Inficon SQM-160, Руководство по эксплуатации

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SQM-160 Operating Manual
1.6.2 Accessories
Each sensor requires an oscillator kit to interface to the controller:
SQM-160 10 ft. Oscillator Kit . . . . . . 782-934-003-10
SQM-160 25 ft. Oscillator Kit . . . . . . 782-934-003-25
SQM-160 50 ft. Oscillator Kit . . . . . . 782-934-003-50
SQM-160 100 ft. Oscillator Kit . . . . . 782-934-003-99
Above kits consist of oscillator 782-900-010, 6 inch BNC oscillator to feedthrough
cable 782-902-011 and BNC controller to oscillator cable 782-902-012-10,
782-902-012-25, 782-902-012-50 or 782-902-012-99. These kits are designed for
use with the standard in-vacuum cables ranging in length from 6 in. (15.2 cm) to
36 in. (91.4 cm). The 007-044 standard in-vacuum cable supplied with the front
load style sensors are 30.75 in. (78.1 cm) long.
19 in. Rack mount for 1 SQM-160 . . 782-900-008
19 in. Rack mount for 2 SQM-160 . . 782-900-014
1.6.3 Sensors
Front Load Single Sensor. . . . . . . . . . . . . . . . . . . . . SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . CDS-XXFXX
Cool Drawer Dual Sensor. . . . . . . . . . . . . . . . . . . . . CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1
Front Load UHV Bakeable Sensor . . . . . . . . . . . . . . BK-AXF
NOTE: "X" in part number indicates customer-selectable option, see
www.inficon.com for Sensor Datasheets.
NOTE: All shuttered sensors require a feedthrough with an air line and a
pneumatic shutter actuator control valve.
Pneumatic Shutter Actuator Control Valve . . . . . . . . 750-420-G1
NOTE: Multi-crystal (rotary) sensor should not be used with the SQM-160