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Cleaning and maintenance | 8

UL6000-Fab-Operating-instructions-iina75en1-04-(2109)

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8 Cleaning and maintenance

All cleaning and maintenance work described here must be carried out without

opening the device!

DANGER

Risk of death from electric shock

There are high voltages inside the device. Touching parts where electrical voltage is

present can result in death.

► Disconnect the device from the power supply prior to any cleaning and maintenance

work. Ensure that the electrical supply cannot be switched back on unintentionally.

► Don’t open the device!

8.1 Cleaning the housing

Wipe the housing with a soft damp cloth.

Use only water to moisten. Avoid cleaners that contain alcohol, fat or oil.

8.2 Change the filter mat inside the tool box

Filter mat tool box

Required tools

None

Depending on the location, the filter mat in the tool box can become dirty. Check the

filter mat periodically and change it, if the filter mat is significant dirty.

They consist of a new filter mat.

Make sure that the device is disconnected from the power supply by pulling the

power plug securely.

Open the tool box with the delivered key.

Remove the plastic grid. It is attached only by locking lugs.

Содержание 550-520

Страница 1: ...Translation of the original operating instructions UL6000 Fab Helium Leak Detector with ULTRATEST Sensor Technology iina75en1 04 2109 Catalog No 550 520 From software version 1 51 Operating unit ...

Страница 2: ...INFICON GmbH Bonner Strasse 498 50968 Cologne Germany ...

Страница 3: ...ration mode Vacuum 18 4 2 2 Operation mode Sniffing 19 4 3 Design of device 21 4 3 1 Overall device 21 4 3 2 Control unit 24 4 3 2 1 START button 25 4 3 2 2 STOP button 26 4 3 2 3 ZERO button 26 4 3 2 4 Meaning of the button LEDs 27 4 3 2 5 Meaning of the status LED 28 4 3 2 6 Design of touchscreen 28 4 3 3 Vacuum connections 30 4 3 3 1 Inlet 30 4 3 3 2 Exhaust 31 4 3 3 3 Purge gas connection 31 4...

Страница 4: ...surement screen 55 6 2 6 1 Changing the presentation of the line graph 55 6 2 6 2 Changing the presentation of the bar graph 56 6 2 6 3 Changing the presentation of the circle graph 57 6 2 6 4 Change general display settings 57 6 2 7 Change units 58 6 2 8 Change audio settings 58 6 2 9 Change the protection settings 59 6 2 10 Set maintenance interval Filter sniffer tip or Air filter 61 6 2 11 Acti...

Страница 5: ...76 6 3 16 4 Measure internal calibration leak 76 6 4 Measure 77 6 5 Measuring helium ambient concentration 78 6 6 Measurement data 78 6 6 1 Switch on data recording and configure export 78 6 6 2 Display measurement cycles 79 6 6 3 Export measurement data via network 80 6 6 4 Measurement data database Information 81 6 7 Information 82 6 7 1 Call the latest information to the current measurement val...

Страница 6: ... 6 14 Logging off from the device 90 6 15 Switching off the device 91 7 Warning and error messages 92 7 1 Warning and error messages UL3000 UL6000 93 8 Cleaning and maintenance 109 8 1 Cleaning the housing 109 8 2 Change the filter mat inside the tool box 109 8 3 Replacement of the filter mat on the bottom of the device 110 8 4 Replacing the SL200 sniffer line filter 111 8 5 Replacing the SL3000 s...

Страница 7: ...or via web browser LAN 131 10 4 1 1 Configure the LAN connection of the leak detector 131 10 4 1 2 Setting the LAN connection in the PC or Tablet 132 10 4 1 3 Allow client access 132 10 4 2 Operate leak detector via web browser wireless LAN 133 10 4 2 1 Configure the wireless LAN connection of the leak detector 133 10 4 2 2 Setting the wireless LAN connection in the PC or Tablet 134 10 4 2 3 Allow...

Страница 8: ...chnically qualified specialists with experience in the field of leak testing technology 1 2 Warnings DANGER Imminent hazard resulting in death or serious injuries WARNING Hazardous situation resulting in potential death or serious injuries CAUTION Hazardous situation resulting in minor injuries NOTICE Hazardous situation resulting in damage to property or the environment 1 3 Definition of terms Me...

Страница 9: ...t pressure FINE FINE designates the connection to the turbo molecular pump for medium inlet pressures This is also used for the Sniffing operation mode Forming gas Forming gas is a collective term for gas mixtures of nitrogen and hydrogen GROSS GROSS donates the connection to the turbo molecular pump with the lowest sensitivity This allows high inlet pressures Internal helium background The measur...

Страница 10: ...already in the volume on the surfaces of the test chamber supply lines and even in the leak detector itself This certain amount of tracer gas generates a measurement signal which is called the Background signal The ongoing evacuation of the test chamber continuously reduces this background signal Operation mode Sniffing Ambient air is continuously fed into the leak detector via the sniffer line Th...

Страница 11: ...ble fluids and vapors Pumping down of gases contaminated with particles Placing liquids on the leak detector or in the corrugated hose holder Shock loads or vibrations Use in locations where the device and display can be damaged by falling objects Pumping hydrogen concentrations which can explode in combination with oxygen The allowable composition of venal gas mixtures can be read in the safety d...

Страница 12: ...ON 12 146 UL6000 Fab Operating instructions iina75en1 04 2109 Operation without exhaust pipe in poorly ventilated rooms depending on the type of gases used Note This device is not intended to be used in living areas ...

Страница 13: ...s operation Operate the device only if it is in perfect technical condition and has no damage Only operate the device properly in accordance with this instruction manual in a safety and risk conscious manner Adhere to the following regulations and observe their compliance Intended use Universally valid safety and accident prevention regulations International national and local standards and guidel...

Страница 14: ...voltage range The permitted operating voltage range is indicated on the device Explosion hazard Hydrogen is a flammable and explosive gas Use only tracer gases with a concentration of hydrogen that cannot explode in combination with oxygen The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers Danger from suction effect at the inlet fl...

Страница 15: ...ion leak 1 Inspection certificate leak detector 1 Sticker with leak rate of the built in helium test leak 1 In addition 2 keys to open the jim crow under the handle Check the delivery contents after receiving the product to ensure it is complete Explanations 1 To guide the power cord from the device to the ground avoiding the risk of tripping See Connect the supplied accessories 44 2 For mounting ...

Страница 16: ... the gas cylinder with a valve protection cap Make sure that any connected spray hose is never under tension Observe the manufacturer s safety instructions for handling gas cylinders WARNING Risk of injury due to electric shock Only move the device when the mains cable is not plugged in Check the power cord for damage before each use WARNING Risk of injury from falling or tipping device If the dev...

Страница 17: ...during transport without transport packaging If safe transport by pushing is not possible the device should be protected from damage by the original packaging Keep the original packaging for transport NOTICE Damage to the leak detector from industrial trucks On the bottom side of the device there are mounting clips for the fans Industrial trucks such as forklifts can damage these clips If you cann...

Страница 18: ...mode Vacuum The inlet flange is located on the upper side of the device To be able to perform leak detection using the vacuum method the inlet flange must be connected to the desired test object If necessary use a suitable reducer to connect the specimen to the inlet flange An adapter DN63 ISO K DN40 ISO KF is included in the scope of delivery If the pressure in the specimen is less than the surro...

Страница 19: ... see Connections for accessories and control signals 33 Via this connector both the electrical connection and the connection of the vacuum system is made As no connection is made to the inlet flange on the upper side of the device then no vacuum components that are already connected to the inlet flange need to be removed when changing to the operation mode Sniff Comparison SL200 SL3000 Detection l...

Страница 20: ...4 Description INFICON 20 146 UL6000 Fab Operating instructions iina75en1 04 2109 Acknowledge calibration via a button on the sniffer probe Yes ...

Страница 21: ...INFICON Description 4 UL6000 Fab Operating instructions iina75en1 04 2109 21 146 4 3 Design of device 4 3 1 Overall device Fig 1 Front view ...

Страница 22: ...4 Description INFICON 22 146 UL6000 Fab Operating instructions iina75en1 04 2109 Fig 2 Front view with open flap ...

Страница 23: ...INFICON Description 4 UL6000 Fab Operating instructions iina75en1 04 2109 23 146 Fig 3 Back view The picture shows standard accessories and optional accessories ...

Страница 24: ...sists of a touchscreen and a control panel with the buttons START Stop and ZERO background suppression on the housing Also see Design of touchscreen 28 and START button 25 The LED lighting of the buttons on the control panel changes its display color according to the device state see also Meaning of the button LEDs 27 The control unit can be rotated ...

Страница 25: ...inserting a WiFi USB adapter for a WiFi connection see Operate leak detector via web browser wireless LAN 133 4 Ethernet network interface For connection to a LAN network maximum cable length 30 m shielded The remote control RC1000 is optionally available see also Accessories and spare parts 120 You can also operate the device using a notebooks or tablets see also Operate leak detector via web bro...

Страница 26: ... more than just stopping the measurements but also perform ventilation Function Touchscreen Control panel Stop Stop button Vent Press the Stop button again and keep it pressed for approx 2 seconds Prerequisite is the setting ventilation mode manual see Activate vacuum ranges 66 4 3 2 3 ZERO button To hide the Background signal see also Definition of terms 8 Can be operated via the touchscreen of t...

Страница 27: ...RO should be activated only if the leak rate signal is stable and no leak is measured See also Set and use the function ZERO 69 4 3 2 4 Meaning of the button LEDs START button LED STOP button LED Meaning Off Flashing red No connection to the control unit Pulsing blue Pulsing blue Run up Off Green Standby vented Vent valve open Off Blue green Standby pumped out Vent valve close Pulsing green Off Pu...

Страница 28: ...en Evacuate pumping Flashing green Calibrate Flashing green Software is started immediately after the device is switched on Flashing green Boot loader is waiting for a software update after starting the software update of the basic unit Green Measure Yellow Measuring with warning not acknowledged Red Error 4 3 2 6 Design of touchscreen The display is a touchscreen The touchscreen responds to being...

Страница 29: ...rt Bar chart HYDRO S Leak rate Measurement value Inlet pressure Leak rate Max ZERO LAN WLAN Navigation buttons The buttons can appear in five different colors Gray Function is disabled Dark blue Function can be activated Light blue Function is active Red Error is active navigation button diagnosis Orange Warning is active navigation button diagnosis Settings Operation Information Diagnosis Table 1...

Страница 30: ...n Supervisor View the time or set the time See also Overview of Rights Groups 52 4 3 3 Vacuum connections 4 3 3 1 Inlet The inlet is located on the upper part of the device It is a DN63 flange If necessary use a suitable reducer to connect the specimen to the inlet flange An adapter DN63 ISO K DN40 ISO KF is included in the scope of delivery If you select the vacuum leak test mode connect the test...

Страница 31: ...e The exhaust gas connection must be continuously connected to an exhaust gas system and must not be closed The exhaust is located on the lower side of the device The exhaust is a tubular connection with internal and external thread To connect the exhaust hose adapter see also Connect the supplied accessories 44 4 3 3 3 Purge gas connection The connection for the purge gas is located on the lower ...

Страница 32: ...If necessary the test specimens can be ventilated with another gas e g fresh air dry air nitrogen etc via the ventilation connection The pressure at the ventilation connection must not exceed the atmospheric pressure by more than 100 mbar In these cases a ventilation hose must be connected to the ventilation connection of the device see Connections for accessories and control signals 33 ...

Страница 33: ...ransmitter via an adapter The remote control is not part of the scope of delivery of the device SERVICE Connection exclusively for service maximum cable length 3 m shielded Connection for mains cable For power supply of the device Venting connection For hoses with an outside diameter of 14 mm see also Venting connection 32 Purge gas connection For hoses with an outside diameter of 8 mm see also Pu...

Страница 34: ... diagonal 7 inch Resolution 800 x 480 pixel Colors 16 7 M Background light LED Electrical data UL6000 Fab Operating voltage 100 240 V 10 50 60 Hz Max power consumption 1500 VA Typical power consumption when pumping in measuring mode 1000 VA 800 VA Max power consumption 100 V 13A Max power consumption 240 V 6A Short circuit current rating SCCR 300A Main fuse Circuit breaker 20 A thermal fuse Protec...

Страница 35: ...30 s Run up time 2 minutes Detectable masses 4 He H2 Mass 3 e g H D 3 He or H3 Minimum detectable leak rate sniffer mode 5 x 10 8 mbar l s Gas flow through sniffer line SL200 25 sccm Gas flow through sniffer line SL3000 160 sccm Measurement range 12 decades Sound pressure level in Standby 70 dB A Ion source 2 long life iridium cathodes Yttrium oxide coated The A weighted emission sound pressure le...

Страница 36: ...ation On can only be changed by service Interfaces leak rate unit vacuum operation mbar l s Interfaces leak rate unit sniffer operation mbar l s Interface pressure unit mbar Mass 4 helium Protocol on the IO1000 RS232 connection ASCII Analog output IO1000 channel 1 Leak rate mantissa Analog output IO1000 channel 2 Leak rate exponent Analog output IO1000 scaling 0 5 V decade Digital output pin 1 IO1...

Страница 37: ...ar Upper pressure limit SL200 capillary broken 1 mbar Audio alarm TRIGGER Audio alarm delay 60 s Notification beep On Inlet area offset mass 2 1 3 10 10 A Modifiable by function Determine the background of the inlet area 73 Inlet area offset mass 3 6 7 10 14 A Modifiable by function Determine the background of the inlet area 73 Inlet area offset mass 4 3 3 10 15 A Modifiable by function Determine ...

Страница 38: ...Off Background suppression internal only Ventilation delay manually Device at the LD connection I O module Maintenance messages all activated Vacuum ranges MASSIVE GROSS FINE and ULTRA all ON Bus module address 126 Calibration leak external vacuum Hydrogen 1 x10 7 mbar l s Calibration leak external vacuum mass 3 1 x10 7 mbar l s Calibration leak external vacuum Helium 1 x10 7 mbar l s Calibration ...

Страница 39: ...1111 Language English Diagram type set Line chart Line chart Scaling Logarithmic Decades 4 Autoscale On Lower diagram limit 1 10 12 Time axis 30 s Bar chart Scaling Logarithmic Decades 4 Autoscale On Lower diagram limit 1 10 12 Circle chart Decades 5 Autoscale On Lower diagram limit 1 10 12 Data recording Export format CSV en Enabled Off Export metadata On WLAN Name SSID UL3xxx Network key INFICON...

Страница 40: ...you want to move the device disconnect the power cord from the wall socket To prevent unintentional movement fix the device at the destination by locking the wheels with the parking brake Only operate the device in dry environments and only in buildings Operate the device away from sources of liquid and moisture Position the device so that you can always reach the plug for unplugging Do not operat...

Страница 41: ...from the mains immediately if smoke is emitted from the device WARNING Device may fall over due to earthquake In areas where there is a risk of earthquakes secure the device to the device handle with a short chain or a tension belt designed for 1100 N Fig 7 Handle of the device WARNING Shortening of the corrugated hose during evacuation A corrugated hose connected to the inlet is shortened during ...

Страница 42: ...ntain security vulnerabilities This vulnerability may be exploited through the Ethernet and USB interfaces of the leak detector to provide unauthorized access to the system Ensure that no unauthorized person has access to these interfaces for example by using a USB port Ethernet port lock In order not to jeopardize the security of your company network never connect the leak detector directly to th...

Страница 43: ... use in an area that has a constant ambient temperature if possible For proper functioning of wheels and brakes remove the adhesive strips from the wheels In order not to block the exhaust opening on the lower part of the device place the feet of the unit on a firm even surface To easily reach the power switch on the back of the device ensure there is sufficient free space behind the device Do not...

Страница 44: ...t Hook 4x screw M6 x 12 4x lock washer S6 4x Required tools supplied Wrench T30 Torx In order to be able to fix the mains cable and if necessary a sniffer line on the device mount the hooks on the device as shown If there is a bottle holder attached to the device mount the hooks on the bottle holder and secure the screws with the delivered nuts 1 3 2 1 Hook 2 Screw M6 x 12 3 Guard washer S6 ...

Страница 45: ...INFICON Installation 5 UL6000 Fab Operating instructions iina75en1 04 2109 45 146 Fig 8 Hook at the instrument or at the optional bottle holder ...

Страница 46: ...S6 1x Required tools supplied Wrench T30 Torx To avoid the risk of tripping mount the strain relief power supply at the device Thus the power supply is lead from the device to the ground If there is a bottle holder attached to the device mount the power line strain relief on the bottle holder and secure the screw with a delivered nut 1 3 2 1 Screw M6 x 12 2 Guard washer S6 3 Strain relief ...

Страница 47: ...ose nozzle G inch male thread you can alternatively fix this hose nozzle in the exhaust port by turning it clockwise WARNING Danger of poisoning due to harmful gases Depending on the connected container and the gas contained therein harmful gases can get into the ambient air via the exhaust filter of the leak detector Make sure you have protection measure to prevent inhaling hazardous gases Do not...

Страница 48: ...oid injury from the sniffer tip align the sniffer tip in the bracket so that it points away from the operator A bracket is available for the sniffer tip The bracket can be mounted on the back of the device see also Overall device 21 Scope of delivery amount Bracket 1x M6 x 12 mm screws 2x S6 x 10 x 0 7 mm washers 2x 1 Mount the bracket as shown using the two screws and washers on the back of the d...

Страница 49: ...Immediately disconnect the device from the mains in case of visible defects This also applies to the development of smoke 5 5 Checking the operation of the device NOTICE Turbo molecular pump can be damaged The running turbo molecular pump can be damaged by jerky movements or foreign objects Avoid any jerking movements or vibrations to the device during operation and for up to 2 minutes after switc...

Страница 50: ...n the control panel for a few seconds the inlet of the device is ventilated 8 If you want to end the test now you can switch off the device 9 If you want to check the internal calibration wait for getting a better quality of measurement results 15 to 20 minutes until the device has warmed up 10 To call the calibration menu press on the cross hair icon 11 Select Internal 12 Press the button ð The a...

Страница 51: ...ible to start up the device anyway by confirming this message This may damage the backing pump Do not operate the device at an ambient temperature below 10 C In order to switch on the device press the power switch ð When delivered the device shows the window Standby after run up Fig 9 Window Standby Starting the measurement Calibrate Purge Vent At startup some notifications or notices for the user...

Страница 52: ...s 6 2 3 1 Overview of Rights Groups The rights of a user depend upon which group he belongs to User Members of the group User can perform measurements view history of the measurement results view device information view error logs Operator Members of the group Operator have all the rights of the group User Moreover they can Create modify delete user Export delete measurement data Modify measuremen...

Страница 53: ...ar to load a user profile The login window opens to modify a user profile The window User profile opens to delete a user profile A confirmation screen appears 3 After selecting some tools the User profile window opens If this window opens enter a user name change it or keep it as required Mueller User Mueller PIN Name Group Language German User profile 4 If the PIN field is not filled in or you wa...

Страница 54: ...on the device the user Supervisor automatically logs in and the measurement screen is called This default user also has the permissions of the group Supervisor Without changing this setting any user can operate all functions without restriction You can specify that the login window appears after you turn on the device instead of automatically logging on In the login window all users can login whic...

Страница 55: ...ntation of the measurement screen To switch between the different diagram presentation press on the lower left of the measurement screen see Design of touchscreen 28 You can select between the following presentations Line chart Bar chart Circle chart You can further configure the different diagram presentations See Changing the presentation of the line graph 55 Changing the presentation of the bar...

Страница 56: ...40 seconds 6 If the option Autoscale is not active select Lower diagram limit in the field the desired decade 7 Save 6 2 6 2 Changing the presentation of the bar graph Fig 11 Presentation as bar graph ü Operator or Supervisor rights 1 Display Bar graph 2 In the field Scaling select between Linear and Logarithmic 3 Select between the different viewable Decades 4 To dynamically adjust the upper and ...

Страница 57: ...omatic scaling via the option Autoscale 4 In the Lower diagram limit field select the desired lower limit for the circle chart This limit is also effective if the Autoscale option is activated 5 Save 6 2 6 4 Change general display settings ü Operator or Supervisor rights 1 Display General 2 If very small leak rates are of no interest to your application and you want to raise the lower leak rate li...

Страница 58: ...ts 1 Setup General Units 2 If necessary change the units of the Leak rate unit vacuum the Leak rate unit sniff and the Pressure unit ð The option Equal to display is activated according to the factory settings so that the units for the interface can be shown exactly as the units of the device 3 In order to independently select the units of the interface deactivate the option Equal to display ð Fur...

Страница 59: ...e frequency range is 300Hz to 3300Hz ð PINPOINT The sound of the acoustic signal changes its frequency within a specific range of leak rates This range extends from a decade below the selected setpoint value to a decade above Below this leak rate range the sound is constantly low above the sound is constantly high ð SETPOINT The pitch is proportional to the leak rate The signal sounds if the leak ...

Страница 60: ...o change the maximum evacuation time after a gross leak is detected enter the desired time in seconds under Evacuation time gross leak ð This setting determines when a gross leak warning message is signaled The factory setting is 600 s If the inlet pressure p1 does not drop below 100 mbar within this time span a fault message is signaled This menu point is especially useful with series tests that ...

Страница 61: ... your choice in hours for the Filter sniffer tip or press the adjacent Default value button 1000 hours ð Enter a value of your choice in hours for the Air filter or press the adjacent Default value button 2500 hours 3 Save After performing a maintenance you should reset the desired period until the next maintenance See also 2 Change the filter mat inside the tool box 109 2 Replacement of the filte...

Страница 62: ...quently in the following cases The period of the device is longer than 30 minutes and the temperature deviation compared to the last calibration is larger than 5 Kelvin There was no calibration within the last 24 hours in the currently selected operation mode ü Operator or Supervisor rights 1 Setup Measurement Miscellaneous 2 To switch on further calibration requests activate the option Calibratio...

Страница 63: ...ter activating this option the function Measure internal calibration leak after run up is automatically executed after run up This can be used to check that the leak detector is functioning correctly The function is only available in the operation mode Vacuum with test gas Helium mass 4 For optimum measurement accuracy calibration should be performed with the device at operating temperature ü Supe...

Страница 64: ...lect the desired menu name from the list overview using the shown Change or delete favorites 1 In the Favorites window press ð This opens the Manage window in which you can tap the desired entry ð The icon and the icon for deletion are displayed 2 After pressing the icon the list overview is displayed with the menu names from which you make your selection and save it by pressing 6 2 16 Turn notifi...

Страница 65: ...drogen does not exceed the described concentration ü Supervisor rights 1 Setup Measurement Mass 2 Make a selection from Hydrogen H2 2 amu Helium 4 He 4 amu Mass 3 3 He 3 amu 3 Save 6 3 3 Setting setpoints You can set the leak rate for the setpoint to 1 2 3 and 4 separately When the setpoints are exceeded If the setpoint 1 or 2 is exceeded the measurement line in the measurement window changes colo...

Страница 66: ...ge under Vacuum range 3 Save 6 3 5 Switch TMP2 mode on or off ü Supervisor rights 1 Setup Measurement Vacuum TMP2 2 If necessary change the setting of the TMP2 Mode field ð Automatic factory setting The TMP2 starts automatically when evacuating and stops when changing to standby This is the recommended setting for maximum performance ð Disabled The TMP2 does not start 6 3 6 HYDRO S If you are test...

Страница 67: ...3x10 10 mbar l s ü ZERO is switched off After switching on HYDRO S the ZERO can be used again See Set and use the function ZERO 69 Switch HYDRO S by pressing on or off on the measurement screen By means of Stop you always switch off HYDRO S HYDRO S automatic ü HYDRO S is set to Automatic see Set HYDRO S 66 ü The other requirements for the above mentioned manual operation are also fulfilled ü The l...

Страница 68: ... with respect to the air equivalence The machine factor for this correction is 0 37 ü Operator or Supervisor rights ü The operation mode Vacuum is set 1 Setup Measurement Calibration leak ð The field Machine factor helium is shown 2 Adjust 3 Save 6 3 8 Set external calibration leak To use an external calibration leak for calibration enter the leak rate of the calibration leak ü Operator or Supervi...

Страница 69: ...ULTRA 2 To restore the factory settings for air after a change by pressing a key press the Air default button ð All factory settings for air are set ð If required you can set the pressure limits individually See also Factory settings 36 3 To set the values for argon by pressing a button press the Argon Standard key ð Then the following settings deviating from the factory settings for air are used ...

Страница 70: ...ol panel for more than 2 seconds or on the touchscreen Vacuum operation mode effect of ZERO setting If you use the I ZERO 2 0 setting after pressing the ZERO button the displayed background signal is faded out depending on the current drift Typically the display limit falls in several steps The size of the current display limit is a dimension with which leakages can currently be measured When meas...

Страница 71: ...vated The inlet is ventilated only very slowly This can be useful to avoid a strong flow in the test object which could possibly entrain particles ð Option deactivated Factory setting 4 Save Purge By activating the flushing function with dry backing pumps a small gas flow is let into the backing pump in the standby state The function may be useful to remove condensed water vapor from the pump cham...

Страница 72: ...nge leak rate filter The leak rate filter I CAL is preset I CAL ensures that the averaging time is optimally adapted to the leak rate range The abbreviation I CAL stands for Intelligent Calculation Algorithm for leak rates This ensures that the signals are averaged at optimal time intervals and this is based on each leak rate range I CAL also determines interference spikes which bear no relevance ...

Страница 73: ...re that a current internal ground is used in the following measuring operation do not press START until the background display in standby has changed from low opacity grayed out to normal opacity To make the background display visible in standby mode activate the corresponding function see Change general display settings 57 ð Inlet area Additionally to the deduction of the internal background pres...

Страница 74: ...there are Lighter Off or Flash 3 Select Sniffer line light brightness ð You have a choice of OFF 1 6 4 Switch on the Sniffer line beep sniffer audio ð As choices there are Off or Beep when setpoint 1 available 5 Save 6 3 15 Change the sniffer line pressure monitoring In the operation mode Sniffer SL200 or SL3000 automatic pressure monitoring is activated The preset pressure limits define a maximum...

Страница 75: ...s an internal calibration is not possible In this case use an external calibration leak The operation modes Vacuum and Sniffing must be separately calibrated when using an external calibration A calibration should only take place when the device is at operating temperature Calibrate at least 20 minutes after switch on For systems with a greater distance to the test object we recommend the use of a...

Страница 76: ...he calibration factor is recalculated ð The newly calculated calibration factor is displayed ð If the newly calculated calibration factor deviates considerably from the stored calibration factor a prompt for new calibration is displayed 6 3 16 4 Measure internal calibration leak ü User rights ü The device is in Standby or Measure mode 1 Select the cross hair icon 2 Select Measure internal calibrat...

Страница 77: ...ngs and the settings for the current measurement are carried out See Basic settings and Settings for the measurements 4 When performing a calibration note the 20 minute warm up time See Calibrating 75 5 In standby mode initiate the measurement process by pressing the START button ð If you want to ensure that a current internal background is used in the following measuring operation please observe ...

Страница 78: ...te 1 Select the cross hair icon 2 Select I CHECK 3 Press 4 View the measurement result 6 6 Measurement data You can record measured values in the internal database Recording can be done automatically during the measurement or via the Record measurement data button in the measurement screen See also Switch on data recording and configure export 78 You can also export the displayed measured values S...

Страница 79: ...e with timestamp and extension e g icmeas20160720 082829 csv 4 To export measurement data in addition to the measurement data such as the serial number of the device activate the Export metadata option ð Note If other data is exported in addition to measurement data this can increase the effort required for data post processing 5 Save 6 6 2 Display measurement cycles The measuring cycle is the tim...

Страница 80: ...face responds to requests on port 3000 when valid parameters are transmitted with data in the requested format ü A network connection has been established between the leak detector on one side and the PC or Tablet on the other side See also Operate leak detector via web browser LAN 131 or Operate leak detector via web browser wireless LAN 133 ü The measurement data were recorded See also Switch on...

Страница 81: ... measurement cycles via ID ID s of the measurement cycles Separated by comma for several c 3 c 3 5 8 dts START The start time of the time period from which data is to be exported A date in ISO format in UTC time dts 2018 08 02T17 15 12 000Z dte End The end time of the time period from which data is to be exported A date in ISO format in UTC time dte 2018 08 02T17 45 35 000Z f Format The data forma...

Страница 82: ...alues that can be stored in the database Level Oldest record Time stamp of the oldest measurement value Newest record Time stamp of the newest measurement value See also 2 Resetting to factory settings 90 6 7 Information 6 7 1 Call the latest information to the current measurement value Measurements Leak rate and pressure ð The leak rate and different pressure values are shown Measurements Tempera...

Страница 83: ...rating hours Device MSB 6 7 5 Call information on the assemblies Diverse measurement values and information to the following assemblies is shown Preamplifier ion source turbo molecular pump TMP processor assembly MSB backing pump and its frequency converter Assemblies Preamplifier Assemblies Ion source Assemblies TMP Assemblies TMP2 Assemblies Backing pump 6 7 6 Call the energy data information Va...

Страница 84: ...he error and warning log Logs Errors and warnings If there are more than 20 entries always the oldest entry is deleted 6 8 2 Call calibration log The entries are for the entire period of use of the device If there are more than approx 20 entries always the oldest entry is deleted Logs Calibrations 6 8 3 Call result log For displaying test results in the Vacuum Qmax operation mode If there are more...

Страница 85: ...le to save sets of parameters in text based files at any time The parameters can be viewed in clearly arranged form ü Supervisor rights 1 Sets of parameters Manage sets of parameters ð Sets of parameters already created will be displayed as a list If the values of a saved set of parameters match the actual settings of the device 100 a green dot will be displayed 2 To create a new set of parameters...

Страница 86: ...needed press below the list 3 To import all sets of parameters from a USB flash drive into the device press below the list ð All sets of parameters on the USB flash drive will be saved in the device if the number of 10 is not exceeded Using a PC you can delete redundant sets of parameters on the USB flash drive before transferring ð You must not modify parameters of a set of parameters on the USB ...

Страница 87: ...round is green otherwise it is red 4 In order to load the new software version press on the button Update ð After completion there is an automatic restart of the operating unit 6 10 2 Updating the software of the basic unit Import software updates using a USB flash drive NOTICE Loss of data due to disconnection Do not switch off the device and do not remove the USB flash drive while the software i...

Страница 88: ...11 Use external monitor You are able to use an external touch monitor instead of the internal monitor You can use either the internal or the external monitor ü You have a control unit with HDMI interface for the illustration see Control unit 24 ü You have a touch monitor with connections for HDMI and USB furthermore an appropriate power supply HDMI is required to transmit the images USB is require...

Страница 89: ...me 1 Display Switch monitor 2 Press the Internal Monitor button 6 12 View vacuum diagram To check the function and the operating state of the measuring system at a glance call up the simplified diagram of the vacuum diagram Vacuum diagram 6 4 2 3 7 8 10 9 1 V15 V13 V12 V11 V10 V9 V8 V7 V5 V4c V2b V2a p4 p2 V14 p3 p1 MS TL 5 Fig 13 The most important components of the vacuum diagram in UL6000 devic...

Страница 90: ...e is not reset when restoring the factory settings ü Supervisor rights 1 Setup General Reset 2 Make your choice ð If you want to reset all settings press the Reset settings button ð If you want to delete all recorded measurement data and user accounts press the Delete data button ð To reset the device to the factory settings press both buttons one after the other 6 14 Logging off from the device 1...

Страница 91: ... foreign objects Before switching off the device vent the inlet to ensure that the TMP2 booster pump is slowed down After venting the inlet avoid jerky movements or vibrations of the device during operation and until 2 minutes after switching off Prevent foreign objects from entering the inlet of the device You can switch off the device with the power supply switch at any time The parameters set i...

Страница 92: ...ng Error messages Errors are events that force the interruption of the operation For details about the cause and the remedy press Once you have rectified the cause of the error continue operation by pressing the button Clear Active errors and warnings This menu item is only displayed when the template contains errors or warnings Errors and warnings Confirmed warnings If an active warning is acknow...

Страница 93: ...h time when you restart the device Contact customer service W106 Several EEPROM parameters have been initialized A software update introduced new parameters Confirm the warning message Check that the message does not appear when you restart the device Check whether the factory setting of the new parameters corresponds to your application The EEPROM on the VI Board was replaced Confirm the warning ...

Страница 94: ...ed through interfaces Over time this reduces the service life of the EEPROM Remove the excess write accesses from your control program E112 Impermissible DIP switch setting The DIP switch on the MSB has an invalid position Contact customer service MSB defective Contact customer service W113 The device ID does not match the recognized backing pump The DIP switch on the MSB has an invalid position C...

Страница 95: ...ss Contact customer service W130 Sniffer line not connected The sniffer line cannot be addressed by the device Check the connection between sniffer line and the device disconnect and reconnect Contact customer service Sniffer line defective Use another sniffer line if possible Contact customer service W132 Sniffer line type XL not allowed A sniffer line type XL cannot be used with this device Repl...

Страница 96: ...of 24V power supply unit Contact customer service W203 24V valve supply voltage out of range Malfunction of a valve Contact customer service Short circuit or overload in the 24V valve supply Contact customer service W206 24V operating unit supply voltage out of range Malfunction of operating unit Contact customer service Short circuit or overload in the 24V operating unit supply Contact customer s...

Страница 97: ...emote control if possible The cable connected to REMOTE CONTROL connector is defective Use another cable if possible The accessory connected to ACCESSORIES connector is defective Use another accessory if possible The cable connected to ACCESSORIES connector is defective Use another cable if possible Short circuit or overload in the 24V_RC supply Contact customer service W222 Internal voltage 24V_I...

Страница 98: ...customer service VI Board or MSB defective Contact customer service W250 REF5V voltage out of range Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service E252 REF5V voltage shorted Short circuit at preamplifier Contact customer service VI Board or MSB defective Contact customer service W254 Valve current is out of range One or more lowered valves...

Страница 99: ...vice E306 Anode voltage incorrect The anode voltage set value is outside the allowable range Perform a calibration Contact customer service MSB defective Contact customer service W310 Cathode 1 broken Cathode defective Check that the other cathode has been switched on Contact customer service Connection to cathode broken Contact customer service VI Board or MSB defective Contact customer service W...

Страница 100: ...mplifier defective Contact customer service Mass spectrometer contaminated Contact customer service W360 Preamplifier output signal too low Ion source defective Contact customer service Mass spectrometer contaminated Contact customer service W361 The offset voltage of the preamplifier is too high Preamplifier defective Contact customer service W362 Preamplifier range error Preamplifier defective C...

Страница 101: ...ked or defective Contact customer service W411 High TMP temperature The ambient temperature is too high Reduce the temperature in the environment where the device is located Air filter dirty Clean the air vents or replace the filter plates Fan blocked or defective Contact customer service W421 TMP voltage too low Power supply to TMP not sufficient Contact customer service E422 No TMP run up Inlet ...

Страница 102: ...mer service Backing pump has no power supply Contact customer service Backing pump converter defective Contact customer service VI Board or MSB defective Contact customer service E453 Backing pump failure Unhandled error message from the backing pump Contact customer service E454 Fault in backing pump Undervoltage The backing pump in the leak detector has insufficient mains input voltage Make sure...

Страница 103: ...least an hour before you switch on the leak detector Temperature sensor of backing pump is defective Contact customer service Backing pump converter defective Contact customer service W459 Run up of backing pump takes too long Exhaust connection sealed Make sure that the exhaust hose is correctly connected Backing pump defective Contact customer service W460 No communication with the TMP2 converte...

Страница 104: ...n in backing pump Gas flow into device due to pressure at exhaust connection Remove the pressure from the exhaust connection E466 Run up error of backing pump rotation speed too low Exhaust connection sealed Make sure that the exhaust hose is correctly connected Backing pump defective Contact customer service E467 Overload protection of backing pump Exhaust connection sealed Make sure that the exh...

Страница 105: ...psed Contact customer service W522 Pressure rise emission collapsed Pressure rise at pressure sensor p2 and emission collapsed Contact customer service W540 Flow through capillary is too low Leaks may not be detectable Filter is dirty Replace the sniffer tip filter Sniffer tip or capillary blocked Remove the blocking of the sniffer tip Use another sniffer line if possible Contact customer service ...

Страница 106: ...ck and change the audio alarm delay if necessary W580 Maximum evacuation time until 100 mbar exceeded Gross leak at test object or the connection to the test object Check the tightness of the connection between the leak detector and the test object Use another test object if possible The settings value for the max gross leak evacuation time is too low Check and change the max gross leak evacuation...

Страница 107: ... Auto Leak Test Too many consecutive tests failed Leak rate setpoint 1 does not match the test object Check and change the leak rate setpoint 1 if necessary Test chamber leaky Use another test chamber if possible W670 Calibration error emission collapsed During calibration the emission collapsed Check if the message occurs again when you perform a new calibration Contact customer service W700 Prea...

Страница 108: ...ty Clean the air vents or replace the filter plates Fan blocked or defective Contact customer service W901 Maintenance TMP bearing lubricant Maintenance interval for TMP bearing lubricant exceeded Contact customer service W903 Maintenance Calibration leak expired Maintenance interval for calibration leak exceeded Contact customer service W904 Maintenance Sniffer tip filter Maintenance interval for...

Страница 109: ...y cannot be switched back on unintentionally Don t open the device 8 1 Cleaning the housing Wipe the housing with a soft damp cloth Use only water to moisten Avoid cleaners that contain alcohol fat or oil 8 2 Change the filter mat inside the tool box Filter mat tool box Required tools None Depending on the location the filter mat in the tool box can become dirty Check the filter mat periodically a...

Страница 110: ...mat bottom of the device Required tools Screwdriver Check the filter mat periodically and change it if the filter mat is significant dirty ü They consist of a new filter mat 1 Make sure that the device is disconnected from the power supply by pulling the power plug securely 2 To reach the filter mat loosen the knurled screw on the front of the device at the bottom 3 Remove the metal sheet with the...

Страница 111: ...e filter mat on the metal sheet 5 Replace the filter mat 6 Secure the filter mat with the screws insert the metal sheet and fix it with the knurled screw 8 4 Replacing the SL200 sniffer line filter Structure of the sniffer tip Fig 14 Sniffer tip 1 Capillary filter plastic standard 4 Cross head screws 2 Felt pads 5 Sinter filter ...

Страница 112: ...er line from the device Use tweezers to remove the dirty felt discs and replace them with new ones or Unscrew the capillary filter and replace it with a new one Do not forget the gasket for the metal version Check or replace the sinter filter 1 Switch off the leak detector or disconnect the sniffer line from the device 2 Remove the two cross head screws 3 Remove the sinter filter with gasket 4 Che...

Страница 113: ...w the metal capillary filter and the water conservation tip This seal is already integrated into the plastic capillary filter Table 3 Capillary filter 1 Sniffer line end 4 Plastic capillary filter 2 cone seal 5 Water conservation tip 3 Metal capillary filter Capillary filter and water conservation tip are screwed onto the sniffer line end The filter inserts are inserted and lie in front of a small...

Страница 114: ...r 61 Replacing the sinter filter of the sniffer handle The sinter filter is in the sniffer handle To replace the filter inserts proceed as follows 1 Switch off the leak detector 2 Unscrew the two cross head screws that hold the sniffer probe in place 3 Remove sinter filter including o ring Fig 18 Sinter filter in the sniffer handle 4 Check the filter for visible soiling 5 Insert a new sinter filte...

Страница 115: ...ory on the USB stick The date and time are also saved 3 To take another screenshot disconnect the USB stick from the USB port and then reconnect it to the leak detector ð A screenshot saved earlier will not be overwritten when another screenshot is taken 8 7 Sending for repair or maintenance Maintenance inside the device should only be performed by the manufacturer We recommend having the device s...

Страница 116: ...gas line Renew filter X3 X1 X1 X1 II 200000683 200001095 Electrical Fan subassemblies Blow out fan chassis and TMP X3 X1 X1 X1 X1 II Check air filter kit and replace if necessary X3 X1 X1 X1 X1 I 200007656 Subassemblies and accessories Sniffer line SL3000 Renew filter X3 Perform sniffer operation every 1000 hours I 200001116 20003500 Calibration leak Recalibration replacement X2 Perform depending ...

Страница 117: ...ll as aggressive or corrosive gases it may be necessary to reduce the maintenance interval to one year The recommendation is made to maintain the technical specifications of the pump specified by the manufacturer throughout the life of the device Lack of maintenance will not normally result in a sudden failure of the pump Due to wear pressure performance will decrease over time As long as the pres...

Страница 118: ...our country Device cannot be scrapped with the normal domestic waste 9 2 Sending in the device WARNING Danger due to harmful substances Contaminated devices could endanger the health The contamination declaration serves to protect all persons who come into contact with the device Fill in the declaration of contamination completely 1 Please contact the manufacturer and send a completed declaration ...

Страница 119: ...INFICON Decommissioning 9 UL6000 Fab Operating instructions iina75en1 04 2109 119 146 ...

Страница 120: ...the electrical connection of the SL200 551 205 Sniffer line SL200 3 8 m long and cable extension for the electrical connection set of 14005 and 551 205 551 210 Sniffer line SL3000 SL3000 3 sniffer line 3 m length 525 001 SL3000 5 sniffer line 5 m length 525 002 SL3000 10 sniffer line 10 m length 525 003 SL3000 15 sniffer line 15 m length 525 004 Holder for sniffer line SL3000 551 203 Sniffer line ...

Страница 121: ...onverted to a sniffer leak searcher The length of the sniffer line is 3 8 m To operate this sniffer line you also need a cable extension for the electrical connection For mounting the hooks for winding up the power line or sniffer line see Connect the supplied accessories 44 Sniffer line SL3000 The sniffer line SL3000 is connected to the rear of the leak detector so that a vacuum installation at t...

Страница 122: ...ate is displayed as a bar graph as a numeric value or as a diagram on the display of the remote controls see the RC1000 Technical Manual Measurement values you create over a recording time of up to 24 hours in the internal memory of the RC1000 You transfer the data easily to a USB flash drive You can set an internal setpoint for warning when exceeding the setpoints The warning occurs visually on t...

Страница 123: ...ou have misplaced the RC1000WL wireless remote control you can trigger from your leak detector acoustic signals of this remote control 1 Setup Accessories RC1000 2 Select the setting ON in the field Paging request ð The remote control emits acoustic signals 3 To stop signals from being emitted after finding the remote control select OFF in the Paging request field ...

Страница 124: ... Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 3 Set up the Analog output 2 ð You can choose from Off Pressure p1 Pressure p2 Leak rate mantissa Leak rate exponent Leak rate linear Leak rate logarithmic Leak rate mantissa hyst and Via interface 4 Set up the Analog output scaling ð You can choose fr...

Страница 125: ... unit Useful only if the other analog output Leak rate mantissa or Leak rate mantissa hyst is assigned Linear leak rate 0 10 V linear in the selected unit The upper limit 10 V is set via the parameter Exponent upper limit in whole decades The lower value is always 0 leak rate which corresponds to 0 V output voltage This setting is for both analog outputs if an appropriate output function is select...

Страница 126: ... The output voltage can be specified for tests with the LD log command 221 Leak rate mantissa hyst 0 7 10 V linear in the selected unit Useful only if the other analog output is assigned Leak rate exponent Through an overlap of the mantissa in the range 0 7 to 1 0 a constant jumping between two decades is prevented 0 7 V corresponds to a leak rate of 0 7 x 10 x 9 9 V corresponds to a leak rate of ...

Страница 127: ...e active active inactive Switch on purge only in standby state Switch off purge only in standby state Start inactive active Change to the measurement mode Start Stop inactive active active inactive Change to the measurement mode Switch to Standby Stop inactive active Switch to Standby ZERO inactive active active inactive Switch ZERO on Switch ZERO off 10 2 4 Configuring digital outputs The digital...

Страница 128: ...leak open No request Calibration not required Calibration active closed Device is to be calibrated open Device is not to be calibrated Calibration stable closed Calibration completed with calibration leak open Assignment not stable or calibration is inactive Cathode 2 closed Cathode 2 is active open Cathode 1 is active Measuring closed Measuring ZERO is possible all setpoint outputs switch dependi...

Страница 129: ...urge valve closed Vent closed Internal vent valve open open Internal vent valve closed Standby or evacuate closed State standby or evacuate active open State standby of evacuate not active such as when measuring Status calibration leak valve closed Calibration leak valve is open open Calibration leak valve closed Warning closed Warning open No warning ZERO active closed ZERO switched on open ZERO ...

Страница 130: ...nd the bus module proceed as follows 1 Switch off the leak detector 2 Connect the INFICON bus module via a data cable to the LD socket of the device see Connections for accessories and control signals 33 3 Switch on the leak detector 4 Setup Accessories Device selection 5 Select the Bus module as device 6 Confirm with 10 3 2 Setting a bus module address You can set the setpoint for the field bus a...

Страница 131: ...ternet This is true for connections over WLAN as well as over Ethernet However if you want to access the web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties 10 4 1 1 Configure the LAN connection of the leak detector ü Supervisor righ...

Страница 132: ...mend using a current version of the web browser Chrome Firefox or Safari To access the leak tester from the PC or tablet web browser enter the IP address of the leak detector as follows http IP address ð The current active user interface of the leak detector is called ð The same functionality is available on the PC or Tablet as on the touchscreen of the leak detector 10 4 1 3 Allow client access ü...

Страница 133: ...he web interface of the leak testing remotely we recommend an encrypted Virtual Private Network VPN connection However we cannot assume any guarantee for the security of VPN connections which are provided by third parties In order to be able to access the user interface of the device via WiFi there needs to be a WiFi capable USB adapter with WiFi Access Point technology inserted in the rear of the...

Страница 134: ...eps then on most devices it is sufficient just to enter the URL ü A wireless LAN capable USB adapter with wireless LAN Access Point Technology is connected to a USB port of the leak detector see Control unit 24 ü In the configuration of the leak detector the option Enabled is activated see Configure the wireless LAN connection of the leak detector 133 ü The WLAN connection is automatically detecte...

Страница 135: ... by PC or Tablet activate the Client Access option ð If the option Client Access is not activated the leak detector cannot be operated via PC or Tablet No settings can then be changed 3 Save Display of all connected clients ü The network connection between the leak detector and one or more PCs or Tablets has been established see Setting the wireless LAN connection in the PC or Tablet 134 Setup Net...

Страница 136: ...cycles 7 Logs Result log 8 Logs Errors and warnings 9 Logs Calibrations 10 Logs Maintenance 11 Regeneration 12 Update Update operating unit 13 Update Update operating unit Expert 14 Update Update basic unit 15 Update Update basic unit Expert 16 Vacuum diagram 11 1 2 Settings 1 Display General 2 Display Bar graph 3 Display Circle graph 4 Display Line graph 5 Display Switch monitor 6 Audio 7 User ac...

Страница 137: ... 26 Setup Measurement Miscellaneous 27 Setup Measurement Vacuum TMP2 28 Setup Measurement Vacuum Vacuum ranges 29 Setup Measurement Vacuum Purge 30 Setup Measurement Vacuum Vent 31 Setup Measurement ZERO and filter 32 Setup Network Client access 33 Setup Network LAN 34 Setup Network Connected clients 35 Setup Network WLAN 36 Setup Maintenance requests 37 Setup Maintenance counter 38 Setup Accessor...

Страница 138: ...2 4 Assemblies Backing pump 5 Assemblies Preamplifier 6 Energy Power 7 Energy Voltage 1 8 Energy Voltage 2 9 Energy Current 10 Device Operating hours 11 Device Identification 12 Device MSB 13 Device Network 14 Help Errors and warnings 15 HYDRO S 16 Calibration 17 Measurements Runtime 18 Measurements Leak rate and pressure 19 Measurements Temperature 20 Sniffer line 21 Accessories Bus module 22 Acc...

Страница 139: ...INFICON Appendix 11 UL6000 Fab Operating instructions iina75en1 04 2109 139 146 11 2 CE Declaration of Conformity ...

Страница 140: ...11 Appendix INFICON 140 146 UL6000 Fab Operating instructions iina75en1 04 2109 11 3 RoHS ...

Страница 141: ...3000 19 D Declaration of Contamination 118 Definition of terms 9 Display background leak rate 57 Display leak rate and pressure 82 Display maximum leak rate 25 Display runtimes 82 Display temperature value 82 E Evacuation time gross leak 60 Evacuation time measurements 60 Exhaust 31 47 F Factory settings 36 Function description 18 H HYDRO S Definition 18 set 67 use 67 I I O module 124 L LAN 131 Al...

Страница 142: ...leak 68 Set of parameters Delete 86 load 86 Setting setpoints 65 Setting the language 53 Sniffer line Pressure monitoring 74 Replacing the filter 112 Sniffer line SL200 121 Sniffer line SL3000 121 Software Update basic unit 87 User interface update 87 Supervisor 52 54 Switch monitor 25 88 89 Switch off 91 Switching on 51 T Take a screenshot 114 Technical data 34 TMP2 mode 66 Touch monitor 25 Touch...

Страница 143: ...INFICON Index UL6000 Fab Operating instructions iina75en1 04 2109 143 146 Z ZERO 77 Button 26 Factory setting 70 ...

Страница 144: ...Index INFICON 144 146 UL6000 Fab Operating instructions iina75en1 04 2109 ...

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