Keithley S530, Руководство пользователя

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S530 Parametric Test System Test Subroutine Library User's Manual Section 3: Test subroutine library reference
S530-907-01 Rev. A / September 2015 3-23
deltl1
This subroutine estimates MOSFET gate length reduction (

L) using transconductance (g
m
) data obtained from
the
vtext2
subroutine for two different transistors.
Usage
double deltl1(int d1 , int g1 , int s1 , int sub1 , double l1 , int d2 , int g2 , int s2 ,
int sub2 , double l2 , double vlow , double vhigh , double vds , double vbs , double
ithr , double vstep , int npts , int *kflag )
d1
Input The drain pin of Q1
g1
Input The gate pin of Q1
s1
Input The source pin of Q1
sub1
Input The substrate pin of Q1
l1
Input Drawn gate length of Q1, in microns
d2
Input The drain pin of Q2
g2
Input The gate pin of Q2
s2
Input The source pin of Q2
sub2
Input The substrate pin of Q2
l2
Input Drawn gate length of Q2, in microns
vlow
Input
Start of the gate-source voltage (V
GS
) search, in volts
vhigh
Input
End of the V
GS
search, in volts
vds
Input Drain bias, in volts
vbs
Input Substrate bias, in volts
ithr
Input
Drain-source trigger current (I
DS
), in amperes
vstep
Input
V
GS
step size, in volts
npts
Input
Number of points in the V
GS
sweep
kflag
Output Returned status flag:

0 = Normal completion

1 = First g
m
measurement failed

2 = Second g
m
measurement failed
Returns Output Estimated gate length reduction
Details
The
npts
parameter must be greater than 5. If a value less than 5 is used, the subroutine uses 5
points by default.
The equation used for this calculation is:

L = ((Slope
1
/ Slope
2
)

(L
1
- L
2
) / (Slope
1
/Slope
2
- 1.0)
Use this subroutine to infer the variability in the channel length based on the transconductance
comparison of two devices, where the reference device is considerably larger than the second device.