Inficon Fab UL6000 Fab, Руководство по эксплуатации

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6 | Operation INFICON
60 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-02-(2207)
ð
The device closes the inlet valve as soon as the measured leak rate exceeds
the shut-down threshold. This will prevent an excess amount of helium from
entering the mass spectrometer. Consequently, the leak detector is prevented
from becoming contaminated by Helium. The helium entering the specimen
can be pumped out using an external pump. If no external pump is being
used, we recommend that the test object is vented before continuing with the
measurement.
3 If you want to prevent particles from being sucked into the device make sure
that the test object is first pumped down with another parallel running pump.
Activate the option "Particle protection" additionally.
ð The leak detector only starts with the pump down once the inlet pressure p1
has fallen below 1 mbar.
4 Note: The following setting does not apply if the vacuum range "Massive" is
switched on. See also “Activate vacuum ranges [
}
66]“:
To change the maximum evacuation time after a gross leak is detected, enter
the desired time in seconds under "Evacuation time gross leak".
ð
This setting determines when a gross leak warning message is signaled. The
factory setting is 600 s. If the inlet pressure p1 does not drop below 100 mbar
within this time span, a fault message is signaled. This menu point is
especially useful with series tests that always have the same test conditions.
After pressing the START button the specimen is evacuated. If the
corresponding pressure conditions (p1 < 100 mbar) is not reached within the
time that is to be set here or falls below, the pump down process is aborted
and a warning message appears in the display.
The time that is to be selected depends on the one hand on the desired
reaction time for the gross leak message and on the other hand on the
volume of the test object and from the effective pumping speed.
If the pump down process should not be aborted enter "0". This corresponds
to the entry "infinitely".
5 Note: The following setting does not apply if the vacuum range "Massive" is
switched on. See also “Activate vacuum ranges [ } 66]“:
To change the maximum evacuation time before the measurement, enter the
desired time in seconds under "Evacuation time measurement".
The “Evacuation time measurement“ concerns the time until the first approved
measurement range is reached.
The factory setting is 1800 s.
ð If the anticipated pressure conditions are not reached during the evacuation
time, a warning message is shown after the expiration of the evacuation time.
For the pressure conditions, see also the following setting options:
> Setup> Measurement> Pressure limits
and
> Setup > Measurement > Vacuum > Vacuum ranges
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