Inficon UL1000, Техническое руководство

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Installation
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2.4 Vaccum Connections
2.4.1 Inlet Port
The inlet port is located on the top of the UL1000 and UL1000 Fab. The size of the
flange is DN 25 KF.
A test object or a test chamber has to be connected to the inlet port if the vacuum
mode is chosen (See Chapter
6.3 ).
The inlet port is also used for the connection of the sniffer line.
2.4.2 Exhaust
The exhaust Fig. 2-6 /12 flange is located underneath the UL1000 and UL1000 Fab
at the back side. The size of the flange is DN 16 KF.
When shipped only the exhaust filter body is preassembled. The filter cartridge is
supplied together with the leak detector and can be installed at the exhaust.
Instead of this an exhaust line can be connected to the exhaust by the exhaust
adapter.
2.4.3 Vent
Usually the parts under test are vented with ambient air when the test is finished. If
it is required the parts can be vented with a different gas (i. e. fresh air, dry air,
nitrogen, …) at max. 1050 mbar pressure. In this case a vent hose has to be
connected to the hose coupling
Fig. 2-6 /10.
2.4.4 Purge-connection (UL1000 Fab) /
Gas ballast (UL1000)
For purge modes it is recommended to use Helium-free gases at atmospheric
pressure. Ambient air can be contaminated with Helium due to
spraying or charging.
In this case a gas supply line (i. e. nitrogen, fresh air, …) should be connected to the
hose coupling
Fig. 2-6 /11. The pressure of these gas line must not exceed
1050 mbar.
The connector 11 and 12 in Fig. 2-6 are quick connectors for hose diameters of 8/
6 mm.
Warning
Risk of injury due to sucking connection flange.
If the Vacuum-Mode of the UL1000 is activated, the connection flange may suck
bodily parts around the connection flange. Keep bodily parts off the connection
flange.
Warning
Depending on the chamber the UL1000 and UL1000 Fab is attached to and the gas
inside the chamber lethal gases can be spoiled into the air through the exhaust.