Inficon IC6, Руководство по эксплуатации

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IC6 Operating Manual
9.5 Logic Statement Example
The logic statement capability of the IC6 allows for automation of a thin film
process. For example, it is possible to start a process without manually pressing
START. One way to accomplish this is:
IF: PROCESS END ANY AND LAYER END ANY
THEN: START
The STOP can be added to assure that the process does not start again if it was
stopped.
To enter this statement follow this procedure:
1
On the MAIN MENU screen, make sure the state is READY. If it is not, press
STOP, then press RESET.
2
Move the cursor to Logic, then press the MENU key.
3
Using the down arrow, move to one of the Logic x-y pages.
4
From the Logic x -y page, press the right arrow key to move to the statements.
5
Place the cursor on any blank logic statement, using the up and down cursor
keys.
6
Press F1 EDIT.
7
Press F1 EVENT/ACTION.
8
Cursor to LAYER END. Press F3 INSERT. In the upper left of the screen,
LAYER END ### will appear after IF.
9
Cursor to PROCESS END. Press F3 INSERT. PROCESS END ### ccc LAYER
END ### will appear after IF.
10
Press F1 IF/THEN.
11
Cursor down to THEN. Press F1 EVENT/ACTION.
12
Cursor down to START. Press F3 INSERT. Press F1 IF/THEN.
13
Cursor to PROCESS END. Press F1 EVENT/ACTION. Press F4 NEGATE. A
bar will appear above PROCESS END.
14
Press F1 IF/THEN.
15
Cursor to ###. Press 0, Enter. ### will be replaced by ANY.
16
The cursor should now be on ccc. Press TOGL once to change the ccc to AND.
Press Enter.
17
Cursor to ###. Press 0, Enter. The ### will be replaced by ANY.
18
Press F4 SAVE & EXIT to return to the Logic page. At this point the Logic
Statement is entered into memory.