COMBIVAC CM 31
Cat. No.157 89, 896 89, 897 89
Operating Instructions
Vacuum Pumps
Instrumentation
Fittings and Valves
LEYBOLD VACUUM
GA 09.504 / 5.02
Страница 1: ...COMBIVAC CM 31 Cat No 157 89 896 89 897 89 Operating Instructions Vacuum Pumps Instrumentation Fittings and Valves LEYBOLD VACUUM GA 09 504 5 02...
Страница 2: ...Electrical connection 8 2 2 1 Changing the line voltage setting and exchanging the fuses 9 2 3 Controls and their functions 9 2 3 1 Bar graph display 9 2 3 2 Digital display 10 2 3 3 Measurement unit...
Страница 3: ...format for printer output 27 3 3 2 3 Output rate for printer output 27 3 3 2 4 End character 27 3 4 Data output and data formats 27 3 4 1 Measurement data output 27 34 1 1 Remote control operation 27...
Страница 4: ...e The COMBIVAC CM 31 is a universal vacuum gauge which combines two principles of measurement Pirani Thermovac and cold cathode Penningvac for the measurement and control of vacuum pressures within th...
Страница 5: ...indicating cir cuit with n o contact Max switching voltage 250 V AC 60 V DC Max switching capacity 5 A AC resistive load 0 7 A DC Contact life 60 000 cycles Setting range of the variable thresholds P...
Страница 6: ...ntrol arrange ments The two THERMOVAC channels are immediately active as soon as the line voltage is applied The PEN NINGVAC channel may be switched on and off through the second THERMOVAC channel TM...
Страница 7: ...erminal strips 200 60 806 One 5 way screw terminal strip 200 60 807 Three 8 way screw terminal strips 200 60 808 Four screws M 3 x 8 mm 200 80 029 Support stand for table use 200 60 900 Four adhesive...
Страница 8: ...t or after having exchanged a sensor TM channel TEST and noSEn will be displayed alternatingly for 1 to 5 seconds While this is in progress the instrument is trying to determine which THERMO VAC senso...
Страница 9: ...ntrols and the dis play elements is given in Fig 2 The instrument is operated via 7 keys Note When pressing a key which has no function in that parti cular operating mode symbol 2 9 comes on 2 3 1 Bar...
Страница 10: ...ressure display Trigger and equipment modes are indicated in the status display area 3 1 These are related to the keys below which are used to select the measurement channel An overview giving the arr...
Страница 11: ...not be active However if these conditions have been met once after switching on the instrument will indicate that it is ready Thereafter the triggers are active independently of the pressure cable or...
Страница 12: ...PARA 5 1 key is pressed when wanting to check or change the settings of the various instrument parame ters The PARA message in the status display area comes on and the first parameter page of the cur...
Страница 13: ...modes L Level trigger Both trigger outputs are operated independently of each other Thresholds may be set up either within the range between 1 10 8 and 1 10 2 mbar for PM measurement channel or for T...
Страница 14: ...sten TR 211 TR 201 and TR 205 FIL ni Nickel TR 206 FIL pt Platinum TR 216 Setting when shipped FIL tu Page 7 for the PENNINGVAC channel Instrument parameter page 7 is used for automatic pres sure depe...
Страница 15: ...characteristic 0 0 1 1 5 V 10 V Anl 7 1 10 9 1 10 8 1 10 7 mbar Anl 6 1 10 8 1 10 7 1 10 6 mbar Anl 5 1 10 7 1 10 6 1 10 5 mbar Anl 4 1 10 6 1 10 5 1 10 4 mbar Anl 3 1 10 5 1 10 4 1 10 3 mbar Anl 2 1...
Страница 16: ...he gauge head connector Those terminal strips which are above each other are always related to one THERMOVAC channel The wiring is the same for both measurement channels but the numbering of the pins...
Страница 17: ...0 for external contact on 211 211 HV control input for PM HV ON 212 Ground for HV control input 231 Chart recorder output 0 to 10 V REC 232 Ground for chart recorder output For the PENNINGVAC channel...
Страница 18: ...The required panel cut out is given in Fig 8 2 5 4 Using the CM 31 as a table top instrument When using the CM 31 as a table top instrument a sup port stand Ref No 200 60 900 may be fitted to the bot...
Страница 19: ...ied out as follows Vent the vacuum system and adjust the 100 potentio meter on the THERMOVAC gauge head so that the fol lowing bargraph display is obtained Note In order to ensure a stable but none th...
Страница 20: ...s or a brief mains failure 1 to 3 seconds for example In this case the instrument or the affected mea surement channel is reset to a stable through a Watchdog function Display Status FAULT all other s...
Страница 21: ...open Chart recor der output 10 2 10 6 V 0 to 10 V 10 2 10 6 V 10 2 10 6 V mbar Pa Torr Micron Chart rec output volt 1 0 10 3 1 0 10 1 1 0 10 3 1 0 00 V 2 0 10 3 2 0 10 1 2 0 10 3 2 0 50 V 5 0 10 3 5...
Страница 22: ...r mode and standard resolution mbar Pa Torr Micron Measurement Trigger hysteresis uncertainty Level trigger 1 0 10 3 to 4 9 10 3 1 0 10 1 to 4 9 10 1 1 0 10 3 to 4 9 10 3 1 2 3 4 20 nicht einstellbar...
Страница 23: ...put 10 2 10 6 V 10 2 10 6 V 0 2 10 2 V 10 2 10 6 V mbar Pa Torr Chart rec output volt 1 0 10 9 1 0 10 7 1 0 10 9 0 00 V 2 0 10 9 2 0 10 7 2 0 10 9 0 43 V 5 0 10 9 5 0 10 7 5 0 10 9 1 00 V 9 0 10 9 9 0...
Страница 24: ...0 05 increments 1 00 10 3 to in 0 1 increments in 0 1 increments 6 00 10 3 to in 0 2 increments in 0 2 increments 1 00 10 2 Table 7 Display resolution and display increments Table 8 Assignment Measur...
Страница 25: ...ire an input buffer size of at least 30 characters XON and XOFF handshaking is not used to control the data flow and will lead to error messages The RS 232 C interface requires at least 3 lines Transm...
Страница 26: ...erface will usually not operate properly 3 3 1 4 Acknowledgement character In the remote control mode the A Series instrument will respond to each string it receives and which has been terminated by t...
Страница 27: ...ter In the printer mode the character string CR LF carriage return and line feed is used as the end charac ter see Section 3 3 1 3 3 4 Data output and data formats 3 4 1 Measurement data output 2 4 1...
Страница 28: ...kely to occur When the A series instrument is just processing a com mand or transmitting a string while further characters are being transmitted to the instrument it will ignore these as invalid 3 5 I...
Страница 29: ...nsor see Tech nical Data Thresholds Specifically n nn Mantissa possibly with additional sign mm Exponent always with sign Example TRC W TM1 1 00 2 00 3 5 3 Operating parameters Entry of parameters via...
Страница 30: ...thout test LINE INPUT 1 FailMessg get error code from CM31 LOCATE 4 1 PRINT SPACE 79 clear screen line LOCATE 4 1 PRINT RS232 failure on cold cathode high voltage on command LOCATE 4 40 PRINT FailMess...
Страница 31: ...ype argon LOCATE 9 40 PRINT FailMessg error code to screen ELSE LOCATE 9 1 PRINT SPACE 79 clear screen line LOCATE 9 1 PRINT setting gas type argon successful END IF read current gas type of CM31 PM c...
Страница 32: ...NE INPUT 1 AckNakTest get handshake character without test LINE INPUT 1 FailMessg get error code from CM31 LOCATE 15 1 PRINT SPACE 79 clear screen line LOCATE 15 1 PRINT failure on setting of TM1 no 1...
Страница 33: ...r value to screen END IF take measurement value from CM31 channel TM1 PRINT 1 MESr Tm1 command read measurement value from CM31 TM1 LINE INPUT 1 AckNakTest get handshake character from CM31 IF AckNakT...
Страница 34: ...PC IBM PC Remark for A side Desig Pin Pin Desig Remark for PC side leave unconnected 1 8 DCD possibly connect to 6 link TxD 2 3 RxD link link RxD 3 2 TXD link 4 20 DTR link GND 5 7 GND link link DTR 6...
Страница 35: ...form which we shall send to you upon re quest A copy of this form is printed at the end of the Operating Instructions Declaration of Contamination of Vacuum Equipment and Components Either fasten this...
Страница 36: ...5 Brief operating instructions 36...
Страница 37: ...easurement channel ADisplay resolution STD HIGH For TM measurement channel Cable length alignment for TM CLA CL xxx For PM measurement channel Setting of the analogue output log lin log Ano 8 lin Anl...
Страница 38: ...38...
Страница 39: ...gue numbers 157 89 896 89 897 89 157 90 The product meets the requirements of the following directives EEC Directive on Low Voltages 73 23 EWG LHK GI 0008 02 02 95 LEYBOLD AG Vacuum Technology Bonner...
Страница 40: ...1 80 5 676 30 RSP 09 95 Printed in Germany on chlorine free bleached paper LEYBOLD AG Vakuum Bonner Stra e 498 Bayenthal D 50968 K ln Telefon 0221 347 0 Telefax 0221 347 1250...
