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LEYBOLD 230300V02, Руководство по эксплуатации

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LEYBOLD 230300V02 Скачать руководство пользователя страница 17

17    

300544660_002_C1

 11/2016

 - © Leybold

 

5.2  Analog Output 

The transmitter can provide pressure measurement output as an analog voltage value or RS232 digital value. For 
details about the digital interface please refer to the RS232 Instruction Manual 300544665.  The analog output is 
linear with pressure as shown in the graph below.

 

 

 

 
 

P

 

(

Torr

)

 =

Pressure

 

in

 

Volts

*

Device Full Scale

 

Range

 

in

 

Torr

10

 

 

 

P

 

(

mbar

)

 =

1

.

3332

*

Pressure

 

in

 

Volts

*

Device Full Scale

 

Range

 

in

 

Torr

10

 

 

P

 

(

Pascal

)

 =

133

.

32

*

Pressure

 

in

 

Volts

*

Device

 

Full Scale

 

in

 

Torr

10

 

 
 

Pressure Units Conversion 

Transmitter Full-Scale 

Range - Torr 

mbar 

Pascal 

0.1 

0.133322 

13.33224 

1 

1.333224 

133.3224 

10 

13.33224 

1333.224 

20 

26.66447 

2666.447 

100 

133.3224 

13332.24 

1000 

1333.224 

133322.4 

 
 
 
 
 
 
 
 

0.00%

20.00%

40.00%

60.00%

80.00%

100.00%

0.00

2.00

4.00

6.00

8.00

10.00

Pe

rcen

ta

ge

 of

 Fu

ll 

Sc

al

e

Output Voltage - VDC

CERAVAC Output vs. % Full Scale

Содержание 230300V02

Страница 1: ...00 N Operating Manual 300544660_002_C1 Part Numbers 230300V02 230301V02 230302V02 230303V02 230304V02 230305V02 230306V02 230307V02 230308V02 230309V02 230310V02 230311V02 230312V02 230313V02 230314V02 230315V02 230316V02 230317V02 230318V02 230319V02 230340V02 ...

Страница 2: ...nical 10 3 1 Conforming utilization 11 3 2 Non conforming utilization 11 3 3 Process Compatibility 11 4 Transmitter Installation Electrical 14 4 1 Input Output Wiring 14 4 2 Electrical Connection Schematic 14 5 Operations 16 5 1 Pressure Output 16 5 2 Analog Output 17 6 Functions 20 6 1 Interface Connector 20 6 2 LED Status Indicator 20 6 3 Vacuum Zero Adjustment 20 7 FAQ Frequently Asked Question...

Страница 3: ...the materials and the process media Consider possible reactions e g explosion of the process media due to the heat generated by the product Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum components are contaminated Adhere to the releva...

Страница 4: ... and possibly damage your health Safe Inlet Pressures Never operate at pressures higher than the rated maximum pressure refer to maximum allowable pressure from Technical Data Chapter 2 section 2 1 CE marking The transmitter complies with European standards for CE marking Refer to Declaration of Conformity in Chapter 10 Caution vacuum component Dirt and damages impair the function of the vacuum co...

Страница 5: ...ectrical connections in Chapter 4 0 4 Liability and Warranty Leybold assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the product documentation The...

Страница 6: ...mage If found notify the carrier immediately Please be sure that your transmitter package contains these items 1 pcs CTR CERAVAC Transmitter 1 pcs English short form manual P N 300544675_002_C1 1 pcs German short form manual P N 300544675_001_C1 1 pcs Product Inspection and Test Report 1 pcs User switch adjustment tool If any items are missing please contact Leybold ...

Страница 7: ... that causes a change in electrical capacitance That change in capacitance is directly proportional to the change in pressure Because the diaphragm position is not dependent on the gas type the transmitter provides the same output signal regardless of gas composition The diaphragm and sensor is entirely composed of nickel alloy which makes it resistant to damage caused by corrosion or oxidation Ap...

Страница 8: ...R8 fitting 6 05 cm3 No fitting 6 29 cm3 Housing material ABS plastic UL 94 V 0 rated plated Fitting material Incoloy VCR fitting or 300 series stainless steel KF and CF fittings Weight KF16 fitting 550 g CF 16 fitting 548 g VCR8 fitting 579 g No fitting 513 g Operating temperature 0 to 50 C 32 to 122 F Bake out temperature Power off fitting only 50 C 122 F Humidity 25 95 Relative Humidity non cond...

Страница 9: ...figurations 2 3 Accessories Part Part no Graphix One 230680V01 Graphix Two 230681V01 Graphix Three 230682V01 Cables Type C 5 Meter 12455 Cables Type C 10 Meter 230022 Cables Type C 15 Meter 12456 Cables Type C 20 Meter 12457 Cables Type C 30 Meter 12458 ...

Страница 10: ...10 300544660_002_C1 11 2016 Leybold 2 4 Dimensions mm P N 230300V02 to 230319V02 230340V02 Flanges KF 16 CF 16 Tube 8 VCR 3 Transmitter Installation Mechanical Caution ...

Страница 11: ...to the instrument The transmitter is not intended for use above maximum allowed pressure refer Technical Data in Chapter 2 3 3 Process Compatibility The transmitter is intended for use in non condensing process environments The transmitter can be used in corrosive environments example semiconductor processes where aggressive gases like chlorine and fluorine are used but users should expect drift a...

Страница 12: ... Torr or higher require little or no span adjustment if they are mounted horizontally on the customer s system However transmitters with ranges lower than 1 Torr will experience a span shift due to the effects of gravity on the sensor diaphragm if they are mounted horizontally These transmitters would also see a degraded accuracy value Explosive Environments The sensor is kept at ambient temperatu...

Страница 13: ...itions or inrush of gases will not cause sensor damage unless the gas pressure exceeds the maximum overpressure specification of the product If the transmitter is exposed to a pressure event that exceeds the maximum overpressure specification its sensor may experience a permanent span and calibration shift that cannot be reversed except by replacement of the sensor Vacuum connections The transmitt...

Страница 14: ...the braid to the metal hoods at both ends of the cable with the end for power supply connected to earth ground 4 2 Electrical Connection Schematic Ensure a low impedance electrical connection between the transmitter body and the grounded vacuum system to shield the sensor from external electromagnetic sources Ensure that the analog output is connected to floating input I O Connector 15 pin 15 pin ...

Страница 15: ...10 2 12 11 5 6 15 7 Ident Remote Zero TXD RXD Reserved Signal Output 0 01uF Signal Rtn 0 02uF Power Rtn 15V Power In 3 1 3 4 8 9 13 14 10 2 12 11 5 6 15 7 3 Shielded to case 14 to 30V Remote Zero Adjust CTR100N Electrical Connection V Voltmeter PC 2 3 5 ...

Страница 16: ...due to low signal levels Closed Loop Pressure Control The transmitter s output signal can be used as a reference for a closed loop pressure control system In such a system the analog or digital output of the transmitter is sent to a dedicated controller or control element which then compares the actual chamber pressure as read by the transmitter to an established set point The controller then deci...

Страница 17: ...Torr Pressure in Volts Device Full Scale Range in Torr 10 P mbar 1 3332 Pressure in Volts Device Full Scale Range in Torr 10 P Pascal 133 32 Pressure in Volts Device Full Scale in Torr 10 Pressure Units Conversion Transmitter Full Scale Range Torr mbar Pascal 0 1 0 133322 13 33224 1 1 333224 133 3224 10 13 33224 1333 224 20 26 66447 2666 447 100 133 3224 13332 24 1000 1333 224 133322 4 0 00 20 00 ...

Страница 18: ...t range The table below provides the recommended vacuum pressure needed for each available range Once the recommended zeroing pressure has been achieved the zero pushbutton offers multiple adjustment modes depending on the customer requirements The first mode is to set the transducer s output to zero Briefly press the ZERO button with a small diameter rod such as the User switch adjustment tool pr...

Страница 19: ...eased or the maximum permitted offset maximum of 2 the transducer s full scale range is reached o To make additional incremental adjustments in the same direction either press and release for each incremental steps or press and hold the zero button within 3 secs after the ZERO button is released until desired output is reached Note Please allow about 1 sec for the output to settle o If direction n...

Страница 20: ...section 2 1 Technical Data 6 2 LED Status Indicator The green LED status indicator has the following stages 1 No indication Mains power not connected 2 Solid Normal operation measurement mode 3 Blinking Other mode error or over under range 6 3 Vacuum Zero Adjustment The zero pushbutton is used to zero the analog and digital outputs of the transmitter It can be used for this function at any pressur...

Страница 21: ...e Q Can the transmitter withstand instant ventilation A Yes The sensor element is extremely robust to mechanical forces and can withstand continuous pressure cycles and instant venting to atmospheric pressure However depending on the temperature of the ventilation a shift in the transmitter s output may occur due to either heating or cooling effects from the airflow Q Can the transmitter withstand...

Страница 22: ...in the transmitter s resolution the user must note the actual base pressure achieved prior to zeroing the transmitter Then follow either of the two methods given below Perform zeroing of the transmitter via the pushbutton and then use the ramp function method described under Zero Adjustment with RAMP Function in Chapter 5 Section 5 2 to reach the base pressure Perform zeroing of the transmitter vi...

Страница 23: ...ter exposed or heating or cooling air stream Incorrect pressure value at low pressure Transducer not zeroed Contaminated sensor Corroded sensor Transmitter exposed to heat or cooling air stream Incorrect pressure value at high pressure Transducer not zeroed Contaminated sensor Corroded sensor Transmitter exposed to heat or cooling air stream Zero pushbutton does not work Pressure higher than 20 of...

Страница 24: ...ched the contractor is to be informed about any possible contamination of the compressor vacuum pump or component sent in for servicing Based on this information the contractor will be able to take the necessary safety precautions Preparation before dispatch Before shipping any parts the user must complete the following declaration and add it to the dispatch papers All dispatch instructions laid d...

Страница 25: ...ps Application Process B Condition of the equipment No1 Yes No Contamination No1 Yes 1 1 Has the equipment been used toxic 2 Drained Product service fluid corrosive 3 All openings sealed airtight flammable 4 Purged explosive 2 If yes which cleaning agent radioactive 2 and which method of cleaning microbiological 2 1 If answered with No go to D other harmful substances C Description of processed su...

Страница 26: ...26 300544660_002_C1 11 2016 Leybold 10 CE Declaration of Conformity ...

Страница 27: ...27 300544660_002_C1 11 2016 Leybold 11 Notes ...

Страница 28: ...28 300544660_002_C1 11 2016 Leybold 12 Sales and Service ...

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