J.A. Woollam M-2000, Руководство по оборудованию, Страница: 85 / 178

M-2000® Hardware Manual ©2023 J.A. Woollam Co. 85
If sample thickness is not known, select “Automatic-Robust”. If equipped
with the Camera Lookdown, choose “Automatic-Camera.”
4. The ellipsometer will automatically align tip/tilt and Z such that the
following two conditions are met (required for successful sample
alignment):

The sample surface must be perpendicular to the beam from the
Lookdown detector (sample tip/tilt alignment).

The sample surface must be positioned such that the light is reflected
into the Receiver Unit aperture (sample height alignment).
Manual sample alignment options are still accessible for systems with automated
tip/tilt stage. Simply select “Manual” when prompted for tip/tilt or Z alignment
if desired (i.e. for low-reflecting samples). Use the Up/Down/Left/Right Arrow
keys on keyboard to tip and tilt the sample stage in Manual alignment mode.
Use the PageUp/PageDown keys to raise and lower the Z stage in Manual
alignment mode. Change motor increments in the upper right corner as need to
move in smaller or larger steps.
Figure 4-61. Cross hair centered and intensity maximized (beam centered on Receiver aperture).
Note: Follow Section 4.7 Sample Alignment (with Manual Tip/Tilt)
procedures when Lookdown detector is disabled.
4.9 System Check
(Calibration)
Note: A System Check must be performed the first time the system is
operated, or if the source/receiver units have been remounted. The