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Series 330

Instruction Manual

Granville-Phillips

Series 330

Vacuum Gauge Controller

Instruction manual part number 330004

Revision 02 - August 2008

Содержание Series 330

Страница 1: ...Series 330 Instruction Manual Granville Phillips Series 330 Vacuum Gauge Controller Instruction manual part number 330004 Revision 02 August 2008...

Страница 2: ......

Страница 3: ...com World Wide Web www brooks com 2008 Brooks Automation Inc All rights reserved Granville Phillips and Convectron are registered trademarks of Brooks Automation Inc All other trademarks and register...

Страница 4: ...inch rack 330503 Bench top mount 330504 Half rack mount 2 process control relays 330505 Dual side by side controllers with two Convectron Gauge 330026 and two thermocouple gauge analog outputs Dual si...

Страница 5: ...Gauge Module 330026 or 330032 16 2 3 4 Thermocouple Gauge TC Module 330026 16 2 3 5 Process Control Module 330505 16 2 3 6 Ion Gauge Cables 16 2 4 Initial VGC Setup and Installation 17 2 4 1 Line Vol...

Страница 6: ...D Calibration 38 Chapter 5 Convectron Gauge Module 39 5 1 Introduction to the Convectron Gauge Module 39 5 1 1 Units of Measure for a Convectron Gauge 39 5 2 Convectron Gauge Tube Installation 40 5 2...

Страница 7: ...es 63 7 1 Introduction 63 7 2 Process Control System Connections 63 7 3 Process Control Operation 64 7 3 1 Setpoint Display and Adjustment 64 7 3 1 1 To Display a Setpoint 65 7 3 1 2 To Modify a Setpo...

Страница 8: ...Table of Contents 8 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02...

Страница 9: ...th these precautions or with specific warnings elsewhere in this manual violates safety standards of design manufacture and intended use of the instrument Brooks Automation Inc disclaims all liability...

Страница 10: ...tions may result in fire electric shock or other hazards Safety Check Upon completion of any service or repairs to this product ask the Qualified Service Person to perform safety checks to determine t...

Страница 11: ...devices are properly installed before installing the product In addition check that a The proper gas cylinders are installed b Gas cylinder valve positions are correct on manual systems and c The aut...

Страница 12: ...rgon or CO2 unless accurate conversion data for N2 to the other gas is properly used See Section 5 3 on page 44 If used improperly Convectron gauges can supply misleading pressure indications that can...

Страница 13: ...p over the phone If the module must be returned to the factory for service request a Return Authorization RA from Brooks Automation Granville Phillips Do not return products without first obtaining an...

Страница 14: ...ance with this instruction manual may cause harmful interference to radio communications However there is no guarantee that interference will not occur in a particular installation Operation of this e...

Страница 15: ...tion gauge or from 1 0 x 10 3 Torr 1 0 x 10 3 mbar or 1 0 x 10 1 pascal to 999 Torr using Convectron gauges or from 1 x 10 3 Torr to 1 Torr using thermocouple gauges Pressure ranges are air equivalent...

Страница 16: ...rom two Convectron Gauges simultaneously The pressure readout is an analog output signal See Chapter 5 2 3 4 Thermocouple Gauge TC Module 330026 The Thermocouple Module provides the same functions as...

Страница 17: ...rect line voltage as shown in Figure 2 1 is readable from the rear of the VGC 5 Verify that fuse F2 is the correct value as shown in Table 2 1 Position fuse extractor tab FUSE PULL to the right hand p...

Страница 18: ...2 Installation 18 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 2 2 330 VGC Mounting Configurations...

Страница 19: ...ion source or used in a sputtering system spurious electrons or ions may disturb the measurement Screens or other shielding should be placed between the gauge and the system if spurious charged partic...

Страница 20: ...r vacuum Accidental bending of the pins may cause the glass to break and implode Cables once installed should be secured to the system to provide strain relief for gauge tube pins Ionization gauges ar...

Страница 21: ...tallation 21 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 2 5 Ion Gauge Cable for Granville Phillips Nude Gauges Figure 2 6 Ion Gauge Cable for Granville Phillips Nude Ga...

Страница 22: ...at earth ground Connect the power cord to a properly grounded outlet Make sure the vacuum port to which the gauge is mounted is properly grounded Connect the gauge envelope to a facility ground If nec...

Страница 23: ...ground a component Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation 2 Provide a connection to ground for other instruments w...

Страница 24: ...angerous voltage between them This test does not prove that either connection is earth ground only that they are the same If more than 2 ohms is indicated check with your electrician 4 If AC or DC vol...

Страница 25: ...on of the controls and indicators found on a basic 330 VGC is given in this section For detailed instructions pertaining to particular functions consult the chapter for that function Figure 3 1 Series...

Страница 26: ...ge Section 5 1 1 on page 39 for information on changing the units of measure for the Convectron gauge and Section 6 1 1 on page 59 for the Thermocouple gauge The pressure units label can be changed by...

Страница 27: ...nt panel illuminates when degas is ON To turn it OFF press the rocker switch again or press the GAUGE momentary rocker switch to turn OFF degas and turn ON the gauge Degas cannot be activated unless t...

Страница 28: ...ctron collisions with molecules occur is proportional to the density of gas molecules and hence the ion current is proportional to the gas density or pressure at constant temperature The amount of ion...

Страница 29: ...g on the wire decreases that is the pressure decreases the temperature of the wire must increase A wire of metal dissimilar from the sensor wire metal is attached to the sensor The junction of the dis...

Страница 30: ...oC Table 3 3 Series 330 VGC Electrical Specifications Parameter Specification Voltage 90 130 VAC or 200 260 VAC Frequency 50 to 60 Hz Power 100 watts max Fuse Ratings 1 25 A 90 130 V 60 A 200 260 V Ta...

Страница 31: ...put 0 10 Vdc Logarithmic 1 V decade Table 3 7 Convectron Gauge Specifications Parameter Specification Gauge Type Granville Phillips Series 275 Pressure Range 1 x 10 4 Torr to 990 Torr N2 equivalent Ga...

Страница 32: ...0 A for 25 msec min Must go to greater than 3 5 V for 105 msec min before next low state Filament Status Relay Contact Rating 4 A 250 VAC resistive load or 30 Vdc Table 3 10 Process Control Specificat...

Страница 33: ...er VGC is shipped from the factory preset to display the unit of measure Torr millibar or pascal that you requested To change the units proceed as follows 1 Turn OFF power to the control unit 2 Remove...

Страница 34: ...igure 4 2 is a 3 position switch that is used to display gauge sensitivity pressure or emission current To display the sensitivity set the switch to the left or to the right with the ion gauge OFF To...

Страница 35: ...bration Switch must be set with the IG tube turned on to view emission during adjustment The span of adjustment is from approximately 10 to 120 of the range value Theoretically varying the emission cu...

Страница 36: ...or gases other than air or N2 calculate the sensitivity Sx for gas type x as follows where SN2 is the gauge sensitivity for N1 and Rx is found from Table 4 1 For example if the normal sensitivity for...

Страница 37: ...al 330004 Rev 02 For 10 mA emission PRESSURE 10 volts 12 For 1 mA emission PRESSURE 10 volts 11 For 0 1 mA emission PRESSURE 10 volts 10 Figure 4 3 Electrometer Module Rear Panel Figure 4 4 Analog Out...

Страница 38: ...pressure Shutdown Adjustment The Overpressure Shutdown Adjustment potentiometer Figure 4 1 is factory set so the ion gauge will shut down when the pressure rises above the levels listed in Table 4 2 T...

Страница 39: ...jacks See Figure 5 2 5 1 1 Units of Measure for a Convectron Gauge The Series 330 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested T...

Страница 40: ...ample at 760 Torr of argon gas pressure the indicated pressure on a Convectron gauge calibrated for N2 is 24 Torr At an indicated pressure of 50 Torr the true pressure of argon is considerably above a...

Страница 41: ...hylene toluene and acetone produce fumes that are toxic and or flammable Use only in areas well ventilated to the outdoors and away from electronic equipment open flames or other potential ignition so...

Страница 42: ...The gauge will operate and accurately measure pressure below 1 Torr when mounted in any orientation Above 1 Torr The gauge will accurately measure pressures above 1 Torr only when mounted with its ax...

Страница 43: ...female fitting Wrap the threads of the gauge tube port with Teflon tape and screw these threads into the system fitting hand tight Do not use any wrench or tool The gauge tube body functions adequate...

Страница 44: ...at this time or sooner if readings in the 10 4 range are not needed The 10 4 Torr range is accurate to about 0 1 milliTorr provided the instrument has been carefully zeroed at vacuum See Section 5 3 6...

Страница 45: ...ill help to locate the proper graph for a specific application NOTE 1 mbar 100 pascal so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretati...

Страница 46: ...horizontally to the left to a true pressure of 250 Torr Thus 250 Torr argon pressure produces an indication of 10 Torr N2 equivalent Example 3 True to Indicated Pressure Conversion Assume you want to...

Страница 47: ...5 Convectron Gauge Module 47 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 5 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 100 mTorr...

Страница 48: ...5 Convectron Gauge Module 48 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 6 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Страница 49: ...5 Convectron Gauge Module 49 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 7 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 Torr...

Страница 50: ...5 Convectron Gauge Module 50 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 8 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 0 1 mbar...

Страница 51: ...5 Convectron Gauge Module 51 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 9 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mTorr...

Страница 52: ...5 Convectron Gauge Module 52 Series 330 Vacuum Gauge Controller Instruction Manual 330004 Rev 02 Figure 5 10 Convectron Gauge Indicated vs True Pressure Curve 0 1 to 1000 mbar...

Страница 53: ...iature phono jack or BNC connector See Figure 5 11 If graphed on loglinear axes the output voltage is linear with respect to the log of pressure The analog output is 1 V per decade of pressure with a...

Страница 54: ...adjust the ATM until the analog output indicates the local atmospheric pressure in the pressure units you have selected 6 NOTE 1 atmosphere at sea level is 7 6 x 10 2 Torr 1 0 x 10 3 mbar 1 0 x 10 5...

Страница 55: ...ble but it must be done very carefully to prevent damaging to the sensor 1 Hold the gauge tube with the main body horizontal and the port projecting upward at an angle of 45 Slowly fill it with solven...

Страница 56: ...ance and a voltage is developed across the null terminals The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero When the b...

Страница 57: ...uide Symptom Possible Cause CGA Overcurrent LED is illuminated Cable short pins 1 3 on CGA CGB Overcurrent LED is illuminated Cable short pins 1 3 on CGB CGA or CGB Bridge Circuit LED is illuminated B...

Страница 58: ...ectron Gauge Specifications Parameter Specification Gauge Type Granville Phillips Series 275 Pressure Range 1 x 10 4 Torr to 999 Torr N2 equivalent Gas Type N2 Air Analog Output Logarithmic 1Vdc decad...

Страница 59: ...niature phone jacks 6 1 1 Units of Measure The Series 330 Controller is shipped from the factory preset to display the units of measure Torr mbar or pascal that you requested To change the units of me...

Страница 60: ...le Gauge Specifications on page 62 for other compatible transducers The thermocouple gauge tubes may be installed anywhere in the system using a 1 8 NPT or 410 in compression connection or may be weld...

Страница 61: ...utput connectors on the rear of the 330 VGC Thermocouple gauges have negligible resolution at pressures above 1 Torr 6 2 2 Analog Output Standard 1 8 miniature phono jack connectors for the analog out...

Страница 62: ...ctory and should not normally be attempted by the user However if necessary proceed as follows 1 Allow the system pressure to rise to atmospheric pressure 2 Remove the top of the control unit 3 Adjust...

Страница 63: ...lled either by digital setpoints or by the built in manual override switches The Process Control Module for the 330 VGC has 2 channels for the Ionization gauge only 7 2 Process Control System Connecti...

Страница 64: ...n non volatile memory and are specified by a 2 digit mantissa and a 1 digit exponent They can be set anywhere in the range 1 x 10 12 to 9 x 10 5 This allows for the entire pressure range of all suppor...

Страница 65: ...oss many decades Release the SET button when you have entered the desired decade and then press it to scroll slowly within the decade to reach the exact setpoint needed After the setpoint button is re...

Страница 66: ...e display bus and is unable to update pressure data while setpoints are being displayed It will not mistakenly interpret setpoint data as pressure data but will simply retain the last displayed pressu...

Страница 67: ...er compares the setpoints with the pressure display data on the display bus and makes a decision as to whether or not to activate a channel s relay The manual override switches when set to the ON or O...

Страница 68: ...ion Manual 330004 Rev 02 7 6 Process Control Specifications Parameter Specification Relay Configuration SPDT Form C Contact Rating 5A 120 VAC 4A 240 VAC resistive or 5A 30 Vdc Channels 2 maximum Hyste...

Страница 69: ...roper anti static protection methods and must be packaged in anti static packaging Brooks Automation Granville Phillips will supply return packaging materials at no charge upon request Shipping damage...

Страница 70: ...information in this manual is for the use of Qualified Service Personnel To avoid shock do not perform any procedures in this manual or perform any servicing on this product unless you are qualified t...

Страница 71: ...Controller input power fuse blown 4 Defective power transformer T1 power switch or line filter 1 Plug in power cord 2 Restore power to receptacle 3 Replace fuse with correct type and value as indicat...

Страница 72: ...in the ion gauge cable 1 Connect the gauge cable 2 Replace the ion gauge or switch to the second filament if available 3 Repair or replace the gauge cable 2 The ion gauge filament does not illuminate...

Страница 73: ...Emission Adjustment 35 Installation 33 Introduction 33 Operation 34 Relative Gas Sensitivities 36 Sensitivity Adjustment 35 Specifications 30 Units of Measure 26 Explosion Implosion 11 F FCC verifica...

Страница 74: ...on 60 Operation 61 Reading Pressure 61 Specifications 31 62 Theory of Operation 29 Thermocouple Module Analog Output 61 Introduction 59 Units of Measure 59 Troubleshooting Ionization Gauge Problems 72...

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Страница 76: ...CO 80503 USA Phone 1 303 652 4400 15 Elizabeth Drive Chelmsford MA 01824 USA Phone 1 978 262 2400 Worldwide Customer Service Support 24 7 Phone 1 800 367 4887 To obtain a copy of this instruction man...

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