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Instruction Manual

A G R E A T E R

M E A S U R E O F C O N F I D E N C E

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Содержание 590 CV

Страница 1: ...Model 590CV Analyzer Instruction Manual A G R E A T E R M E A S U R E O F C O N F I D E N C E...

Страница 2: ...DIRECT INDIRECT SPECIAL INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS INC HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SU...

Страница 3: ...Model 590 CV Analyzer Instruction Manual 01987 KeithleyInstruments Inc All rightsreserved Cl elind Ohio U S A Fourth Printing February 1999 Document Number 590 901 01 Rev D...

Страница 4: ...ered sequentially When a new Revision is Mzated all Addenda associated with the previous Revision of the manual ax incorporated into the new Revision of the manual Each new Revision includes a revised...

Страница 5: ...s that a shock hazard exists when voltage levels greater than 30V RMS 42 4V peak or 60VDC are present A good safety practice is to expect that hazardous voltage is present in any unknown circuit befor...

Страница 6: ...components in mains circuits including the power transformer test leads and input jacks must be purchased from Keithley Instru ments Standard fuses with applicable national safety approvals may be use...

Страница 7: ...oltage is present in any unknown circuit before measurement Do not exceed 3OVRMS 42 4V peak between analog common and earth ground Inspct YOUIconnecting cables for possible wear sacks or breaks before...

Страница 8: ...more than x2 Measured at 10 rdS s rate CAPAClTANCE NON LlNEAlUTYt OS of range for Q 20 or D O OS 18 28 C TEST VOLTAGE lSmV nns ilO TEST FRBQUBNCY 89011Wkz 1CQkHz 54ollMz IMHz Tolerance O l BIAS SOURCE...

Страница 9: ...10 and 18 rdgls 3yz D k 75 and loo0 rdgis FILTERcl pole analog pole at 37Hz Filters t b capacitance and conduc tame signals For FlLTER off multiply p p noise specification by 5 CAL Initiates ti ation...

Страница 10: ...e noise no more than x2 5 5904 must be caliimted with a particular 59011WK to achieve this ac clmxy level TESI VOIXAGE l5mV rms fU TEST FREQUENCY l 33kHz Tolerance tOI 5901l M ANALOG OUTPUT PERFORMANC...

Страница 11: ...e IEEE488 bus and programming the instrument from a computer SECTION 4 IEEE 488 Programming ItI I Outlines procedures necessary to verify at the Model 590 and the 1OOlcHz and lMH z modules are operati...

Страница 12: ...and Verification Sources SECTION 2 GETTING STARTED 2 1 INTRODUCTION 2 2 FRONT PANEL FAMILIARIZATION 2 3 REAR PANEL FAMEUREATION 2 4 POWERUPPROCEDURE 2 4 1 Line Voltage Selection 2 4 2 Line Power Conn...

Страница 13: ...__ _ 3 18 READING RATES r _ _ _ _ _ I _ _ 3 18 Selecting a Reading Rate 3 18 Display Resolution __ _ _ __ 3 19 Digital Filter _ 3 19 General Rate Selection Considerations I 3 19 1000 Reading Per Seco...

Страница 14: ...I _____ z 3 58 Programming Plotter Setup Parameters _ 3 60 Graph Format 3 62 Plotting a Grid 1_ __ ____ _ _ 3 62 Initiating the Plot ___ 3 62 Aborting a Plot or Grid 3 62 Plotter Error _______________...

Страница 15: ...PANEL ASPECTS OF IEEE 488 OPERATION 48 FrontPanelErrorMessages 48 JEEE 488 StatusIndicators 410 LOCAL Key 411 Simultaneous Front Pane1 and Bus Operation 411 GENERAL BUS COMMAND PROGRAMMING 411 REN Rem...

Страница 16: ...Complete Instrument Status 4x4 Using the Tranilator 41 14 Using ti External Bias Source _ 4ll7 BUSTRANSMISSIONTJMES _ Pll9 Factors Affecting Bus Ties _ ___ __ 4 119 Optimizing Measurement Speed _ 412...

Страница 17: ...nous Detector 6 24 Buffers 624 POWER SUPPLIES 6 24 AC Line Input 6 24 Z DISPLAYANDKEYBOARDcJKUlTS 6 26 Displav 6 26 Kq rd _ 6 27 CABLE CORRECJION PRINCIPLES __ 6 27 Error Models 6 27 InternalModelCorr...

Страница 18: ..._ MicrocomputerandDigitaICircuitryChe ______ _____ __ ___ MotherBoard ___ _ _ _ ____ DisplayBoard _ 1OOkHzand IMHr Capacitance Modules __ FAN FILTER CLEANING AND REPLACEMENT 7 7 25 7 25 7 28 7 28 7 3...

Страница 19: ...Frequency Ermr Messages 3 14 Resstance and ConduaanceRanges 3 15 Converkg Series PamlIe Equivalent Circuits _ 3 16 TypicalF terResponseTimes Y 3 17 ReadingRateSummary _ 3 18 ExsmplesofZeroOperation I...

Страница 20: ...5 2 53 5 4 5 5 E 5 8 5 9 S 10 511 S 12 Equipment and Sources Required for Verification 5 2 Conductance SourceParameters 5 3 Instrument 1OLXHr Capacitance Verification 5 6 Instrument 1OOkHzConductance...

Страница 21: ...oard PartsList 8 13 DigitaIBoard PartsList 8 19 lOOkHz 5901 Module Parts List 831 IMHz 5902 Module Parts List 1 i i i 8 39 IU590 Operational Amplifier 46CV Parts List 8 47 Case Parts 8 50 MiceIIaneous...

Страница 22: ...logFiIterResponse I 3 17 Zero OperationFlowcharts I 3 21 FrontPanel CAL Sequence 3 23 Internal Drift Correction Sequence _f __ __ 3 24 TriggerOvemmOperation _ __ 3 27 ExternalTriggerInputPulseSpecific...

Страница 23: ...atus Word Format Buffer A Zero Group _ _ 4 49 U5 Status Word Format Buffer A Bias Group _ _ _ 449 U6 Statu5 Word Format Buffer A Bias Voltage 4 49 U7 Status Word Format er A Bias Times 450 US Status W...

Страница 24: ...rt 4ll6 SECTION 5 PERFORMANCE VERlFlCATlON 5 l amounting Source onInstrument 5 4 5 2 General Flowchart of Instrument Verification 5 5 5 3 5 11 54 General Flowchart of Analog Output Verification Connec...

Страница 25: ...RTS 8 l E E 8 6 8 8 9 810 all 842 Mother Board Component Location Drawing Dwg No 590 100 8 8 Mother Board Schematic Drawing Dwg No 59O los 8 9 Display Board Component Location hawing Dwg No 5 WIO l 8...

Страница 26: ...G and bias voltage V data taken during testing Two complete sets of C G V d ata can be stored one set can be saved for plotting while another test is being performed l Standard plotter driver softwar...

Страница 27: ...e located at the front of this manual 1 7 UNPACKING AND INSPECTION The Model 590 was carefully inspected and packed before shipment Upon receiving the instrument carefully unpack ail items from the sh...

Страница 28: ...r mounting the Model 590 in a standard lP inch equipment rack or cabinet Model 5904Adapter The Model 5904 extends the 1OOkHz measurement range of the instrument to 2OnF 2Oms The Model 5904 mountsdirec...

Страница 29: ...accuracy verification of a Model 59O lOOk or a Model 59011OCkllM Model 5907 Calibration Sources The Model 5907 sources are intended for cable correction when using the calibra 4 7pF 18pF 47pF ISOpS l...

Страница 30: ...nfor mation in Section 3 2 3 Rear Panel Familiarization Outlines each aspect of the Model 590 rear panel including connectors and switches 2 4 Power Up Procedure Describeshow to connect the ins umentt...

Страница 31: ...ABORT stops plottmg or gn generation Scroll through menu Scroll through menu Enter parameters Display buffer A or bufferB data Transfer buffer A data to buffer B Add second function to some keys canc...

Страница 32: ...rmer Model 5904 Press ZHFJ RANGEagainto cancelX10 NOTE Autorangingis includedforconvenienceonly and should not be used for time critical El Ranges Include 1OOkHZ 2pFl2pS 2nF 2ms 2nF 20mS 2OnF 2Oms Req...

Страница 33: ...the baseline value which is then subtracted from subsequentreadingsandstoredin thebof fer header Note that enablingzero reducesthe dynamicrangeofthe measurement andthatthe zero valueis carriedfrom on...

Страница 34: ...weepthe unit willprocessa completereadingsweep onecom plete readingsequence at all programmedbias steps with up to 450 readings stored in buffer A Both modes are availablewith all trigger sources SWEE...

Страница 35: ...9 z huO3 Wed W Jd 069 IaPW Bl Z aJn6 d...

Страница 36: ...medto lmV but are set in 5mV steps NOTES Type Buffer No Den A PLOTTER GROUP Ed PLOT Pressing PLOT plotsthe datalocatedin the selectedbuffer AorB onan intelligentplot ter over the IEEE 488 bus using th...

Страница 37: ...buffer data PressingBUFFERwhileaccess ing the buf erdisplaysthe last validbufferloca tion PressingENTERdisplaysthefirst valid buf fer location locationXl Press QUITto etit the IATA GROUP A B SHIFT BU...

Страница 38: ...normaloperation however if an error occurs an INVALIDmess ili be displayed SHIFT must be pressed first to access these modes SAVE SAVE allowsyouJo save up to seven completeinstrumentconfiguations in...

Страница 39: ...he changein voltage AV as a functionof constanf capacitance C vs t This mode uses the bias waveform parameters in effect when the readings were taken to displaycapacitanceversus time While in C vs t y...

Страница 40: ...ELEDsindicatewhen the Model590 hasbeen placedin these modeswhen the unit is beingprogrammedover the DEEE 488 bus TheTALKandLISTENindictor showwhen the unit has been addressed to talk or listen respect...

Страница 41: ...ssisground assumingthegroun ngswitchon the rearpanel is in the floating position El OUTPUT OUTPUT providesa compositeofthe l kHz or lMHz dependingon selectedfrequen cy l5mV RhG test voltage and the DC...

Страница 42: ...RNALTRIGGERlNPlJT 1 49 EXTERNALTRIGGER OUTPUT 50 LINE VOLTAGE Selection Swit 51 LIh EFUSE 52 tie Receptacle 53 Fan Fjlter 54 Exhaust Vents Apply 2OOV m2ucimum DC bias voltage Monitor internal or exter...

Страница 43: ...ground q VOLTAGE BIAS OUTPUT This BNC output jack provides a means to monitor the selected bias voltage externalor internal appliedto the dil E LDATlNG circuitundertest The outputresistanceis lkQ thus...

Страница 44: ...GGERED LOW IEEE 488 COMMON RIG R 8NC JAcl S LINE VOLTAGE SELECTION SWITCH The positionof this switchdeterminesthe operating voltage range of the instrument lO l25V or ZlO 25OV a special transformeris...

Страница 45: ...as instrument cslibrationmaybe compromisedifthe CALswitch is in the unlockedposition 2 4 4 Power Up Self Test and Display Messages During the power up cycle the instrumentwill perform the following 1...

Страница 46: ...BufferA Off 15 7 to front panel 2 4 6 Warm Up Period The Model590 can be used immediatelywhen it is first turnedon Note however that the unitmustbe allowed towarmupfor atleastone hourto achieverated...

Страница 47: ...GETTINGSTARTED ___ COAXIALCABLE _ PROBER SHIELDS CONNECTED TO CABLE SHIELDS A CONNECTIONS S SIMPLIFIED EQUIVALENT CIRCUIT Figure 2 3 Typical Test Connections 2 18...

Страница 48: ...r unit is equipped with both 1OOkHz and IMHz modules see rear panel you can select the test frequen Todisplayasinglereading placethe ins m tent inthe one cy by pressing the FREQ button Measurements ma...

Страница 49: ...rder with the analog outputs see paragraph 3 22 Step 4 Select the Bias Waveform U the WAVEFORM key to selecttherequiredtype ofbias Step I Connect the Plotter waveform Typically you will probably use e...

Страница 50: ...ENTER to program value then use A and V to scroll through data points press QUlT to cancel buffer access Step_10 Plot the Data Table 2 6 lnitial Plotter Set Up 0 Description Full Grid Pen l Dash dot F...

Страница 51: ...GETTINGSTARTED II 01 X W k z 33NVlIWdV3 Figure 2 4 Plotting Example 2 22...

Страница 52: ...m STOP TIME PROGRAMMED b STEP TIME PROGRAMMED tr READING INTERVAL tm l R lR READING RATE TIME COMPUTATION t tmrr tsmr llRl B WHERE B SUFFER LOCATION t TIME AT BUFFER LOCATION A CAPACITANCE START SWEEP...

Страница 53: ...ed a Reading Rate measurements refer to paragraph 3 20 Use the RATE key to program the desired reading rate 1 10 75 or 1000readingsper second Keep iumindthat Step 1 Select MeasurementFrequency the int...

Страница 54: ...a specificlocationcanbe computedas follows Step 8 Transfer Buffer Contents ta 1 024tshrt WI24 tt 1 R B Press theA B button SHFT BUFFER to placedatajust taken into buffer B Again this step is not essen...

Страница 55: ...ils methods of selecting the trigger source and mode and describes the operation of the rear panel triggeT input and output jacks ION 3 4TION 3 13 Data Keys Describesthe operation of the numeric keypa...

Страница 56: ...ndicates that the capacitance or con ductance value being measured is too high for the selected measuring range Table 3 1 lists Model 590 error messages Many bf these messages are also covered in pert...

Страница 57: ...bias voltage in waveform Bias step size of each bias increments Bias voltage before and after sweep Plotter grid type plot pen number Plotter line type Plotter label type plot type ye p Y axis scaling...

Страница 58: ...uring through cables at lMH z ou should use cable cone ion to compensate for cab e transmis P sion line effects Paragraph 3 21 covers cable correction programming in detail 3 The maximum common mode v...

Страница 59: ...t input terminal of the test fixture not supplied 5 A faraday shield surrounding the wafer and chuck incorporated into the test fixture may be necessary Connect a second RG 58 BNC cable between test n...

Страница 60: ...propriate position as shown in Figure 3 4 Note that the rear panel BLASand analog outputs will also be affected by this switch Grbuixded operation can be used in cases where it isnot necessary to floa...

Страница 61: ...cted reading rate Where G is the conductance in s ens R is the resistance in ohms C is the parallel capacitance C is the series capacitance The capacitance and conductance displays will show either th...

Страница 62: ...hes when no valid reading is available 2 The voltage dis counts nominal P lay resolution is 4 digits ZO OOO at the 1 and 10 reading per second rates and 3 digits 2 ooO counts nominal at the 75 and loo...

Страница 63: ...g or possibly both may exceed the count capability of the associated display area In this case the display for that parameter will display the following message OVFL To correct this condition select a...

Страница 64: ...ill not autorange into the X10 mode 4 Autoranging cannot be used with the 75 and 1 000 per second reading rates The unit will generate aCON FLICT error under these conditions 3 5 5 Using the 20nF 20mS...

Страница 65: ...al cable to make the test con nections Maximum recommended cable length is five meters Input Transformer Connections 2 The maz u un common mode voltage for tloating opera tion is 3OVRMS 42 4V oeak Fig...

Страница 66: ...e output and the test input of the adapter mounted on the instrument 4 Selectsgrounded or floating operating with the rear panel switch WARMNG maximum common mode voltage is 3OV RMS 5 Probe shields co...

Страница 67: ...pf both the 1OOkHz and lhG test 3 6 3 Selecting a Frequency Figure 3 8 shows a flowchart outlining frequency selection NOTES 1 Cable correction should be used when measuring through cables at lMH z Se...

Страница 68: ...attached to the test EW5JT and OUTPUT jacks o sconnect the voltages simply press FREQ until the DISCONNECT message is displayed Internal relays will then disconnect the test and bias voltages from th...

Страница 69: ...form of a the resistive ele ment is represented as the conductance G while the reac tance is represented by the susceptance 8 The two together mathematically combine to give the admittance Y which is...

Страница 70: ...s for C and G of 16opF Jn a lossless circuit R and G both 0 C and C would be and 3Ofi respectively From these values we can calculate equal A practical circuit however does have loss because the dissi...

Страница 71: ...effects oft the analog filter are reflected at the capacitance and conductance analog outputs on the rear panel of the instrument 3 The malog filter has no effect on the voltage bias reading 4 Pressi...

Страница 72: ...ates are slightly ti 3 To scroll through available reading rates press and hold ferent than indicated Table 3 10 lists actual the RATE or AIT key or press the numeric key intervals along with other pe...

Страница 73: ...d rates shortest integration period and no digital filtering Optimum rate selection then for your particular applica tion will depend on required resolution and speed as well as the amount of noise to...

Страница 74: ...accuracy it is recommended that you repeat the procedure below every hour especially in situations where the am bient temperature varies considerably 1 Ifyour instrument is equipped with both lOOkHaa...

Страница 75: ...Figure 3 12 shows a flow chart of zero operation both with and without buffer operation 7 The accuracy specifications listed at the front of this manual assume that the instrument has been properly ze...

Страница 76: ...orrection pm cedure outlined above should be repeated at least once per hour especially in situations where the ambient temperature varies widely 3 During the correction sequence the unit takes 10 rea...

Страница 77: ...cks from internal circuitry An open circuit measurement is then made to be used as a zero offset value 3 The instrument then measures an internal 2OpF or 2OOpF cap itor depending on the selected range...

Страница 78: ...on an SRQ can be generated to signal to the controller that no more triggers should be sent See Section 4 for IEEE488 bus information Figure 3 14 Internal Drift Correction Sequence 2 Sweep a single tr...

Страница 79: ...Only capacitance data is taken at the 1880 reading per second rate 5 At the 75 and 1CWsec rates a CALCULATING DATA message will be displayed at the end of a sweep before the unit returns to normal op...

Страница 80: ...a complete reading sequence with a group of capacitance conductance and bias voltage readings taken and stored with each biis step If you press MANUAL and the instrument is not ready an err01 message...

Страница 81: ...3 12 6 External Trigger Output The externsl trigger output provides a negative going TK compatible pulse as shown in Figure 3 18 The leading edge of the trigger pulse indicates end of reading or end o...

Страница 82: ...ess the 590 WAVEFORM key repeatedly until the the EXT display message is shown then press the ENTER key Tlus step sets up the unit for use with the exter nal bias souxe 6 Connect the circuit under tes...

Страница 83: ...one of these commands has been selected as the trigger source you can also trigger the instrument by pressing the To trigger a reading or sweep with an IEEE 488 trigger MANUAL button unless the insimm...

Страница 84: ...the desired key Note that the indicator adjacent to the SJ FT key will be on when shift is active To cancel shift without selecting a corresponding mode press the SHIFT key a second time If you press...

Страница 85: ...1OOV 5 Press the C vs t button to display buffer location num hers in the voltage display area 6 Press and hold A and note that the instrument scrolls through buffer locations in ascending order 7 Rel...

Страница 86: ...ntil the following message is displayed 1ST BIAS V 00X00 3 Program a 5V voltage as follows 0 5 0 0 0 4 Press the I key a number of times and note that the display alternates between a positive and neg...

Страница 87: ...e Selecting a Waveform right To select the required bias waveform press and hold the WAVEFORM or AIV key until the desired waveform is 3 14 BIAS VOLTAGE displayed as summarized in Table 3 15 Press ENT...

Страница 88: ...rogrammed a function of fkst and last 3 16 summakes programmable parameters display voltage as well as bias step size only the first 450 messages and the allowable range for each parameter 1 350 will...

Страница 89: ...parameters as follows The number of readings in a sweep for DC and external waveforms is determined solely by the COUNT parameter 1 Press and hold WAVEFORM or A or press the Thus to control the size o...

Страница 90: ...n be entered in 1mV steps t actual minimum step size is 5mV due to hard wsxe constraints The actual bias voltage is calculated as follows W V v Lv _I x5 5 Where V Actual bias voltage mv V Progmnuned b...

Страница 91: ...The initial voItage setting of the bias waveform wavefoormand trigger mode combination Last Bias The final voltage setig of the bias waveform Parameters are further defined as follows Step Bias The i...

Страница 92: ...s value may be smaller than the pro example to step from SV to 5V in 1OOmV in gmmmed Step Bias depending on First Bias Last Bias crements program the following values and Step Bias Values r TRIGGER EV...

Страница 93: ...OPERATION TRIGGER EVENTS FIRST BIAS DEFAULT WAS NOTE 1 UNIT TAKES COUNT PARAMETER NUMBER OF READINGS PER TRIGGER EVENT 2 THE A D BUFFER IS CLEARED BY A TRIGGER Figure 3 23 DC Single Sweep 3 39...

Страница 94: ...LASTBIAS DEFAULT BIAS L DEFAUUBIAS r J k L NOTES 1 ONETRIGGER PERREADINGREQUIRED 2 NEXTTRIGGER AFTERAU STEPSTAKENRESETS SUFFER DEFINITION OF LASTSTEP LAST VDLTAGE STEPMAY ND7 BEFULLOC A a STEPBIAS Fi...

Страница 95: ...S LA 3 BIAS 1 DEFAULT BIAS DEFAULT BIAS DEFAULT BIAS DEFAULT BIAS FIRST BIAS FIRST BIAS NOTES 1 ONE SWEEP PER TRIGGER 2 A TRIGGER RESETS THE BUFFER 3 SEE FIGURE 3 5 4 t k LAST STEP DEFINITION Figure 3...

Страница 96: ...VENTS F t t 1 1 t t LAST BIAS I 7 r J DEFAULT BIAS 7 DEFAULT El j FIRST B AS d NOTES 1 ONE TRIGGER PER READING REWIRED 2 TRIGGER AFTER ALL STEPS TAKEN RESETS BUFFER 1 FlRST BlA Figure 3 26 Dual Stairc...

Страница 97: ...OPERATION DEFAULT BIAS NOTES 1 ONE TRIGGER PER SWEEP REQUIRED 2 TRIGGER RESETS BUFFER Figure 3 27 Dual Staircase Single Sweep 3 43...

Страница 98: ...OPERATION BIAS NOTES 1 ONE TRIGGER PER READING REQUIRED 2 FlRST TRIGGER AFTER LAST STEP RESETS BUFFER Figure i 28 bulse Train One Shot 3 44...

Страница 99: ...OPERATION TRIGGER TRIGGER 1 I FIRST BIAS 7 STEP BIAS LAST BIAS DEFAULT BIAS NOTES 1 ONE SWEEP PER TRIGGER 2 BUFFER IS RESET BY TRIGGER DEFAULT BIA Figure 3 29 Pulse Train Single Sweep 345...

Страница 100: ...ED IN BUFFER 2 FIRST CYCLEONLYINCLUDES STARTTIME 3 LAST CYCLE ONLY INCLUDES STOP TIME 4 FIRST TRIGGER AFTER COUNT READINGS RESETS THE BUFFER 5 WAVEFORM SHOWN DEPICTS EXTERNAL TRIGGER OUTPUT NOT BIAS W...

Страница 101: ...E TRIGGER PER READING REQUIRED 2 FIRST TRIGGER AFTER LAST STEP RESETS BUFFER 3 COUNT READINGS ARE STORED IN BUFFER 4 WAVEFORM SHOWN DEPICTS EXTERNAL TRIGGER OUTPUT NOT BIAS WAVEFORM Figure 3 31 Extern...

Страница 102: ...um of the fol lowing refer to Figure 3 32 1 The programmed step time 2 The measurement lime As discussed above the measurement time is the reciprocal of the reading rate 3 The programmed stop time Com...

Страница 103: ...OPERATION Figure 3 32 BiasStep Durations 349...

Страница 104: ...put is con nected to the VOLTAGE BIAS INPUT iack on the rear panel of the Model 590 When making ihe connections use good quality shielded cable to minimiz hU radiation The center conductor of the jack...

Страница 105: ...BIAS MONITOR jack you can measwe OI record the actual bias votlage whether that voltage is being gen erated internally or externally Typical examples include a DMM chart recorder or analog plotter Fi...

Страница 106: ...COAXIAL CABLE NOTEz MINIMUM INPUT RESISTANCE NOTEz MINIMUM INPUT RESISTANCE FOR I LOADING ERROR FOR I LOADING ERROR lOOKI lOOKI HIGH INPUT CABLE SHIELD LOW q q I I MONITORING DEVICE METER CHART RECORD...

Страница 107: ...is buffer buffer B isfrequently referred togasthe plotter buf fer in this manual Note that the A D converter cannot directly place data into this buffer you must transfer buf fer contents with the A B...

Страница 108: ...FER P l L P P l I il STEP i L PROCESS READING STORE READING IN LAST READING REGISTER NOTES 1 BUFFER POINTER P INDICATES BUFFER LOCATION 2 ONE TRIGGER PER READING REQUIRED 3 BIAS STEP BLOCK IS NOT APPL...

Страница 109: ...R P l t J P P l SET BIAS STEP k L STORE READING IN LAST READING REGISTER NOTES 1 BUFFER POINTER P INDICATES BUFFER LOCATION 2 ONE TRIGGER PER SWEEP REGUIRED 3 BIAS STEP BU CK IS NOT APPLICABLE TO DC A...

Страница 110: ...f fer again beginning at location 1 NOTES 1 In the sweep trigger mode the same trigger that initiates the sweep will also reset the buffer for stOrage of n v readings 2 In the one shot tigger mode the...

Страница 111: ...one normally used when plotting Thus to save data from bein should transfer data fr overwritten by a new sweep you om buffer A to buffer B before trig SETUP 0 ABORT gering a new sweep 3 16 1 Recommen...

Страница 112: ...1 To avoid address conflicts make sure that no other ac tive devices on the bus have a primary address of 5 2 When generating a plot or grid from the front panel the Model 590 automatically addresses...

Страница 113: ...OPERATION CV ANALYZE5 I I 590 IEEE 488 INTERFACE PLOTTER I PLOTTER IEEE 488 INTERFACE IEEE 488 CARI MODEL3007 Figure 3 38 IEEE 488 Plotter Connections 3 59...

Страница 114: ...Long dash short dash 6 Long dash short dash short dash 7 Solid line O FuUgrid l Axisonly 0 Full labels 1 Label axis and divisions Yiotitle 2 Label axis only 3 No labels 0 Buffer A A D 1 Buffer B Plot...

Страница 115: ...ASHES IN TITLEBLOCK INDICATE MODE IS DISABLED OR IRRELEVANT 2 Y AXIS SHOWS PLOTTED FUNCTION X AXIS SHOWS BIAS VOLTAGE ITIME INDEX IN C VS T CAPACITANCE IN V V l 3 FULL LABELS AND GRID SHOWN Figure 3 4...

Страница 116: ...By selecting appropriate parameters on the setup menu you can select auto or user defined scaling as discussed below Antoscaling When autoscaling is selected the instrument will automatically scale th...

Страница 117: ...oltage pl V C co NST v v Capacitance R vs V if series model was selected when data was taken With all seven plot types the selected function is plotted along the Y axis However the bias voltage is plo...

Страница 118: ...OPERATION 60 01 X WWd 3JNVlI3VdV3 Figure 3 41 C vs V Example 3 64...

Страница 119: ...OPERATION Figure 3 42 G vs V Example 3 66...

Страница 120: ...OPERATION __ T t f i I l d I Figure 3 43 l e vs V Example 566...

Страница 121: ...OPERATION II 01 X CtlVtlV I 33NV113V 3 3 Figure 3 44 C vs t Example 3 67...

Страница 122: ...OPERATION oo oI x XOJ 3 Figure 3 45 C Co vs V Example 3 66...

Страница 123: ...OPERATION II 01 X OVWfd 33NVIIWdV3 Figure 3 46 CA C vs V Example 3 69...

Страница 124: ...OPERATlON IO 01 x UlOh SUB Figure 3 47 V C CONST Example 3 70...

Страница 125: ...tored in position 1 upon power up or after the in Bias Waveform DC strwnent receives the IEEE 488 DCL or SDC command Start Time lmsec over the bus Stop Time lmsec Step Time lmsec First Bias ov One add...

Страница 126: ...up rinning the tesi 4 The selected configuration will be stored at that posi tion and the instrument will return to normal operation 3 18 1 Test Sequence 3 17 3 RECALLing Configurations The instrumen...

Страница 127: ...ons these conditions but improper readings wili probably which can be used to analyze buffer data The following result Jn this case the instmm eat should be thoroughly para and f aphs descriie the var...

Страница 128: ...h o crate on individual data points for example l C2and C you can scroll through buffer locations and apply the selected math fgmtion by using the A or I keys Use ENTER or BUF FER to display fit and l...

Страница 129: ...front panel you can use A or v to scroll through buffer locations As each location is accessed the C Co value and the bias voltage will be displayed as in this example 1 2560 E 01 Co 1 2500 V When us...

Страница 130: ...while bias voltages ong the X axis If series model was in effect at thetime data was taken R vs V will be plotted in place of G vs V 3 20 C VS t MEASUREMENTS 1 2000 E 00 AV 123OOn The following paragr...

Страница 131: ...m STOP TIME IPROGRAMMED WHERE B BUFFERLOCATION STEP TIME PROGRAMMED1 tm TlME AT BUFFER LOCATlON t READING INTERVAL I R IR READINGRATE Ov D L BIAS t SWEEP START NOTE MULTIPLY PROGRAMMED TIMESBY 1 024TO...

Страница 132: ...asurement frequency by pressing FREQ Keep in mind that cable correction should be used at lM 2 Select the desired model filter and zero states with ap propriate keys Note thatthe filter increases inst...

Страница 133: ...isec gr ed step time gr ed step time Reading rate Reading rate Buffer location 100 Buffer location 100 Once the sweep is complete transfer the data from buffer A to buffer B for safe keeping by press...

Страница 134: ...OPEFiAT ON WARNING HAZARDOUSVOlmiE MAY BEPRESENT AT TESTOUTPIJT MODEL230 VOLTAGE SOURCE EXTERNAL TRGGER OUTPUT Figure 3 50 External C vs t Connections 3 80...

Страница 135: ...ernal waveform must be selected in order to use an external bias source Reading Rate The reading rate and step time determine the interval between measurements Default and Fist Bias These voltages are...

Страница 136: ...location 2 dwell time for the desired time duration of the default voltage 4 Program the memory location 3 dwell time for a dura tion equal to the 590 reading sweep The duration of that sweep will dep...

Страница 137: ...able correction with the Model Driving point Method 690 dable correctionis xdaJly important at IMHZ and it can also be used for 100s ie This m hod involves a driving point admittance measure ment of a...

Страница 138: ...gth to the front panel of the instnunent as shown in Figure 3 52 Notethat the opposite end of the cable connected to INPUT must be left open during the cable correc tion Process a 5 Press SHCFT CABLE...

Страница 139: ...cor rection parameters in effect These pammeters will re main in effect until power is removed or until cable number 0 is recalled The driving poin cable correction algorithm described above makes th...

Страница 140: ...capacitance and conductance readings Each output provides a scaled voltage that is analogous to the capacitance or conductance reading Use and characteristics of these W o outputs are disxissed in th...

Страница 141: ...oading the input impedance of the measuring device should be as high as possible For example to keep the error due to loading under O l the input impedance should be at 1eastmTMR 3 The BIAS VOLTAGE MO...

Страница 142: ...OPERATION MODEL590 CVANALYZER t COAX ALCABLE I r HIGH Ik CASLE SHIELD Low MEAWRING DEVICE DMM ANALOGFIMTER CHARTRECORDER1 Figure 3 54 Analog Output ConnectionExample 3 88...

Страница 143: ...CONSIDERATIONS To prevent ground loops instruments should be connected The following paragraphs discuss some measurement con to ground only at a single point as shown in Figure 3 56 siderations to ta...

Страница 144: ...e effects of EMI This shield should be insulated fr6m the test fixture ground and m t be cormected to ana log common of the instrument Oft the inter fiitertig of the instrument may suf ficiently reduc...

Страница 145: ...measuring at 1 13 see paragraphs 3 21 and 4 11 2 Keep the test cables as shoti as possible Maximum recommended cable length is five meters per cable 3 Use only the prescriied cable for test connectio...

Страница 146: ...on Desaibes driving point matriw parameter and calibration capacitor methods of cable correction 4 12 Programming Examples Gives examples for pro grammin merits f the instruments to take one point mea...

Страница 147: ...ea3ing Repeat START 7 I I PLACE UNIT IN REMOTE c5 END Figure 4 l Typical Program Flow Chart Step 4 Program Model 590 Operating Modes You can progrsm instrument operating modes by sending the appropria...

Страница 148: ...IJ G RO Autorange on Autorange on RL 2P 2 ZOpF 200G R2z 2OpF 20 ZOpF 2OO S R3 20OuF 200uS 2OOoF 2mS R4 2l k ti S R5 Rl x 10 Error R2XlO Error R3 x 10 Error E i R4xlO Enor Autorange off Autorange off s...

Страница 149: ...a multiple instrument test setup is shown in Figure 43 Although any number of con NCSKistheprefix normal C capadtanCe S series nectars could theoretically be stacked on one instrument K lOOkHz it is...

Страница 150: ...may result in Connect the Model 590 to the IEEE 488bus as follows ematic bus Operation 1 Line up the cable connector with the connector located on the rear uanel of the instrument The comiector is 4...

Страница 151: ...be unaddressed to talk when it receives its own listen address L4 Listener The U function defines the ability of the Model 590 to receive device dependent dataover the bus Listener capabilities exist...

Страница 152: ...which is set to 15 at the factory Until you become more familiar with your instrument it is recommended that you leave the address at this value because the programming ex amples in this manual assum...

Страница 153: ...he bus will generate an lDDC0 Illegal Device Dependent Conimand Option error as discussed below Table 4 4 HP 85 IEEE 488 BASIC Statements Action Transmit string to device 15 Obtain siring from device...

Страница 154: ...For exam an illegal command le the command string ElX include ecause the letter E is not part of the message insttument s programming language When F illegal com IDDCO mand is received the instnnnent...

Страница 155: ...tements below CAUTION Do not use the following example unless you are certain that the calibration lock switch is In the disabled position or miscalibration will result From the factory the switch is...

Страница 156: ...ckout command is in effect 4 7 4 Simultaneous Front Panel and Bus Operation Fundamentally there is no reason why you c ot con trol the instrument simultaneously from both the front panel and over the...

Страница 157: ...insbxment is programmed for the correct primary address 15 Note that all front panel controls except LOCAL tid of course POWER are inoperative while the ir ument is in remote You can restore normal f...

Страница 158: ...equency Operation Ei OOJ Filter Rate zero Trigger Pl s3 4 8 4 GTL Go To Local E l The GTL command is used to take the instrument out of remote Operation of the front panel keys will also be restored b...

Страница 159: ...default con figuration Send SDC with the following stateme CLEAR 715 When the above statement is executed the instrument returns to the default configuration 4 8 7 GET Group Execute Trigger GET may be...

Страница 160: ...ing 6 The controller then sets ATN true and places the SPD statements Serial Poll Disable command byte on the data bus to end the serial polling sequence S SPOLL 17151 IlISPS Once instruments are in t...

Страница 161: ...terminated by the X character This character tells the instrument to execute the command or command string as described in paragraph 4 9 1 Conunsn ds sent without the execute character will not be ex...

Страница 162: ...he comman d string however when leaving out preceding parameters you must include a comma delimiter character for each parameter left out For example to program only the default voltage while leaving...

Страница 163: ...ogr amming as discussed in paragraph 4 10 Table 4 9 Device Dependent Command Summary CeadingRate S Rates are nominal iii R9 so s3 s4 TO 0 TO 1 TiO T1 l T O T2 1 T O T3 l T4 O T4 l I f 1 Desuiption Par...

Страница 164: ...rdg Prefix on suffix off n rdgs Prefix off suffix off n rdgs Prefix on suffix on in rdgs n rdgs readings in b er Output 0 C G V triple 1 only 2 G only 3 V only 4 l C2 5 CIcn 6 G C C 7 V Modek Paralle...

Страница 165: ...B range group Buffer B trigger group Ull Buffer B zero gray ul2 Buffer B bias group u13 Buffer B bias voltage u14 Buffer B bias time u15 Buffer B position and times U16 BofferA ll lmimum minimum capa...

Страница 166: ...e parameters KO nl jn2 Kl n3 jn4 Assign testyOUTPUT cable parameters A nl jn2 B n3 jn4 C n5 jn6 D n7 jn8 Assign test lNPUT cable parameters A nl jn2 B n3 In4 C nSijn6 D n7 jn8 Zero cable open Measure...

Страница 167: ...MING Table 4 9 Device Dependent Command Summary Cont Mode Hit Button H L Self Test J Command H12 H15 H16 H20 H23 H25 H26 E H30 H31 11 Description MANUAL ZERO RANGE F Q MODEL Perform self test amgraph...

Страница 168: ...t EOI and Hold off ii Save Recall Configuration SRQ N Bias Control 0 Operation and Model P Filter z Calibration Range S Reading Rate T Trigger Mode and Source v Status Bias Voltages w Waveform and Tie...

Страница 169: ...t they will be stored in an internal comman d buffer for later ex ecution once the X character is finally received 2 The comman d buffer can hold a total of 128characters The insbwnent stores only the...

Страница 170: ...also be programmed to generate an SRQ under these conditions as described in paragraph 4 9 16 2 Cable correction should be used when measuring through cables at 2MH z See paragraphs 3 21 and 4 11 for...

Страница 171: ...the instrument 2 The instrument can be programmed to generate an SRQ under module satura tion or overflow conditions 3 Since capacitance and conductance readings are paired together it may be necessa...

Страница 172: ...position Factory default is 10 readings per second S3 Proarammina LData willbe made available c after a sweep is compkzted an a g e _ __ a Notes calculated at the 75 and 1000 reading per second rates...

Страница 173: ...AL button is always enabled regardless of the programmed trigger source however all front panel buttons will be locked out if the unit is in remote REMOTE on To restore local operation in this case pr...

Страница 174: ...are assumed to be in voltage units and may be entered as integer or floating point values For example the following parameter values would be equivalent I 2 l zEl J2E z The final count parameter allow...

Страница 175: ...ec 20vto 2ov 5mv 2ovto 2ov 5mv 2ovto 2ov 5mv X 20vto 2ov 5mv X X 1 to 450 1 350 al X X 1 OOOisec rate Voltage parameters can be programmed in 1mV steps but will be set to 5mV steps Multiply programmed...

Страница 176: ...ote that all parameters are not necessary with every bias waveformtype Table Notes 4 11 sumimizes required time parameters for various waveforms 2 Bias waveforms are defined in detail in paragraph 3 1...

Страница 177: ...or off The selected and pro grammed bias values are applied to the circuit under test through the OUTPUT jack on the front panel 1 Jntemal or external bias source selection is programmed with the W c...

Страница 178: ...SDC Configuration The factory default is GO prefix on suffix off one reading Depending on the programmed format the ASCII data string the instrument sends will include a prefix type of data the readin...

Страница 179: ...operly addressed to talk by the controller The basic controller sequence for requesting data is as follows 1 The controller sets the ATN line true 2 The Model 590is addressed to falkby placing the app...

Страница 180: ...d by options of the B command See paragraph 4 9 11 3 For multiple readings the individual readings and buffer locations will be separated by commas 4 The programmed terminator default CR LF will be tm...

Страница 181: ...r allows you to apply specific mathematical operations to the data before beingtransmitted over the IEEE 488bus General data formats for these comman ds are shown in Figure 4 7 The second parameter mo...

Страница 182: ...ault is OO O O C G and V data parallel model G O Programming 1 The G COINMII d also affects the data format as described in paragraph 4 9 9 The Notes data string prefix indicates selected output and m...

Страница 183: ...included to spedfy the first and last buffer locaticm to be accessed from the A D and plotter buffers respec tively Finally B3 allows you to transfer the contents of the AID buffer buffer A to the pl...

Страница 184: ...uffer Select buffer to plot 0 AID buffer buffer A l Plot buffer buffer B A5 pen Select pen 0 No pen 1 Pen l 2 Pen 2 A line Program line type 0 Dot at points 1 Spaced dots 2 Dashes 3 Long dash 4 Dash d...

Страница 185: ...r the X axis A8 the limits are 20 to 20 internal bias or 200 to 200 external bias The pro grammable Y axis limits are scaled according to the selected plotting fun on For example if plotting C YSV on...

Страница 186: ...tWT BIT 37 55 THEN i2M 14OS SPULL 715 1 50 OUTPUT 715 Lr Al 160 SEHU 7 UtdT IJNL TALK 15 LISTEN 5 170 RESlJtlE 7 lW STATUS7r2 S Select C vs V ulot me Program lOVX a i limits Program 1KlpF to 150pF Y a...

Страница 187: ...ro is enabled becomes the baseline value Subsequent readings will then be the dif ference between the actual measured values and the stored baseline PrOgraIIIItIing 1 Zero offsets the dynamic range of...

Страница 188: ...r as the front panel FILTER key The filter is of the low pass variety useful in situations where an excessive amount of noise is noted in the readings IEEE 488 PROGRAMMING Programming 1 The 3dB point...

Страница 189: ...m and minimum voltage U19 Buffer B maximum and minimum capacitance UZOBuffer B maximum and minimum conductsnce UZl Buffer B maximum and minimum voltage UZZ Global programming pareeters parallel series...

Страница 190: ...t BRG BbufRangeGroup BTG BbufTrigGroUp BZG BBG BbufZeroGroup BbufBiasGroup 1 REV Level 20 TRIGOVERRLN NEEDlOOKHz NEEDlMHz NOT USED z FD TRANSLATOR ERR NO REMOTE ERR IDDC IDDCO INVALID NOT USED NOT USE...

Страница 191: ...TranslationLiit Not used MAX FARAD MAX SEMENS Mm SlEMENS IPARALLEL SERIES Co FARADS PLOT TYPE GRID TYPE BbuflAbuf PEN TYPE LINETYPE LABEL TYPE X SCALE Y SCALE 0 MODE G MODE BCOMMAND FlRST LOCATION LAS...

Страница 192: ...value is assumed by a leading blank This blank space will be filled by a minus sign when the cor responding value is negative 8 The INVALID CONFLICT NEEDlOOkHz and NEED MHz bits in the Ul word will on...

Страница 193: ...re Software Revision 1 MODULE OVERLOAD ERROR 1 NO REMOTER 1 TRANSLATOR ERROR Figure 4 9 Ul Error Status Word F mat IDENTIFIER I ARG 0 0 D 0 D 0 TERM EOI AUTORANGE Xl0 ATTENUATOR D OFF l ON FREQUENCY Z...

Страница 194: ...gure 4 12 U4 Status Word Format Buffer A Zero Group A BIAS GROUP IDENTIFIER e i A8G 0 0 TERMiEOl WAVEFORM TYPE 4 O DC 1 SINGLE STAIRCASE 2 DUAL STAIRCASE 3 PULSE 4 EXTERNAL BIAS Figure 4 13 U5 Status...

Страница 195: ...00 bo Oo OO OOd TERM EOI r Y r M LL SECONDS COUNT I READlNdS IN BUFFER Figure 4 16 U6 Status Word Format Buffer A Position and Time BRd 0 0 0 RANGE O ZpF ZOpF 2 2OOpF 3 2nF AUTORANGE O DISABLED 1 ENAB...

Страница 196: ...O OOOOE OO O OOOOE OO TERM EOI Figure 4 19 Ull Status Word Format Buffer B Zero Group B BIAS GROUP IDENTIFIER I BBG 00 TERM EOI WAVEFORM TYPE O DC 1 SINGLE STAIRCASE 2 DUAL STAIRCASE 3 PULSE _ 4 EXTE...

Страница 197: ...ormat Buffer B Position and Time A CAPACITANCE MAXIMUM MINIMUM IDENTIFIER 9 l ACM O OOOOE OO O OOOOE OO TERM EOI MAX MUMx CAPACITANCE CAPACITANCE IFARAbS FARADS Figure 4 24 U16 Status Word Format Buff...

Страница 198: ...CAPACITANCE FARADSI FARADS1 Figure 4 27 U19 Status Word Format Buffer B Maximum and Minimum Capacitance BCONDUCTANCE MAXIMUMIMitiIMUM IdENTlFlER I BGM O OOOOE OO O OOOOE OO TERM EOI MAX UMMIN MUM COND...

Страница 199: ...PPP 000000 06 TERM EOI PLOT TYPE LABEL TYPE o cvs v O FULL LABELS l GvsV 2 1 c vsv 1 AXIS AND DIVISIONS Z AXIS ONLY 3 C S v 3 NO LABELS 4 cvsr 5 c c vsv LINE TYPE O DOT AT POINTS I SPACED DOTS GRID T...

Страница 200: ...RDG Z PREFIX ON SUFFIX ON 1 RDG 3 PREFIX ON SUFFIX OFF N RDGS 4 PREFIX OFF SUFFIX Off N RDGS 5 PREFIX ON SUFFIX ON N RDGS BUFFER Bt O CURRENT RDG 1 1 A D Z PLOT IEEE OUTPUT FIRST LAST CURRENT PARAMETE...

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