LEYBOLD 250000V01, Руководство по эксплуатации

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Description
10
GA10218_002_C0 - 10/2016 - © Leybold GmbH
Another operating mode of the PHOENIX L300i is the Sniffer mode which can only
be used when a sniffer line (See Chapter
1.1.6 ) is hooked up.
1.1.1 Vacuum Diagram PHOENIX L300i
The vacuum diagram below shows the major components inside the PHOENIX
L300i.
The mass spectrometer (MS) is mainly composed of the ion source with cathode,
the magnetic separator and the ion collector.
Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following
a circular path, the radius of which depends on the mass-to-charge ratio of the
ions. When mass 4 is selected (Default setting) only helium ions can pass this filter
and reach the ion collector where the stream of the ions is measured as an
electrical current. When selected another mass than 4, only the corresponding ions
Fig. 2 Vacuum diagram PHOENIX L300i
Pos. Description
1
MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2 Turbo molecular pump (TMP, provides high vacuum conditions in the MS)
3 Pirani gauge P2 (fore vacuum pressure)
4 Fore pressure pump (provides the fore vacuum pressure for the TMP and
pumps down the parts under test)
5 Inlet Port
6 Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
1
2
7
4
6
5
3