MKS 109030111, Инструкция по эксплуатации

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6 Service & Maintenance
32
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
Figure 6-1: 903 Sensor Assembly Illustration
1) Remove the two Phillips head screws holding the electronics assembly to the sensor body.
Remove the electronics assembly.
2) Using the smooth-jaw, needle-nose pliers, firmly grasp the compression spring at the tip closest
to the flange.
3) Pull on the compression spring while rotating it to free it from the formed groove of the sensor
body. Continue to pull until the compression spring is completely free.
4) Carefully remove the remaining components from the sensor body.
NOTE: Do NOT bend the anode or leaf spring on the ion current feedthrough pin
(see Figure 6-2) when disassembling or assembling the sensor.