5. Ordering Information
LC
-
3*02L
-
MO
-
22
VR1
J
A0A0
[1]
[2]
[3]
[4]
[5]
[6]
[1] Series Model
LC: Liquid Mass Flow Controller LC Series
* Depends on the flow rate
[2] Seal type (Surface treatment)
NO: No treatment
MO: Precision polishing treatment
[3]INLET,OUTLET fitting size (IN side, OUT side)
E.g. if : 3.2mm, OUT: 3.2mm, label as [22] 2 indicates size is 3.2mm
[4] Fitting type
VR1: VCR-compatible 112mm SWL: SWL127.4 mm
* Depends on the fitting size
[5] Option J: 2% Close (This option “J” is recommended)
[6] Other options
Non-option setting is labeled “AA0A0”, please consult for more information.
6. Connection
(1) Analog interface connector
Mounted connector :D-Sub 9pin (male)
Pair connector :D-Sub 9pin (female)
(Fixed size of screw M3)
Pin No.
Signal Name
Function
1
Valve override open/close signal (Note 4)
+15VDC:Open, -15VDC:Close
2
Flow rate output signal 0 to 5 VDC
Flow rate of power output (plus side)
0 to 5 VDC
3
P o w e r s u p p l y + 1 5 V D C ± 3 %
Power supply (plus) (100mA)
4
Power supply COMMON (Note 5)
Power supply COMMON ±15VDC
5
P o w e r s u p p l y - 1 5 V D C ± 3 %
Power supply (minus) (50mA)
6
Flow rate setting signal
0 to 5 VDC
Flow rate of power input (plus side)
0 to 5VDC
7
Flow rate output COMMON (Note5)
Flow rate output signal COMMON
8
Flow rate setting COMMON (Note5)
Flow rate setting signal COMMON
9
N.C.
-
Note
4)
The impedance of the input setting of flow rate voltage is 100kΩ, the resistance of valve open
and close is 100kΩ.
Note5)
Pin No. 4,
7,
8 are connected in this device.
To avoid the effect of COMMON potential difference, please follow the circuit as below.
If the high accuracy of the control is necessary, setting flow rate voltage is COMMON
(Pin.8), and the flow rate output is COMMON (Pin.7) on the power side. Please do not
connect the power COMMON (Pin4).
(2) Digital interface connector
Mounted connector: RJ45 modular jack Pair connector: RJ45 modular plug
Pin No.
Name
Function
1
Signal COMMON
RS-485 Signal COMMON
2
Signal COMMON
RS-485 Signal COMMON
3
N.C.
-
4
Signal [-Txd/Rxd]
RS-485 2 -wire system transmitter.
receiver minus signal
5
Signal [+Txd/Rxd]
RS-485 2- wire system transmitter.
receiver plus signal
6
N.C.
-
7
N.C.
-
8
N.C.
-
7. Alarm function
This LC features two alarm modes: alarm A and alarm B. Using a digital interface,
alarm output of the digital connector or LED indicator located on top of the LC can
monitor the alarm status. Alarm setting can only be changed through digital
communication, so if a change is required, please do it through communication.
Details are described in the digital interface manual and others.
Alarm
Set off
LED indicator
A
Setting value ≠ Flow rate output
Continuous Red
Flow totalizer Alarm level 2
Power supply voltage drop (+15VDC)
Off
B
Valve voltage offset (At controllers)
Red (every 0.5sec flashing)
Zero adjustment error (Note6)
Flow totalizer Alarm level 1
Other
Command error
Continuous Red (every 0.5sec flashing)
Normal
-
Green (every 1sec flashing)
8. Initial setting value (factory shipped value)
This device is provided with a software switch for operation mode setting. Before
operation, input the necessary data for various functions by using the digital
interface. Details of the functions are described in the digital interface manual etc.
Software switch
Available values
Function
Default
Device number
00 to 99
LC No. Registration
00
Alarm A range
1 to 99 [%]
Setting Alarm A range
5%
Alarm B range
1 to 99 [%]
Setting of Alarm B range
20%
Alarm timer
0 to 99 [seconds]
Setting of time to prohibit Alarm
5 seconds
Alarm A output
Enable / Disable
Setting of Alarm A LED display
Enable
Alarm B output
Enable / Disable
Setting of Alarm B LED display
Disable
(Note 6)
Operation mode
Analog / Digital
Switching of Analog/digital
Analog
Power on mode
Analog / Preset
Switching of Operation mode in
power turning on
Preset
Valve control
C / O / H / S
Close / Open / Hold / Servo
Servo
Control speed
FAST / SLOW
Switching of Response speed
FAST
Control mode
(Note 7)
2%Close/2%Hold/Normal
Control mode setting at flow rate setting<2%.
2%Close: Valve Close
2%Hold: 2% Control
Normal: Normal Control
2%Close
Communication
protocol
9600 to 38400bps
8bit / 7bit
Odd/Even/ None
1bit / 2bit
Baud rate
Character length
Parity
Stop bit
9600bps
7bit
None
2bit
Note
6)
Zero adjustment error alarms regardless of the “Enable” / “Disable” of the alarm.
Note
7)
This table is the setting when less than 2% Close setting "JA0A0" is specified.
·
If the zero adjust button on the top of the device is pressed and held for over 5 seconds,
the communication protocol is reset to default value (factory shipped value).
9. Operation
(1) Preparation, operation
1) This product is packed in a clean room before shipment. Please break the seals in a
clean room after taking it out of its box.
2) Check the liquid type and flow rate, and check the direction of the gas flow and the
MFC before installation.
3) Check for gas leaks from the tubing with a helium (He) leak detector.
4) Connect the interface connectors according to the Connector table.
5) Power requirements are +15VDC:100mA and -15VDC:50mA.
Check the voltage, polarity and capacitance of the power supply voltage.
6)
Turn on the power supply and let the equipment warm up for at least 5
minutes (Recommended time: 30min).
7)
Adjust the zero point by pressing the zero-adjustment switch located on the top of
the LC.
Before zero adjustment, check that liquid is not being supplied and
the device was warmed up for 30 minutes or more in order to ensure sensor
stability.
8)
Input the flow rate setting signal and supply gas with required differential pressure to the
LC. The LC will begin to control the liquid flow in proportion to the preset voltage.
Full-scale voltage is 5VDC. Maximum input voltage is ±15.5VDC.
9)
When the output flow rate signal is used, the tolerance voltage of the external
device should be more than ±15.5VDC. When the power is supplied, there is the
possibility to achieve the maximum voltage in the range of ±15.5VDC.
10)
When a highly reactive liquid is used, thoroughly purge all foreign matter from
the tubing and the LC before operation.
11)
When contaminated liquid is used, install a filter at the equipment inlet.
12)
Use the LC within the range of the operating temperature, and keep it at the
same temperature with the gas. If used
in any environment that does not meet the above-mentioned requirements,
the flow rate cannot be measured accurately and the device may fail.
13)
Do not switch the power supply on and off within one second. It may cause
failure.
14)
Helium (He) gas is recommended for pushing the liquid. If any other gas is used,
the
dissolved gas will produce bubbles, and it may make the control unstable.
15)
Bubbles may become the cause of the unstable control. So, perform the vacuuming
of liquid line thoroughly before the introduction of liquid (Recommended).
(2) Usage of the digital interface
This unit supports RS-485 interface. Therefore, with the use of the digital
interface, high performance liquid mass flow control can be achieved. Please
refer to the digital interface manual.
10. Product warranty
(1) Period
This product is guaranteed for a period of 1 year from the date of
shipment. Defects are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage
caused by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty.
1) Failure caused by by-product of liquid or gas used
2) Failure caused by misuse (including careless operation) or incorrect repair or modification
3) Failure caused by falling or dropping after purchase
4) Failure caused by fire, earthquake, flood, lightning or other natural disasters
Even if the warranty period is still in effect, repair service may not be provided
in the following cases.
1) When the kind of liquid or gas used in the product is unclear
2) The product is returned with liquid or gas remaining inside and safety cannot
be confirmed
Please be aware that this device is a precision instrument and the generation
of excessive electrical noise, changes in liquid temperature or pressure
fluctuations may result in unstable control.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
Corporate Headquarters
4-1-23 Sekinotsu, Otsu City, Shiga Pref. 520-2277, Japan
TEL.
+81-(0)77-536-2210 FAX. +81-(0)77-536-2215
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