© ICSPI Corp. 2007-2021
nGauge AFM User Manual 2.0
72
Where to select plateau and valley heights
9.1.3.
Single-Point Vertical Calibration Example
To calculate the calibration factor for single-point calibration, take the actual height of the
calibration and divide it by the measured height.
For example, if your calibration grating possesses 100 nm-tall features and the measured line
profile shows 200 nm (0.2 um), then your vertical calibration factor is 100/200, or 0.5. (This is an
extreme example.)
From the image above, it is shown that the average difference between peak and valley is 140.3
nm. The grating size is 110 nm, so the calibration factor is then 0.78 nm.
9.1.3.1.
Apply calibration factor using Dimensions and Units Tool
With the calibration factor calculated, the Dimensions and Units tool is found under
Data
Process > Basic Operations > Dimensions and Units.
In the ‘Z Calibration Factor’ input area,
enter the calibration factor calculated earlier.
