LN0427E2103E0
Mass Flow Controller
Instruction Manual
MC-700 Series
Safety Precautions
Incorrect handling may cause death or injury
(1)
Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called “gas” or “fluid”).
(2)
DO NOT apply any fluids corrosive to materials exposed to gas. Corrosion may
cause fluid to leak into the atmosphere. Check the gas type to be used in advance.
(3)
This device is not designed as an explosion proof structure. DO NOT use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1)
Observe the precautions listed in the WARNING (above)
(2)
Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3)
This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4)
DO NOT modify this device. It may cause fire or other problems.
(5)
This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in failure
of the device.
(6) While a power supply is applied to MFC, ±15VDC must be applied
simultaneously. If only +15VDC or -15VDC is applied, electronic circuits will
become unstable and it may cause a malfunction of MFC.
(7)
This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8)
Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-700 series (Hereafter, it is called
"MFC"). Please read through this manual and other separate volumes (Digital
Interface Manual, Special Function Manual, Command Chart) carefully to
familiarize yourself with the features of this device.
2. Summary
This device is the mass flow controller with the function of switching different
kinds of gas and flow rate (Hereafter called "variable function" or "VR"). By using
the 3 rotary switches on the MFC, the gas type and flow
rate can be changed. The
rotary switches are placed conveniently on top of the MFC unit so
that
adjustments can be made accordingly even after the unit is set in position. For old
models, stocking MFC for each of gas and flowrate was necessary because only
one spec is available to one MFC, and MC-700 can reduce your stocking because
it can be used for more than one spec with one MFC.
3. Features
The MFC has the following features.
(1) LINTEC’s proprietary ambient temperature compensation type flow sensor.
·
The influence of ambient temperature is small due to the sensor temperature
control following the ambient temperature.
·
Since the temperature distribution of the sensor is constant, high-speed response
is possible.
(2) Gas type and flow rate setting can be changed by using the 3 switches on the
mass flow controller unit.
(3) Digital interface (RS-485) is standard equipment and the maximum of 32 MFCs
could be connected together with daisy chain.
(Option: Digital interface RS-232C is possible)
(4) Small structure of dead volume using diaphragm valve.
(5) Stainless steel 316L is used because of good corrosion resistance and seal ability.
(6) Particule-free structure
(7) RoHS compliant,
CE conformity
4. Structure
The MFC consists of sensors, bypass, valves, and a microcomputer for signal
processing. A digital PID feedback control system controls the valve action so that
flow rate output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
Name
Mass Flow Controller
Model
MC-710
MC-720
MC-730
Standard flow rate in
nitrogen VR number
10SCCM to 3SLM
(VR number 02 to 06)
3.1 to 10SLM
(VR number 07)
11 to 50SLM
(VR number 08 and 09)
Valve operation mode
Normally closed / Normally open
Internal surface treatment
No treatment / Precision polishing
Flow rate control range
2% of full scale
Analog flow rate setting
signal
Proportional to flow rate: 0 to 5VDC
Analog flow rate output
signal
Proportional to flow rate: 0 to 5VDC
Variable function (VR)
Changeable by using rotary switches (0.50 to 2.00)
Range is limited by original flow rate range of unit
Accuracy (Note1)
±1.0%F.S.
Repeatability (Note1)
±0.2%F.S.
Response time
1sec (Typical)
Operating differential
pressure (Note2)
50 to 300kPa
100 to 300kPa
150 to 300kPa
Maximum operating
pressure
300kPa(G)
Withstanding pressure
1MPa(G)
Operational temp/
Humidity range
5 to 50°C / 0 to 80%RH (with no condensation)
(Accuracy insurance 15 to 35°C)
Storage temp /
Humidity range
0 to 60°C / 0 to 80%RH (with no condensation)
Leak integrity
Less than
1×10
-11
Pa·m
3
/sec (He)
Mounting direction
Free
Materials exposed to gas
Stainless steel 316L, PCTFE, PTFE
Seal materials
Stainless steel 316L
Actuator
Piezo electric actuator
Fitting
6.35VCR
Type: 124mm
6.35VCR
Type: 106mm (option)
6.35SWL
Type: 127mm (option)
Power supply
+15VDC±3%: 120mA -15VDC±3%: 50mA
Analog interface
D-sub 9pin (male), Fixed size of screw:M3
Digital interface
RS-485 (RJ45 Jack) 2-wire
Maximum connection 32 units
RS-232C (RJ45 Jack) Maximum connection 100units (R0/R1 Option)
Weight
Approx. 1 kg
Note 1) The value at the time of shipping. This may change with usage of VR function.
Note 2) The value at the time of shipping. This may change with gas type and flow rate setting.
·
Connect the MFC to the ground.
(2) Dimensions
6. Ordering information
MC-710 MC - 4VR2 A0A0A0
- 06 - N2 - 1.5SLM
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[1] Model: MC: Mass Flow Controller Series MC-710
MC-720
MC-730
[2] Valve operation mode · Internal surface treatment
NO: Normally opened valve / No treatment
NC: Normally closed valve / No treatment
MO: Normally opened valve / Precision polishing
MC: Normally closed valve / Precision polishing
[3] Fitting
4VR2: 6.35VCRType 124mm
4VR1: 6.35VCRType 106mm (option)
4SWL: 6.35SWLType 127mm (option)
※
Please consult us for other fitting types.
[4] Other options
Default settings is labeled “A0A0A0”, please consult for more information.
[5] VR Number
[6] Gas type
[7] Full scale flow rate and unit: SCCM(0°C standard),
SLM(0°C standard)
