MKS 356 Micro-Ion Plus Series, Инструкция по эксплуатации, Страница: 47 / 76

Operation
Micro-Ion
®
Module Instruction Manual - 356007-GP
47
In
stallation
O
per
a
tion
Maintenance
Before You
Begin
3.18 RS-485 Commands - Set 1
The following seven RS-485 commands provide pressure values or other
information which do not affect the operation of the Micro-Ion Module. See
Table 3-13 on page 45.
RD - Read Vacuum
Pressure
The example read pressure (RD) command causes the module to return a
value that indicates vacuum pressure is 1.50 x 10
–2
:
Example RD command from host:
#01RD
↵
Example response from module:
*01 1.50E–02
↵
• The returned value is in the unit of measure that has been set for the
module.
• If the returned value is not a valid representation of pressure, see RS –
Read the Module Status RS-485 Strings on page 48.
• You may also use the optional numeric display to read setpoint pressure
and error codes.
IGS - Read the Micro-Ion
Gauge ON/OFF Status
When you send the ion gauge status (IGS) command, the module returns a
character string that indicates the ON/OFF status of the Micro-Ion gauge.
IGS command from host:
#01IGS
↵
Example response from module:
*01 1 IG ON
↵
• The “1 IG ON” response means the Micro-Ion gauge is ON.
• The “0 IG OFF” response means the Micro-Ion gauge is OFF.
RF - Read Micro-Ion
Gauge Filament Status
The read filament (RF) RS-485 command causes the module to return a
character string indicating the operation mode of the gauge filament.
RF command from host:
#01RF
↵
Example response from module:
*01 FIL SF1
↵
• The “FIL SF1” response means filament 1 is operating.
• The “FIL SF2” response means filament 2 is operating.
• The “FILBOTH” response means a degas cycle is in progress.
RE - Read Micro-Ion
Gauge Emission Current
Send the read emission (RE) command to read the Micro-Ion gauge
emission current. Table 3-15 lists module responses to the RE command.
RE command from host:
#01RE
↵
Example response from module:
*01 4.0MA EM
↵