4 - 1
IP
N 07
4-
51
1-
P1
C
SQM-160 Operating Manual
Chapter 4
SQM-160 Comm Software
4.1 Introduction
The SQM160 Comm program communicates with INFICON's SQM-160 Thin Film
Monitor to allow remote instrument setup and data logging. With the SQM160
Comm you can:
Select a Film on the SQM-160 Thin Film Monitor, then open the shutter to start
deposition.
View SQM-160 readings in both numerical and graphical format.
Store SQM-160 readings to a text file on a drive.
Create and store an unlimited number of film setups.
Download films to, and upload films from, the SQM-160 monitor.
Modify the SQM-160 monitor's system setup parameters.
for information on connecting a SQM-160 and
establishing communication with this program.
4.2 Installation
To install the SQM-160 program, insert the 074-5000-G1 INFICON CD-ROM. If the
setup program does not start automatically, click
Start
, then
Run
, then type
<d>:UtilityDisk
(where <d> is the drive you are using). The Program Disk main
menu should appear.
On the program disk menu, see
SQM160 Monitor
, then click on
SQM160 Software
. Follow the directions given there. When installation is
complete, you may be prompted to restart the computer.
To start the SQM160 Comm program, click the SQM160 Comm desktop icon, or
click
Start
,
Programs
,
INFICON
, then
SQM160 Comm
. The SQM160 Comm
program main window will be displayed.
Содержание SQM-160
Страница 1: ...O P E R A T I N G M A N U A L SQM 1 60 Multi Film Rate Thickness Monitor IPN 074 511 P1C ...
Страница 2: ......
Страница 5: ......
Страница 6: ......
Страница 8: ......
Страница 22: ...1 10 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 30: ...2 8 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 60: ...4 12 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 76: ...5 16 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 98: ...6 22 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 110: ...8 8 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...
Страница 120: ...A 10 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...