Inficon Fab UL6000 Fab, Руководство по эксплуатации

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6 | Operation INFICON
74 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-02-(2207)
High background value
If the actual background is higher than 1×10
-8
mbar l/s, it can no longer be
automatically deducted. The high background must be pumped down in this case.
6.3.14.1 Determine the background of the inlet area
This function determines the value of the internal Helium background.
If "Zero and Filter" are shown in the window under background suppression with value
"Inlet area" selected, this value is then deducted from the measured signal
whenSTART is pressed. See also "Change background suppression [
}
73]".
ü Inlet blank flange
ü
Operation mode Vacuum Mode
ü
The device is in the state "Standby" or "Measure".
1 Press .
2 Select the calibration "Inlet background”.
3 To start the automatic determination of the intake background, press .
6.3.15 Change SL3000 settings for sound / light
You can set up how you are to be additionally informed on the display of the
touchscreen concerning the measurements. The settings take effect with Setpoint 1.
ü Operator or Supervisor rights
1 > Setup > Measurement > Sniffing > SL3000 sniffer line
2 Select "Sniffer line light alarm configuration".
ð As choices there are "Lighter", Off" or "Flash".
3 Select "Sniffer line light brightness".
ð
You have a choice of OFF / 1 - 6.
4 Switch-on the "Sniffer line beep" sniffer audio.
ð
As choices there are "Off" or "Beep when setpoint 1" available.
5 Save .
6.3.16 Change the sniffer line pressure monitoring
In the operation mode Sniffer (SL200 or SL3000) automatic pressure monitoring is
activated. The preset pressure limits define a maximum and a minimum inlet pressure.
For pressure monitoring, the pressure sensor p3 is used with the SL200, and the
pressure sensor p4 with the SL3000. See also "View vacuum diagram [
}
92]".
If the pressure does not lie within these limits then generally the caliper is either
blocked or broken. Fault messages are issued according to the following rules:
Inlet pressure > Upper limit: Caliper defective.