Inficon SQM-160, Руководство по эксплуатации

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SQM-160 Operating Manual
Chapter 1
Introduction
1.1 Introduction
Figure 1-1 SQM-160 Multi-Film Rate/Thickness Monitor
The SQM-160
™
uses proven INFICON ® quartz crystal sensor technology to
measure rate and thickness in a thin film deposition process. Two sensor inputs are
standard and four additional sensor inputs are optional. Two recorder outputs
provide analog rate and thickness signals.
Sensor inputs can be assigned to different materials, averaged for accurate
deposition control in large systems, or configured for a dual sensor. The rate
sampling mode allows a shuttered sensor to extend sensor life in high rate
processes. Rate displays of 0.1 Å/s or 0.01 Å/s are user selectable. In addition,
frequency or mass displays can be selected. Four relay outputs allow the SQM-160
to control source or sensor shutters, signal time and thickness setpoints, and signal
crystal failure. Digital inputs allow external signals to start/stop and zero readings.
The SQM-160 comes with an RS-232 port and Windows ® software that allows
instrument setup from your computer. The software can be used to set and store
all parameters, operate the instrument, and save process data in an .txt file that can
easily be imported into Excel
®
. USB or Ethernet options add to the communications
flexibility.