Vacuum Pump System SC/SEM/SH/SR950
Troubleshooting
Translation of original Operating Instructions, English, KNF 125549-125552 07/18
55
Vacuum pump system as a whole
Problem
Cause
Solution
Leaks in hose connection.
Check hoses are sitting correctly on
hose nipples.
Replace any leaky hoses.
Replace any damaged hose nipples.
For ordering numbers see chapter
Only SC/SEM 950:
Leaks in venting valve.
Temporarily close the ventilation
connection (Fig. 2/
18
, p. 13 or
15
, p. 17). If this stops the
leak, leaks are present in the venting
valve. In this case:
Flush the venting valve:
1. Close the gas inlet (Fig. 2/
19
or
16
).
2. If necessary for safety reasons:
Connect inert gas to ventilation
connection. Observe the safety
instructions in chapter 3.
3. Run the vacuum pump system (SC
950 in
evacuation
mode) at 100%
pump capacity.
4. Re-open the gas inlet.
If problem persists, contact KNF
Service.
Condensation in pump
head.
Open gas ballast and flush pump
heads
Dry system with fresh air or, if
necessary for safety reasons, with
an inert gas:
1. Using inert gas: Connect inert gas
source with gas inlet (Fig. 2/
19
,
16
14
,
13
, p. 21) and start
system up in
evacuation
mode
(100% capacity). Observe the safety
instructions in chapter 3.
2. Using air: Open gas line (Fig. 2/
19
,
16
14
,
13
, p. 21) to the
surrounding environment and start
system up in
evacuation
mode
(100% capacity).
3. Close the gas inlet after 30 seconds,
and leave the vacuum pump system
running for 30 seconds under
vacuum.
4. Repeat this process 3–5 times.
If this problem occurs frequently,
place the vacuum pump system at a
higher level than the vacuum
chamber.
Содержание SC 950
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