SKY™ Capacitance
Diaphragm Gauge
CDG045
CDG045-H
Operating Manual
Incl. Declaration of Conformity
tina07e1-b (0304)
Product Identification
In all communications with INFICON, please specify the in-
formation given on the product nameplate. For convenient
reference transfer this information into the diagram below.
Model:
PN:
SN:
V W
INFICON AG, LI-9496 Balzers
Validity
This document applies to products with the following part
numbers:
CDG045:
360-010
0
Þ
!
"-Rohr
1
Þ
DN 16 ISO-KF
2
Þ
DN 16 CF-R
3
Þ
8 VCR
0
Þ
10
-1
… 1000 Torr (F.S.)
1
Þ
10
-2
… 100 Torr (F.S.)
2
Þ
10
-3
… 10 Torr (F.S.)
4
Þ
10
-4
… 1 Torr (F.S.)
5
Þ
10
-5
… 0.1 Torr (F.S.)
0
Þ
Torr
1
Þ
Pa
2
Þ
mbar
0
Þ
1.33×10
1
… 133322 Pa (F.S.)
1
Þ
1.33×10
0
… 13332.2 Pa (F.S.)
2
Þ
1.33×10
-1
… 1333.22 Pa (F.S.)
4
Þ
1.33×10
-2
… 133.322 Pa (F.S.)
5
Þ
1.33×10
-3
… 13.3322 Pa (F.S.)
0
Þ
1.1×10
-1
… 1100 mbar (F.S.)
1
Þ
10
-2
… 100 mbar (F.S.)
2
Þ
10
-3
… 10 mbar (F.S.)
4
Þ
10
-4
… 1 mbar (F.S.)
5
Þ
10
-5
… 0.1 mbar (F.S.)
CDG045-H High Speed:
371-030 (10
-4
… 1 Torr (F.S.),
DN 16 ISO-KF)
371-031 (10
-5
… 0.1 Torr (F.S.),
DN 16 ISO-KF)
371-032 (10
-4
… 1 Torr (F.S.),
8 VCR)
371-033 (10
-5
… 0.1 Torr (F.S.),
8 VCR)
The part number (PN) can be taken from the product name-
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to gauges with the DN 16 ISO-KF
vacuum connection. They apply other vacuum connections
by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The temperature controlled SKY™ Capacitance Diaphragm
Gauges of the CDG045 and CDG045-H series are intended
for absolute pressure measurement of gases in the pressure
ranges specified in section "Validity".
The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller or another appropriate controller.
Functional Principle
The SKY™ Capacitance Diaphragm Gauges consist of a
capacitive sensor element made of aluminum oxide ceramic
and electronics which convert the capacitance change into a
DC voltage output signal.
The output signal is linear to the measured pressure and
independent of the gas type.
1)
The sensor is heated and its temperature kept constant at
45
°
C to prevent contamination by process products and by
products.
Trademarks
SKY™
INFICON GmbH
VCR®
Swagelok Marketing Co.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and
environmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
·
Adhere to the applicable regulations and take the nec-
essary precautions for the process media used.
Consider possible reactions with the product materials.
·
Adhere to the applicable regulations and take the nec-
essary precautions for all work you are going to do and
consider the safety instructions in this document.
·
Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
1)
For p < 1 mbar and T
Gauge
¹
T
Vacuum
the linearity of a
temperature controlled gauge is influenced by the thermal
transpiration (gas type dependent) at the maximum in the
same order of magnitude as the zero point stability.
See K. F. Poulter et al., Vacuum 33, 331 (1983); W. Jitschin
and P. Röhl, J. Vac. Sci. Technol. A, Vol. 5, No. 3, 1987 .
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
·
disregard the information in this document
·
use the product in a non-conforming manner
·
make any kind of interventions (modifications, alterations
etc.) on the product
·
use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Technical Data
Measurement range
®
"Validity"
Accuracy
0.15% of reading
Resolution
360-X1X … 362-X1X
364-X1X, 365-X1X
371-030 … 371-033
0.0015% F.S.
0.0025% F.S.
0.0025% F.S.
Temperature effect on zero
360-X1X … 364-X1X
365-X1X
371-030, 371-032
371-031, 371-033
0.0025% F.S./ °C
0.0050% F.S./ °C
0.0025% F.S./ °C
0.0050% F.S./ °C
Temperature effect on span
360-X1X … 365-X1X
371-030 … 371-033
0.01% of reading/ °C
0.01% of reading/ °C
Gas type dependence
none
1)
Output signal (measuring signal)
Measurement range
Voltage range
0 … +10.0 V
-11.0 V … +11.0 V
Relationship voltage-pressure
linear
1)
Output impedance
200
W
(short-circuit proof)
Minimum loaded impedance
10 k
W
Response time
360-X1X … 362-X1X
364-X1X, 365-X1X
371-030 … 371-033
30 ms
100 ms
30 ms
Gauge identification
Resistance 13.2 k
W
refer-
enced to supply common
Supply
DANGER
The gauge may only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded
protective extra-low voltage (SELV-E according
to EN 61010). The connection to the gauge has
to be fused.
2)
Supply voltage at the gauge
at pin 7
or pin 11
15 VDC ±5%
18.0 … 26.4 VDC
Power consumption (depending
on supply voltage)
during heat-up
at operating temperature
9 … 19 W
4 … 5 W
Internal fuse
1 AT, slow, automatic
reset (Polifuse)
The gauge is protected against polarity change of the supply
voltage.
Electrical connector
D-Sub, 15-pin, male,
screwlock UNC 4-40
Sensor cable
5 conductors plus
shielding
Cable length
£
50 m (5x0.50 mm²)
For longer cables, bigger conductor cross-sections are
required (R
conductor
£
1.0
W
).
Grounding concept
Vacuum connection – signal
common
®
"Electrical Connection"
Supply common – signal
common
conducted separately; for
differential measurement
2)
INFICON controllers fulfill these requirements.
