LN0538E2108D0
Heat Exchanger
Instruction Manual
HX-0020J Series
Safety precautions
Incorrect handling may cause death or injury
.
(1) Before connecting with the fittings, check if no damage or problems are found on
the fittings. Connect properly and make sure that leak test is conducted before
actual operation to prevent fluid from leaking into the atmosphere
(Hereinafter,
the fluid used is referred as "gas" or "fluid").
(2)
DO NOT
apply any fluids corrosive to
materials exposed to gas. Corrosion
may cause fluid to leak into the atmosphere. Please confirm the physical
properties of
fluid before using.
(3) This device is not designed as an explosion-proof structure.
DO NOT
use this device in a place where explosion-proof structure are required.
Doing so may cause fire or explosion.
(4) Prepare temperature controller unit when operating Vaporizer/Heat
Exchanger and do not set the temperature over than maximum operating
temperature. Wring temperature setting may cause fire or destruction of the
device. It is recommended to add abnormal overheating detector if
necessary.
(5) This device must be earthed before use. Otherwise, there is the risk of
electric shock.
(6) Thermal switch is equipped in Vaporizer/Heat Exchanger to prevent
overheating. However, the operating temperature of thermal switch would
vary due to operating conditions and ambient temperature.
(7) Attach/remove connector and terminals, please make sure that power supply
turning off. It may cause fire or shock hazard.
Incorrect handling can cause medium or
slight injury or
may cause
damage to, or loss of, facilities or equipment.
(1) Observe the listed in the WARNING (above).
(2) Use out-of-spec power supply will cause electric shock, fire, and
malfunction of device.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may
cause fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. Modification may result in fire or failure of
the device.
(5) A warm-up period of 60 minutes is recommended after reaching the set
temperature. Otherwise, the output gas temperature will be low.
(6) This device is a precious device, please handle it carefully. Dropping down
or handing it carelessly will cause damage. Please use assist instrument
while moving or setting the device.
(7) Please use a screw with depth of 5mm or less from the case surface when
mounting HX by the hole on the surface (M3). It will crush the internal
surface of the product, and lead the break.
(8) The surface of device gets high temperature while heating up. Please wrap
up the device to prevent careless touch. Please be careful to deal with the
device while it is working because of the risk of burning from high
temperature. Please conduct replacement after checking that the device has
cooled down.
1. Introduction
This manual explains basic operation of the HX-0020J Series (Hereinafter
referred as "HX"). Please read through this manual carefully to familiarize
yourself with the features of HX.
.
2. Summary
HX is an ultra-clean high efficiency fluid heat exchanger unit employing Lintec’s
high efficiency liquid vaporization technology with maximum operating
temperature up to 200 °C and maximum heat exchange rate up to 10SLM. This
apparatus is employed over a wide range of applications from semiconductor
industries to other major manufacturing sectors.
3. Features
RoHS compliant.
4. Specification/ Dimensions
(1) Specification
Product name
Heat Exchanger
Model
HX-0020J Series
Flow rate (N2)
10SLM
Pressure loss(N2)
24kPa (10SLM, 200°C)
Withstand pressure
(Gauge pressure)
1 MPa(G)
Leak integrity
Less than 1×10
-11
Pa·m
3
/sec (He)
Operating condition
Continuous operation
Operating temperature
15 to 50ºC (Without dew condensation)
Maximum operating
temperature
200ºC
Recommended temperature
control method
PID control
Material exposed to gas
Stainless steel 316L /
Stainless steel 316L(EP)
Fitting
Inlet: 6.35mm (1/4”)
VCR type female
Outlet: 6.35mm (1/4”)
VCR type male
Heater
120V 100W
(100V 69.4W)
240V 100W
(200V 69.4W)
Power source
AC100 to 120V
AC200 to 240V
Thermocouple
K type 1pc
Thermal switch Specification
(Note1)
Over 230±10ºC OPEN
Return operating temperature 200±15ºC CLOSE
Electrical rating (With resistance load)
DC42V/200mA, Min:10mA
Mounting position
Free,
Except Upright with the connectors on the top
Weight
Approx.1kg
Standard accessories
None
Note1)
In actual operation, there may be a difference between the temperature at the
temperature control point and the temperature at which the thermal switch operates.
(2) Dimensions
