LEYBOLD 230300V02, Руководство по эксплуатации

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7 300544660_002_C1 11/2016 - © Leybold
2 Description
The vacuum transmitter offers a four (4) decade measurement range and the measurement is based on the
electrical capacitance between the diaphragm and a fixed electrode. Its output is the same regardless of the
process gas composition
–
gas correction factors are not needed.
It can be used in a variety of applications as a stand-alone unit or with a suitable controller unit. The CTR 100 N
transmitter
’s primary communication method is its
0
–
10 VDC analog output signal. This output can be interfaced
to external analog equipment for pressure readout or control. The transmitter also has a RS232 digital
communication interface for setup of transmitter parameters and to provide real time pressure measurement.
Please see RS232 Instruction Manual 300544665
for further details about this interface.
Sensor technology
The transmitter operates by measuring the electrical capacitance between a thin metal diaphragm and a patterned
electrode. When the process pressure changes, the diaphragm changes its position with respect to the electrode,
and that causes a change in electrical capacitance. That change in capacitance is directly proportional to the
change in pressure. Because the diaphragm position is not dependent on the gas type, the transmitter provides
the same output signal regardless of gas composition. The diaphragm and sensor is entirely composed of nickel
alloy, which makes it resistant to damage caused by corrosion or oxidation.
Applications
The transmitter can be used in many different vacuum applications within the semiconductor, analytical, and
coating industries:

General vacuum pressure measurement

Gas backfilling measurement and control

Thin film deposition processes such as evaporation, sputtering, and chemical vapour deposition (CVD).

Advanced materials processes, such as vacuum furnaces and ceramic sintering.

Vacuum degassing of solvents and oils.

Plasma and chemical cleaning.

Analytical instruments such as electron microscopes, thermal analyzers, and mass spectrometers.
Disposal (European Union only)
The transmitter is manufactured according to the RoHS directive.
For the benefit of the environment, at the end of life of the transmitter, it should not be disposed in
the normal unsorted waste stream. It should be deposited at an appropriate collection point or
facility to enable recovery or recycling.
Attention
!