Inficon IC6, Руководство по эксплуатации

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IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
F
igu
re 3-21 Si
mplified
IC6 st
ate
se
quen
ce diag
ram
ST
OP
ST
OP
NO
NO
NO
ON
YE
S
YE
S
YE
S
ON
/STB
Y
STB
Y/P
ow
er
FAIL
ST
ANDB
Y
RESE
T
YE
S
YE
S
NO
NO
NO
SA
VE
CURRENT PROCESS
DA
TA
TURRE
T DELA
Y
TIME OUT
CRUCIBLE
IN
POSITION
?
t
MEMOR
Y CHECKS
t
READ
CO
NFIGURA
TION
SWIT
CHES
t
REST
ORE CURRENT
PROCESS V
AL
UES
PREC
ONDITION RISE
PREC
ONDITION SO
AK
RISE TIME
1
SOURCE SWIT
CH
SAME SOURCE AND CRUCIBLE
?
IDLE POWER ZERO
?
t
LO
AD FILM
PA
RAME
TERS
SO
AK
TIME
1
SO
AK
HOLD INPUT
?
RISE TIME
2
SO
AK
TIME
2
SO
AK
HOLD 2 INPUT
?
SHUT
TER
DELA
Y
?
SHUT
TER
DELA
Y
SHUT
TER
DELA
Y
?
CO
N
TR
O
L
DELA
Y
YE
S
YE
S
NO
MPWR
SE
T LA
YE
R
TO
ST
AR
T
)
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)
)
)
YE
S
YE
S
A
A
NO
NO
NO
NO
NO
YE
S
YE
S
YE
S
YE
S
NO
ST
AR
T
or
Au
to
Star
t
Nex
t=Y
es
READ
Y
IDLE
INCREMENT
LA
YER NUMBER
IF NO
T READ
Y
OR
ST
OP ST
AT
E
WA
S
TIME POWER USED
?
IDLE RA
MP
TIME
FEED TIME
FEED RA
MP
ON FINAL
THK
DECISION
DA
TA
LO
G
UPD
ATE
THICKNESS
FINAL
TIME ELAPSED
XT
AL F
AIL
TIME
ELAPSED FINAL THK XT
AL F
AIL
?
RA
TE
RA
MP
FINAL THICKNESS
RA
TE RAMP
THICKNESS
XT
AL F
AIL
FINAL THK THK LIMIT X
TAL F
AIL
?
XT
AL
SWIT
CH
SELEC
TED
?
DEPOSIT
RA
TE
W
AT
CHER
DEPOSIT
RE
TA
IN
THICKNESS
AT
“ST
O
P”
V
AL
U
E
ZERO
THICKNESS
PROCESS CONTINUE
?
GOOD XT
AL ?
SWIT
CH
XT
AL
DESIRED
RA
TE = 0.0
YE
S
NO
XT
SW
TIME POWER
SELEC
TED
?
“T
O
FAIL
URE
AC
TION
ST
ATE”
TIME POWER FINAL THICK
?
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