LN0404E2109B0
Low differential pressure Mass Flow Controller
Instruction Manual
MC-3000S Series
Safety Precautions
Incorrect handling may cause death or injury
(1)
Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called “gas” or “fluid”).
(2)
DO NOT
apply any fluids corrosive to materials exposed to gas. Corrosion may cause
fluid to leak into the atmosphere. Check the gas type to be used in advance.
(3)
This device is not designed as an explosion proof structure.
DO NOT
use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrect handling may lead to medium or slight injury or may
cause damage to, or loss of, facilities or equipment
(1)
Observe the precautions listed in the WARNING (above).
(2)
Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3)
This device is not designed to be waterproof.
DO NOT
locate this device
outdoors or in a place where it may be splashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4)
DO NOT
modify this device. It may cause fire or other problems.
(5)
While a power supply is applied to the device, +15VDC and -15VDC must be
applied simultaneously. If only +15VDC or -15VDC is applied, electronic
circuits will become unstable and it may cause a malfunction.
(6)
This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(7)
This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8)
Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-3000S series (Hereafter, it is called
"MFC"). Please read through this manual and other separate volumes (Digital
Interface Manual, Special Function Manual, Command Chart) carefully to
familiarize yourself with the features of this device.
2. Summary
The MFC is high performance mass flow controller for gas using thermal flow
sensor and high response piezoelectric valve. In the MFC model, MO type and
MC type are available depending on the kind of valve operation mode.
3. Features
The MFC is the following features.
(1)
LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
·
Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·
The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·
Steady temperature distribution of sensor and high-speed response.
(2)
Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
·
By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) Low differential pressure device.
(4) Universal digital Interface (RS-485).
(5)
Small dead space structure using a diaphragm valve.
(6)
Superior corrosion resistant sealing materials make maintenance easy. Metal
seals (Au).
(7)
Particle-free structure.
(8)
By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(9)
Based on RoHS.
4. Structure
The MFC consists of sensors, bypass, valves, and a microcomputer for signal
processing. A digital PID feedback control system controls the valve action so that
flow rate output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
Name
Low differential pressure Mass Flow Controller
Model
MC-3102S
Standard flow rate in nitrogen
2 to 10SCCM
~20SCCM
~30SCCM
Valve operation mode
Normally open valve / Normally closed valve
Internal surface treatment
No treatment / Precision polishing
Minimum controllable flow rate
2%F.S.
Analog flow rate output signal
Proportional to flow rate 0 to 5VDC
Analog flow rate setting signal
Accuracy
±1.0%F.S.
Repeatability
±0.2%F.S.
Response time
2 second (Typical)
Operating differential pressure
8.00×10
2
Pa to
1.33×10
5
Pa
1.07×10
3
Pa to
1.33×10
5
Pa
1.33×10
3
Pa to
1.33×10
5
Pa
Maximum operating pressure
1.33×10
5
Pa
Withstanding pressure
1MPa(G)
Operating temperature &
Humidity
5 to 50 ºC·0 to 80%RH (Condensation should be avoided)
(Accuracy insurance 15 to 35℃)
Temperature coefficient
(Standard Temp.25 ºC)
Zero
±0.02%F.S./ºC
Span
±0.02%F.S./ ºC
±0.04%F.S./ ºC
±0.08%F.S./ ºC
Storage temperature & Humidity
0 to 60 ºC·0 to 80%RH (Condensation should be avoided)
Leak integrity
Less than 1×10
-11
Pa · m
3
/sec (He)
Mounting direction
Specified upon placement of order
(Please see below (2) Mounting direction for details.)
Wetted materials
Stainless steel 304, Stainless steel 316L, PCTFE, Au
Seal Materials
Au
Actuator
Piezoelectric actuator
Fittings
6.35VCR (106, 124) 6.35UJR (106, 124)
1.125W-Seal (79.8mm, 92mm)
1.5W-Seal (79.8mm, 92mm)
Power supply
+15V DC±3%: 100mA -15VDC±3%: 50mA
Digital interface
RS-485 (2-wire)
Weight
Approx. 1kg
·
Connect the MFC to the frame ground
(2) Mounting direction
(3) Dimensions
6. Ordering information
M C - 3 1 0 2 S – N C – 4 J R 1 J V 0 A 0 – d d – e e – f f
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[1] Series model
MC: Mass Flow Controller MC Series
[2] Valve mode
NO: Normally open (No treatment), MO: Normally open (Precision polishing)
NC: Normally close (No treatment), MC: Normally close (Precision polishing)
[3] Fitting
4JR1:6.35UJR106,
4JR2:6.35UJR124, 4VR1:6.35VCR106, 4VR2:6.35VCR124, 4SWL:6.35SWL
※ Please consult for more information.
[4] Optional
J:
Valve is closed at below 2% setting
Mounting direction
V: HBD,
W: VID,
X: VIU
※ Default setting is labeled “VA0A0”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
SCCM (0 ºC standard), SLM (0 ºC standard)
