LEYBOLD TURBOVAC 340 M Скачать руководство пользователя страница 1

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TURBOVAC
340 M
340 MC
340 MCT
341 MCT

Turbomolecular Pumps

with Magnetic Bearing

Cat. No.

855 80/81/82/83

894 32, 855 97

894 33

894 34

Operating Instructions

Vacuum Pumps

Instrumentation

Fittings and Valves

LEYBOLD VACUUM

GA 05.123/3.02

Pumps International

www.PumpsInt.com

Содержание TURBOVAC 340 M

Страница 1: ...CT Turbomolecular Pumps with Magnetic Bearing Cat No 855 80 81 82 83 894 32 855 97 894 33 894 34 Operating Instructions Vacuum Pumps Instrumentation Fittings and Valves LEYBOLD VACUUM GA 05 123 3 02 P...

Страница 2: ...and venting valve 25 4 2 Removing the pump from the system 26 4 3 Service at Leybold s 26 Warning Indicates procedures that must be strictly observed to prevent hazards to persons Caution Indicates p...

Страница 3: ...t gases They are not suitable for pumping corrosive or reactive gases The TURBOVAC are fitted with purge gas device The gas protects only the bearing section and the TURBO VAC motor Some media e g alu...

Страница 4: ...if impacts occur during operation These bearings use no lubricant They also provide axial support of the pump rotor when the frequency converter is switched off A DC motor without commutator is used t...

Страница 5: ...touch down bearing 3 Rotor 4 Stator elements 5 Permanent magnet bearing at center of gravity 6 DC motor 7 Bottom touch down bearings 8 Purge gas connection 9 Stabilizer 10 Axial sensor Fig 3 TURBOVAC...

Страница 6: ...vacuum area only by a narrow slit a pressure higher can build up there than in the forevacuum area This results in continuous gas flow from the motor area to the forevacuum area The gas flow prevents...

Страница 7: ...for purge gas operation Purge gas valve Purge gas connection pressure abs 1 0 1 5 bar Purge gas dry nitrogen argon or similar Purge gas throughput at purge gas pressure 1 0 bar see at purge gas pressu...

Страница 8: ...0 C F1 F2 F3 D 162 E 178 A DN 100 80 114 B 109 300 C F1 F2 F3 D 162 E E D B 60 111 60 50 111 F 164 123 TURBOVAC 340 MCT TURBOVAC 340 M TURBOVAC 340 MC TURBOVAC 341 MCT Cat No Dim h 855 80 311 855 81 3...

Страница 9: ...rating Instructions 200 91 437 1 6 Ordering data TURBOVAC with high vacuum connection flange DN 100 ISO K DN 100 CF DN 160 ISO K DN 160 CF Electronic frequency converter TURBOTRONIK NT 340 M 855 80 85...

Страница 10: ...ces on the base flange see fig 6 Having unpacked the TURBOVAC only put it down onto its seal ed high vacuum connection flange Every other possibi lity will be too unstable Caution Be careful not to da...

Страница 11: ...e TURBOVAC is permanently flanged to a vacuum chamber with a weight exceeding 100 kg it will not be necessary to secure it in any other way In case of lighter vacuum vessels secure the pump addi tiona...

Страница 12: ...ge mounting using vibration absorbers Fig 9 Using ISO K flanges Integrating the outer centering ring max 100 mm 4 inch Vibration absorber max 100 mm 4 inch max 100 mm 4 inch Permissible only for TURBO...

Страница 13: ...Stabilizer connection 4 Forevacuum connection flange 5 Red LED lights when the magnetic bearing is active 6 DC motor connection 7 Venting flange 8 High vacuum connection flange 9 Splinter guard 10 Pur...

Страница 14: ...kback valve a separate safety valve should be used The safety valve keeps oil from backstreaming from the backing pump and into the TURBOVAC when the system is not running We recommend installing a so...

Страница 15: ...when continuous temperatures in the vacuum chamber exceed 150 C 302 F and the pump is mounted on top of the vacuum chamber when continuous temperatures in the vacuum chamber exceed 250 C 482 F regard...

Страница 16: ...0 341 MCT only For connection and operation of the temperature control see also Operating Instructions for the TURBOTRONIK Plug in the connection line heating collar TURBOTRO NIK to the heating collar...

Страница 17: ...p flange 100 C 212 F TVacuum chamber 300 C 572 F TPump flange 100 C 212 F Fig 14 Permissible continuous temperature in the vacuum chamber With water cooling in all mounting positions TVacuum chamber 2...

Страница 18: ...e purge gas connecting flange 10 10 16 1 of the pump The arrow on the valve must point in the direction of flow of the purge gas i e towards the pump The pin 16 10 must be in the withdrawn position an...

Страница 19: ...rings 5 Diaphragm filter 6 Hose nozzle 7 Venting bypass 8 Solenoid valve 9 Plug 10 Pin Fig 16 Purge gas and venting valve fitted to a TURBOVAC schematic Time not allowed not allowed ideal Ar Air N2 Pu...

Страница 20: ...ting Instructions for details regarding its mounting connection and operation The electronics for the magnetic bearings will have to be adjusted to accommodate the particular pump mounting orientation...

Страница 21: ...he process 3 2 Operation The magnetic bearing in the TURBOVAC are immune to wear In addition to the magnetic bearings the TURBO VAC is equipped with touch down bearings which protect the rotor against...

Страница 22: ...that the components which are flanged on directly are not heated to beyond 80 C 176 F The backing pump must be in operation 3 4 Switching off See the TURBOTRONIK Operating Instructions Vent the TURBOV...

Страница 23: ...st either be opened simultaneously or before If the TURBOVAC is vented only via the purge gas valve the prescribed pressure rise curve for the TURBOVAC will be maintained Caution The pressure in the m...

Страница 24: ...ing audible running noises It cannot be excluded that the touch down bearings would be irreparably damaged in such a situation The connection cables between TURBOVAC and TURBOTRONIK are protected agai...

Страница 25: ...any work is performed To change the diaphragm filter first switch off the pump Having vented the pump sufficiently shut off the purge gas supply Remove the purge gas hose from the hose nozzle 20 6 Wi...

Страница 26: ...ge the pump with purge gas for one hour with the backing pump running This helps to remove a large quantity of the process gases from the pump Remove the pump from the process Note If the venting port...

Страница 27: ...7 Key to Fig 21 1 Polyethylene bag 2 Cable tie 3 Plastic caps 4 Plastic adhesive film 5 Venting connection flange blanked off 6 Dry cartridge Fig 21 Sealing the TURBOVAC tightly 3 4 6 5 4 3 2 1 4 3 Pu...

Страница 28: ...s which have been contaminated by biological explosive or radioactive substances will not accepted without written evidence of decontamination Please list all substances gases and by products which ma...

Страница 29: ...Serial Number Complaint Process OEM Equipment Name and Model Process Gas Was the turbopump replaced Yes No If yes replacement pump P N replacement pump S N Date Installed Date Removed Date Received D...

Страница 30: ...23 EWG When using the appropriate Leybold accessories e g connector lines flange heaters valves or fans and when powering the pump with the specified Leybold fre quency converters the protection level...

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