MKS 946 Series, Руководство по эксплуатации и обслуживанию, Страница: 101 / 130

946 Controller Instruction Manual pg. 101
9.11 PID Recipe Setting Commands
Command Parameter Response Function
RCPn n
(n=1 to 8)
n
(n=1 to 8)
Set or query the active recipe number.
RDCH?n
RDCH!n:
A1, B1, A2,
B2, C1, C2,
Rat, Vlv
n:CH
(n=1 to 8,
CH=A1, A2, B1,
B2, C1, C2, Rat,
Vlv, NA)
Set or query the MFC channel for PID pressure control
associated with recipe n.
RPCH?n
RPCH!n:
A1, B1, A2,
B2, C1, C2,
PC1, PC2
n:CH
(n=1 to 8,
CH=A1, A2, B1,
B2, C1, C2, NA)
Set or query the pressure channel for PID pressure
control associated with recipe n.
RPSP?n
RPSP!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the pressure set point for PID pressure
control associated with recipe n.
RKP?n
RKP!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the proportional control gain Kp for PID
pressure control associated with current n.
Valid rage is from 0.00002 to 10000.0, default setting is
10.
RTI?n
RTI!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the Integral time constant for PID pressure
control associated with recipe n.
Valid rage is from 0.01 to 10000, default setting is 1.
RTD?n
RTD!n:
d.dd E

ee
(d,e=0 to 9)
n:d.dd E

ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the derivative time constant for PID
pressure control associated with recipe n.
Valid rage is from 0 to 1000, default setting is 0.5.
RCEI?n
RCEI!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the CEILING parameter for PID pressure
control associated with recipe n. Valid rage is from
10+BASE to 100 of full scale, default setting is 100.
RBAS?n
RBAS!n:
d.dd E

ee
(d,e=0 to 9)
n:d.dd E

ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the BASE parameter for PID pressure
control associated with recipe n. Valid rage is from 0 to
CEILING -10 of full scale, default setting is 0.
RPST?n
RPST!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the PRESET parameter for PID pressure
control associated with current active recipe n. Valid
rage is from 0 to 100 of full scale, default setting is 99.
RSTR?n
RSTR!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the START parameter for PID pressure
control associated with recipe n. Valid rage is from 0 to
100 of full scale, default setting is 0.
REND?n
REND!n:
d.dd E

ee
(d,e=0 to 9)
n:d.dd E

ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the END parameter for PID pressure
control associated with recipe n. Valid rage is from 0 to
100 of full scale, default setting is 0.
RCST?n
RCST!n:
d.dd E  ee
(d,e=0 to 9)
n:d.dd E  ee
(n=1 to 8)
(d,e=0 to 9)
Set or query the CtrlStart parameter for PID pressure
control associated with recipe n. Valid rage is from 0 to
1000 seconds, default setting is 0 seconds.
RDIR?n
RDIR!n:
Upstream
Downstream
n:UPSTREAM
n:DOWNSTREAM
Set or query the DIRECTION parameter for PID
pressure control associated with recipe n. Default is
Upstream.
RGSB?n
RGSB!n:
d
(d=0 to 30)
n:d
(n=1 to 8)
(d=0 to 30)
Set the band for gain scheduled PID control for PID
pressure control associated with recipe n. Default is 0.
RGSG?n
RGSG!n:
d
(d=1 to 200)
n:d
(n=1 to 8)
(d=1 to 200)
Set the gain for gain scheduled PID control for PID
pressure control associated with recipe n. Default is 1.
Table 9-11 946 Recipe Serial Setting Commands