MKS 907 Series, Инструкция по эксплуатации

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3 Specifications
16
Series 907 Analog Convection Transducer
Instruction Manual - #109070001
3.4 Specifications
1. Measurements will change with different gases and mixtures. Correction parameters must be used for gases
other than N
2
or Air.
Table 3-1 Specifications for the Series 907 Analog Convection Transducer
Parameter Specification
Performance
Measurement Range for N
2
/ Air
(1)
Do NOT use this product with
flammable or explosive gases.
Torr: 1.0 x 10
-3
to 1.0 x 10
+3
mbar: 1.3 x 10
-3
to 1.3 x 10
+3
Pascal: 1.3 x 10
-1
to 1.3 x 10
+5
Useful setpoint range
Torr: 5.0 x 10
-3
to 1.0 x 10
+3
mbar: 6.5 x 10
-3
to 1.3 x 10
+3
Pascal: 6.5 x 10
-1
to 1.3 x 10
+5
Calibration Gas Air/nitrogen
Physical
Display LED indicators for set points and power
Operating Power 12 to 30 Vdc, 0.2A
Output Voltage 0.38 to 5.66 Vdc, 1k
Ω
maximum output impedance
Controls 1 or 2 nonvolatile, independent relay set points; atmospheric
adjustment; zero adjustment
Relay Contact Rating SPDT, 1 A @ 24 VAC/DC, resistive
Relay Response 150 msec maximum
Vacuum Connection KF 16, KF 25
Electrical Connection 9 pin sub-miniature “D” type
Case Material ABS Plastic (with conductive coating for CE marked model)
Materials exposed to vacuum 304 stainless steel, platinum, glass, nickel
Weight (with CF Flange) 2.3 lb (1.04 kg)
Insulation Coordination Pollution Degree 2
Dimensions (W x D x H) 4½" x 1¾" x 2¾" (114 mm x 44 mm x 71 mm)
Internal volume 2.0 in.3 (33.0 cm3) maximum
Typical Weight (with KF Flange) 0.7 lb (0.3 kg)
Vacuum Connection KF 16
KF 25
Mounting Orientation Horizontal ONLY
Altitude 2000 m (6561 ft) maximum
Operating Temperature 0 ° to 40 °C (32 ° to 104 °F)
Operation Humidity 80% maximum for temperatures less than 31°C, decreasing
linearly to 50% maximum at 40°C
Bake out Temperature 200 °C (392 °F) or 100 °C (212 °F) CE marked model; without
electronics
CE Certification EMC Directive
General Product Safety Directive
Specifications and dimensions are subject to change without notice.