Inficon HAPSITE ER, Руководство по эксплуатации

Страница: 406 / 436

17 | Maintenance INFICON
406 / 436 074-471-P1E HAPSITE ER Operating Manual
The high pressure error may also indicate that the NEG pump is worn and needs
replacing. Please continue reading for information on how to troubleshoot NEG
pumps.
To view the MS pressure:
1 Touch HAPSITE icon.
2 Touch the Tune icon.
3 Locate the MS pressure. In order for HAPSITE ER to properly operate, the
pressure must be below 6 e-03. If pressure is too high, ionizer will not activate.
If the NEG pump has 150 hours or less, consider trying a bakeout to extend the life of
the NEG pump. To check the NEG pump hours, refer to NEG Status [
}
191].
If the NEG pump has more than 250 hours, a bakeout can be tried, though the results
are likely to be limited.
17.5 Attaching HAPSITE to the Service Module
CAUTION
Prior to attaching HAPSITE ER to the Service Module, unplug the black
NEG cable inside the HAPSITE ER front panel. This will ensure that the
NEG will not heat when using the Service Module to provide vacuum.
WARNING
Venting HAPSITE ER with a NEG that has not cooled causes total NEG
consumption and may possibly result in severe damage to the HAPSITE
ER mass spectrometer components. It may also result in physical injury
since extreme heat generation from NEG consumption creates hot
surfaces.
If HAPSITE ER is turned on with the NEG at 400°C, then the NEG must be cooled
before proceding. Turn off HAPSITE ER and allow it to cool for approximately 24
hours or until the NEG is at room temperature.