as decreasing the gain since it wil...

Страница 37: ...ith an Edge Card connector To open the valve apply a TTL low to pin D or connect pin D to signal ground pin 10 To close the valve apply a TTL low to pin L or connect pin L to signal ground pin 10 Prio...

Страница 38: ...sensor tube for ranges 10 sccm N2 equivalent A sensor tube and parallel bypass for ranges 10 sccm N2 equivalent The geometry of the sensor tube in conjunction with the specified full scale flow rate e...

Страница 39: ...egral Derivative algorithm and amplified so that it can reposition the controlling valve thus reducing the controller error to within the resolution specification of the instrument The 1679 includes a...

Страница 40: ...ning the unit to MKS Instruments for service Zero Adjustment For best accuracy and repeatability you should check the zero setting periodically and reset it if necessary Refer to How To Zero the Flow...

Страница 41: ...If it is necessary to return the instrument to MKS for repair please contact any of the MKS international service calibration centers listed on the inside of the back cover of this manual for an ERA E...

Страница 42: ...Zero the Flow Controller page 24 Controller does not function Electronics malfunctioning Valve sticking or contamination Return for service Return for service Oscillation Too high a controller gain s...

Страница 43: ...Troubleshooting Chart Chapter Seven Troubleshooting 32 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 44: ...sure5 5000 sccm 10 000 sccm 10 to 40 psid 15 to 40 psid Pressure Coefficient 0 02 Rdg psi Repeatability 0 2 F S Resolution Measurement 0 1 F S Temperature Coefficients Zero Span 0 05 F S C 500 ppm 0 0...

Страница 45: ...ns Connector Options 15 pin Type D 9 pin Type D 20 pin Edge Card Input Voltage Current Required Maximum At Start Up First 5 Seconds 6 Typical At Steady State 15 VDC 5 200 mA 15 VDC 5 100 mA Output Imp...

Страница 46: ...Leak integrity External scc sec He Through closed valve 25 psig inlet to atmosphere 760 Torr outlet 10 20 and 50 sccm 100 sccm 1 x 10 10 1 sccm 2 F S Materials wetted Body Seals and Valve 316L VIM VA...

Страница 47: ...Physical Specifications Appendix A Product Specifications 36 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 48: ...1144 1 964 1 250 6 86 3 926 3 163 0 701 1 00 0 31 0 42 0 86 Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen Deuterium CHClF2 C2 ClF5 CClF3 C2...

Страница 49: ...395 4 660 0 98 0 50 0 33 0 35 0 38 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 0 1113 0 1654 0 140 0 1544 0 176 6 644 3 926 4 592 3 858 3 127 0 37 0 42 0 42 0 46 0 5...

Страница 50: ...xide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 0 1933 0 1797 0 2088 0 1866 0 2193 2 052 3 168 1 964 8 93 1 427 2 0 48 0 71 0 164 1 00 Pentane Per...

Страница 51: ...fluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 0 1592 0 1357 0 1380 0 161 0 0810 0 0378 6 516 6 129 6 043 8 360 13 28 5 858 0 26 0 33 0 33 0 20 0 25 1 32 1 Empirically defined 2 Cons...

Страница 52: ...S states the flow controller ranges based on flow rate of nitrogen the flow rate for other gases may vary The proper valve configuration depends upon the flow range inlet pressure differential pressur...

Страница 53: ...the GCF of Ar in the following formula GCF of N2 GCF of Ar x Desired flow rate of Ar where x is the equivalent flow rate of nitrogen sccm 1 00 1 39 x 250 sccm Ar x 180 sccm N2 A flow rate of 250 sccm...

Страница 54: ...128 0 202 0 285 0 403 125 0 049 0 054 0 061 0 073 0 083 0 101 0 141 0 221 0 312 0 441 100 0 058 0 062 0 069 0 082 0 094 0 113 0 158 0 248 0 349 0 493 75 0 077 0 077 0 082 0 097 0 110 0 132 0 183 0 286...

Страница 55: ...ns at atmospheric pressure so the differential pressure is 5 psid 1 Determine the maximum flow factor Cv for the gas of interest using the equation listed in step 1 on page 43 The Gas Density for boro...

Страница 56: ...mally closed configuration The desired options are identified in the model code when you order the unit The model code is identified as follows 1679BXXXY1WZ where Type Number Full Scale Range Fittings...

Страница 57: ...12C 200 22C 500 52C 1 000 13C 2 000 23C 5 000 53C 10 000 14C Fittings Y Three types of fittings are available designated by a single letter code Ordering Code Cajon 4 VCR Male R Swagelok tube S tube...

Страница 58: ...Consult factory for availability Seals Z The all metal seals are indicated by a single letter code Ordering Code All metal M How To Order a Mass Flow Controller To order the Type 1679 MFC with a 500...

Страница 59: ...Model Code Appendix D Model Code Explanation 48 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 60: ...connectors 15 Introduction 5 M Maintenance 29 Manual organization 7 Measurement technique 27 Mounting 14 P Performance specifications 33 34 35 PID control 28 Power requirements 10 Product code 45 R Re...

Страница 61: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Отзывы:

Нет отзывов