JSM6010A SEM Short Manual
(modified on Feb 10, 2016)
Start SEM instrument
1.
Turn on the key-switch to START and hold for 10 seconds
2.
Turn on the personal computer and Login PC with user name: NTNU and password:
SEMUser
3.
Double click the shortcut icon “In TounchScope (Navi)”, which is full “dialogue
version” with step-by-step guides; the more professional version with shortcut as “In
TounchScope” (NB, see Step 4 below)
(Laptop screen ratio is not compatible with SEM program ratio. Hold on the Mouse
button to move the whole program up and down)
4.
For using “In TounchScope”, if the sample top is higher than the holder top level, it
has to move down Specimen Height Handle correspondingly to protect BSE detector!!!
5.
Click “Set specimen”. After about 70s, the specimen chamber is vented to atmospheric
pressure. The observation preparation window is displayed.
Sample Loading and Exchange for using
In TounchScope (Navi)
1.
Load a specimen according to the steps displayed on the window:
a.
Draw out the specimen stage to its end-stop position to load the specimens.
b.
Input the protruding specimen height into the dialog box if the specimen
protrudes from the upper surface of the specimen holder.
c.
Selecting the specimen holder type. Click “Select” to select and click “Set”
d.
Adjust the stage Z-axis to 10 mm. Check the stage positions are R=0
o
and T=0
o
e.
Close the specimen chamber
2.
Click the “Observation Conditions” button and a few recipes are appeared. Click the
appropriate button suiting for your sample.
3.
Setting the observation conditions.
4.
Click the “Start” button and the chamber starts evacuating and image automatically
appears when the evacuation is completed. If the gun filament is not properly adjusted,
the image may not appear. For details how to adjust the filament, refer to page 4-82 in
the INSTRUCTIONS.
To exchange specimens immediately:
1.
First click HT icon “on” to turn off the HT, and then click “VENT” button and click
the “Yes” button in the dialog box.
2.
Draw out the specimen stage to its end-stop position to load the specimens.
3.
Input the protruding specimen height. Then, set the Z axis to the value in the message
and click the “Close” button.
4.
Closing the specimen chamber, click the “EVAC” button on the icon window 1.
5.
Click the “YES” button in the dialog box.
6.
Click HT icon “off” to turn on the HT.
Abbrev.
AFS, Auto Filament Saturation
AF, Auto Focus
AGC, Auto Gun Control
ACB, Auto Contrast&Brightness
AGA, Auto Gun Alignment
AS, Auto Astigmatism correction
Using IPad,
Log-in Apple IPad with PIN 6010. Go to IPad Wi-Fi Setting, to click Router
ZyXELDD6014 link; then back to Home Screen, to click SEMController icon to start SEM
Controls, where to control AF, ACB and AS, together with corresponding manual controls.
