MKS 907 Series, Инструкция по эксплуатации

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4 Installation
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Series 907 Analog Convection Transducer
Instruction Manual - #109070001
Chapter 4
4 Installation
4.1 Transducer Location
Locate the 903 Transducer where it can measure process chamber or manifold pressure. Install it
away from pumps, other vibration sources, and gas sources to give the most representative values.
Locate and orient the Sensor where contamination is least likely. If it is installed directly above a
diffusion pump, for example, oil vapor could contaminate the cathode, anode, or other vacuum
exposed components, causing the calibration to shift.
Install the 907 Transducer with the body set horizontally to work effectively in the convection
region. Convection is an effective heat transfer process at pressures above 200 Torr of nitrogen.
Install it in the direction indicated on the body of the sensor.
4.2 Connect the Transducer to the Vacuum System
Mount the Transducer to a grounded vacuum system.
Notice
Install the Transducer on the vacuum chamber where it is protected from
physical damage and high heat.
See Section 2.5, Over Pressure Conditions, for important safety information
before mounting the gauge.
Proper Grounding
Improper grounding could cause product failure or personal
injury.
• Follow ground network requirements for the facility.
• Maintain all exposed conductors at Earth ground.
• Make sure the vacuum port to which the gauge is mounted is
properly grounded.