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Transpector XPR 3+ Operating Manual
5.5.2 Recipe Generation
Using Transpector XPR 3+ for background monitoring or process monitoring is
accomplished by creating and running a recipe. Refer to the FabGuard Explorer
operating manual for complete information on Recipe Generation.
5.5.3 Mass Scale Tuning
Another part of preventive maintenance is checking the functional operation of
Transpector XPR 3+. This includes the mass position and mass resolution of the
instrument.
Refer to
section 7.6, Mass Calibration, on page 7-9
for information on tuning
Transpector XPR 3+.
5.5.4 Transpector XPR 3+ Filament
The Transpector XPR 3+ filaments should last a minimum of 4000 hours when
following these Best Known Methods. It is strongly recommended that the filaments
be replaced after 4000 hours of operation (approximately six months of continuous
operation).
CAUTION
If the filaments are not replaced and are allowed to burn
out, coating from the filament could contaminate the ion
source plate and create electrical shorts preventing
operation with a new set of filaments.
The yttria-coated filament (part number 914-022-G2) is field replaceable.
Replacement instructions are included in the filament kit and are also found at
Section 6.5.3
in this manual.
5.5.5 High Pressure Electron Multiplier
Since the HPEM is used at background and process pressure, the EM hours will
mirror those of the emission hours. The HPEM gain may degrade over time and it
is recommended to replace the EM when the EM voltage can no longer be adjusted
to achieve a 300 gain. It is expected that the HPEM will last greater than 1 year,
when used continuously.
