Inficon Fab UL6000 Fab, Руководство по эксплуатации

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4 | Description INFICON
18 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-02-(2207)
4 Description
4.1 Function
The device is a leak detector for detecting and measuring leaks in test objects. The
device is suitable for leak detection using the vacuum method and the sniffer method.
It uses the ULTRATEST
TM
sensor technology.
• When using the vacuum method the test object is evacuated and subjected to
helium or forming gas from the outside. To do this it is necessary to establish a
vacuum connection between the device and the test object.
• When using the sniffer method an overpressure is established in the test object
using helium or a forming gas. The test object is then inspected on the outside
using a sniffer line.
Before performing leak tests, the leak detector should first be calibrated. See also
"Internal calibration [
}
75]" and "External calibration [
}
76]".
4.2 Operation modes
4.2.1 Operation mode "Vacuum"
The inlet flange is located on the upper side of the device.
To be able to perform leak detection using the vacuum method the inlet flange must
be connected to the desired test object.
If necessary, use a suitable reducer to connect the specimen to the inlet flange. An
adapter DN63 ISO-K/DN40 ISO-KF is included in the scope of delivery.
If the pressure in the specimen is less than the surrounding pressure, then helium
(which is sprayed over the specimen) can penetrate into the specimen if there is a
leak. Helium can be detected in the leak detector using a mass spectrometer.
HYDRO•S
With the operation mode "Vacuum" there is the possibility to use, HYDRO•S.
HYDRO•S reduces the time to measuring mode when using large test objects.
The desorption of water vapor in a test chamber produces an unwanted background
signal. HYDRO•S separates and suppresses this signal from the helium signal, so that
the test can start earlier. A new calibration is required after a change to this mode. In
the mode HYDRO•S the lower detection limit is 1 x 10
-10
mbar l/s.
See also
2
External calibration [
}
76]