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LEYBOLD VACUUM

TURBOVAC
TW 250 S

Wide-Range Turbomolecular
Pump with Integrated or External
Frequency Converter

Cat. Nos.

113 52, 114 37,

800150V0007 /09 /11 /12 /13 /14 /16

and pumps modified by
Leybold Vacuum

Operating Instructions

GA05137_1102

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Содержание TURBOVAC TW 250 S

Страница 1: ...LD VACUUM TURBOVAC TW 250 S Wide Range Turbomolecular Pump with Integrated or External Frequency Converter Cat Nos 113 52 114 37 800150V0007 09 11 12 13 14 16 and pumps modified by Leybold Vacuum Oper...

Страница 2: ...ing 35 3 4 Bakeout 36 3 5 Removing the pump from the system 37 4 Maintenance 38 4 1 Cleaning 38 4 2 Service by LEYBOLD 38 5 Troubleshooting 39 6 Spare parts 42 EEC Manufacturer s Declaration 43 Index...

Страница 3: ...oxi mately 15 minutes after the LEDs have tur ned off until the pump has arrived at stand still After a mains power failure the pump can run up automatically once more Electrical hazards Warning Mains...

Страница 4: ...lug any connectors only when the mains voltage is switched off and the pump does no longer turn the green LED is off Separating the connections while the mains power is still applied or while the pump...

Страница 5: ...ses operation without a forevacuum pump If reactive gases in low concentrations must be pumped please consult with Leybold During operation the pressure inside the pump is so low that there is no dang...

Страница 6: ...ing yoke The pumps exhibit a threaded hole used as the connec tion point for venting This port is sealed at the factory with a screw and gasket ring The TURBOVAC TW 250 S has an additional purge gas d...

Страница 7: ...Description 7 GA 05137_1102 12 2003 Fig 1 Section through the pump High vacuum flange Rotor Stator Bearing Motor Fan Bearing Venting port purge gas Forevacuum connection...

Страница 8: ...plug conductor ferrules 800102V0001 with US plug 5 15P conductor ferrules 800102V1001 OEM power supply with screw terminals 1 3 Ordering data 1 3 1 Pumps TURBOVAC TW 250 S DN 100 ISO K air cooling wit...

Страница 9: ...play TURBO CONTROL 300 800100V0001 supplies the TURBO DRIVE S with 24 V DC plug play cables desktop unit or rack mountable with power switch with start stop switch for the turbomolecular pump remote c...

Страница 10: ...tomer s software Record parameter data 800110V0102 Adaptor RS232 RS485 for 220 V Euro plug 800110V0101 GSD file for Profibus DP upon request Can be used in connection with the following interfaces For...

Страница 11: ...280 70 Venting valve 110 120 V AC 280 72 Venting valve 24 V AC 280 73 Venting valve 24 V DC 280 74 Mounting kit for power failure airing valve or venting valve 863 20 Flange heater DN 100 CF only for...

Страница 12: ...tions G 1 8 Cooling water data see Section 2 4 1 4 2 TURBO DRIVE S Supply voltage 24 V 5 Residual ripple 2 When operating a TW 250 S Max power consumption 140 W Max peak current input side 6 A Require...

Страница 13: ...h2 h3 h4 h5 h8 20 22 22 40 20 37 14 12 Fig 2 Dimensional drawing for the pump dimensions in mm Pump with water cooling and frequency converter Frequency converter mounted with distance sleeves REMOTE...

Страница 14: ...ns in mm 102 10 1 10 1 10 2 10 3 10 4 10 5 10 5 10 2 10 1 1 10 T R I V A C D 1 6 B 10 4 10 3 T R I V A C D 8 B TURBO VAC TW 250 S ECODRY M 50 Hz mbar 1 Fig 4 Operation diagram for nitrogen Inlet press...

Страница 15: ...TATUS 14 5 TURBO DRIVE S HEAT SINK HEAT SINK HEAT SINK HEAT SINK Fig 5 Dimensional drawing for the frequency converter with RS 485 interface and of the OEM power supply dimensions in mm Drive X 3 HEAT...

Страница 16: ...danger of burns up to approx 80 C 176 F Provide protection against contact with the hot components 2 1 Operating environment The maximum permissible ambient temperature of the pump is 40 C 104 F Do n...

Страница 17: ...ue of up to 200 Nm will have to be absorbed by the system To accomplish this a minimum of 4 clamping bolts are required for securing an ISO K type high vacu um flange Clamping bolts must be torqued do...

Страница 18: ...d from guarantee cover age Insert the splinter guard so that the surface curvature is at the top and apply some pressure lightly at the rim so that the splinter guard engages The splinter guard must n...

Страница 19: ...e 14 is a schematic diagram of a pump system incorporating a turbomolecular pump and a TRIVAC forevacuum pump with an anti suckback valve A separate safety valve is provided for oil sealed foreva cuum...

Страница 20: ...high vacuum flange DN 100 ISO K and aluminium housing 0 1 2 3 4 5 0 1 2 3 4 mbar operation not possible water cooling required or air cooling with max ambient temperature 25 C 77 F and separate freque...

Страница 21: ...ifications Feed temperature 20 40 C Feed pressure 3 to 7 bar absolute Cooling water requirement See Fig 11 Appearance colourless clear free of oils and greases Sediments 250 mg l Particle size 150 m p...

Страница 22: ...light contamination Please contact Leybold for assistance in making the decision as to which media can be pumped with or with out purge gas In processes which require purge gas the pump will have to b...

Страница 23: ...ump 2 Forevacuum gauge port 3 Forevacuum pump 4 Resonance damper 5 Adsorption trap 6 Forevacuum valve 7 Vent valve 8 High vacuum valve 9 Valve in the roughing pump line 10 Electronic frequency convert...

Страница 24: ...er and suitable connector cables Route all cables so as to protect them from damage Do not expose the pump the frequency converter or the connections to water Disconnect and connect the cable connecti...

Страница 25: ...wrong polarity may cause the internal SMD fuse to blow The fuse can only be changed by the Leybold Service Connect the power supply to the mains Emergency shutdown By shutting down the power supply vo...

Страница 26: ...OTE max 20 m Connections 26 GA 05137_1102 12 2003 Power supply Power supply Fig 19 Connecting the power supply top at the separate frequency converter bottom at the integrated frequency converter Opti...

Страница 27: ...250V 100 240 VAC 24 V 100 240 V 50 60 Hz max 20 m max 20 m max 5 m REMOTE IN REMOTE FRONT MAINS ON 100 240 V 24 V POWER OUT REMOTE OUT T5 A 250 V 1 0 1 0 OFF T5 A 250 V Programmable logic control PLC...

Страница 28: ...t occurred Start no no yes off passive active off red Error is present pump is at standstill Start yes no yes off passive active flashes red Error is present pump is decelerating Start yes yes yes off...

Страница 29: ...tion of a failing pump production processes in a vacuum Ball bearing temperature P125 or P127 Motor temperature P7 Frequency converter temperature P11 Standby operation Extending the service life for...

Страница 30: ...Max cable length 50 m with bus termination Type of cable 2 wire twisted pair twisted pair cable Differential voltage levels logic 0 see also Standards transmitter 1 5 5 V receiver 0 3 V logic 1 trans...

Страница 31: ...nnection of the RS 485 bus For longer cable runs Links for activation of the bus terminator Bus terminator for longer cable runs Profibus DP The Profibus DP used has been defined in the standards EN 5...

Страница 32: ...inal pump frequency 750 1200 Hz 860 U16 r Highest permissible frequency 19 Minimum setpoint frequency for the pump 375 600 Hz 450 U16 r Lowest permissible frequency 20 Minimum frequency r When the pum...

Страница 33: ...30 150 C 100 U16 r P7 P133 causes the pump to be switched off 171 Error code memory Sequential permanent memory for the last 8 error events Array the last error code which has occurred Error codes se...

Страница 34: ...ead from the graph in Figure 26 Switch on the turbomolecular pump at the frequency converter via pins 7 and 8 of the socket REMOTE X1 see Fig 9 For example via a remote control or with the aid of the...

Страница 35: ...ically The red LED at the frequency con verter lights up Operation 35 GA 05137_1102 12 2003 Warning Under vacuum conditions the pump may take up to one hour to run down when ven ting to atmospheric pr...

Страница 36: ...un ning pump will greatly influence the load on the rotor stator pack and the bearings The slower the pump is vented the longer the service life of the bearings will be The pump must not be vented to...

Страница 37: ...Many of these gases and deposits form acids when they come into contact with humid air This will result in serious corrosion damage to the pump To avoid health hazards and corrosion damage when the p...

Страница 38: ...e or renew the adsorption agent regularly refer to the operating instructions provided with the trap Caution The pump must only be opened by such persons who have been authorised by Ley bold to do so...

Страница 39: ...ble Operator maintenance staff Operator Maintenance staff Leybold service Operator maintenance staff Maintenance staff Operator maintenance staff Leybold service Operator maintenance staff Maintenance...

Страница 40: ...nected to Check connecting cable TURBO DRIVE Wrong connector cable pump Use standard cable see Section 1 3 frequency converter Power supply builds up the DC Use power supply recommended by too slowly...

Страница 41: ...surement sensors soiled Clean or replace the sensors Leaks at the equipment lines Check for leaks or the pump Pump soiled Clean the pump Forevacuum pump provides Check the ultimate pressure of the ins...

Страница 42: ...ignation Order No Blind plug with gasket M5 200 23 006 Clamping yoke DN 16 200 18 372 Screw M4 x 10 200 18 489 O ring 18 x 5 FPM 239 70 176 Centering ring DN 16 KF 231 94 205 Blank flange DN 16 KF 361...

Страница 43: ...with EEC Directive on Low Voltages 73 23 EWG When using the appropriate Leybold accessories e g connector lines valves or fans and when powering the pump with the specified Leybold frequency converter...

Страница 44: ...able to every instal led state in every end product This declaration does not the refore guarantee the EMC characteristics of the end product We herewith declare sole responsibility for the product 1...

Страница 45: ...he finished product final unit machine or plant by the manu facturer of the finished unit machine or plant We herewith declare sole responsibility for the product 1 Product Inverter 2 Manufacturer Ind...

Страница 46: ...RBO DRIVE S turbomolecular pump with frequency converter has been tested by the T V Rheinland of North America according to the requirements of NRTL applied standards UL 3101 1 10 93 It is in complian...

Страница 47: ...pment and components which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and b...

Страница 48: ...ssure 6 12 14 20 36 39 forevacuum pump 5 19 23 34 36 39 41 functional extra low voltage 3 25 H Hazardous gases 3 5 19 37 heat sink 8 10 25 44 45 High vacuum flange 3 7 17 18 20 Holweck 6 humidity 3 12...

Страница 49: ...Notes 49 GA 05137_1102 12 2003...

Страница 50: ...49 51 Fax 34 93 685 40 10 Sweden LEYBOLD VACUUM SCANDINAVIA AB Box 9084 40092 G teborg e mail info leybold se Sales and Service Phone 46 31 68 84 70 Fax 46 31 68 39 39 Switzerland LEYBOLD VAKUUM SCHWE...

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