Granville-Phillips Micro-Ion 354 E Series, Инструкция по эксплуатации, Страница: 25 / 54

Micro-Ion E Module Instruction Manual 354011, Rev. A
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Chapter 5 RS–232 Operation
5.1 Output Functions
The module has an RS–232 output. The output represents vacuum pressure,
for N
2
or air, as measured by the Micro-Ion E gauge.
If the process gas is a gas other than N
2
or air, you must apply a correction
factor to determine the actual pressure for the gas that is being used.
You may use RS–232 commands to read vacuum pressure and configure the
module.
5.2 Preparing to Operate the
Module
Before putting the module into operation, you must install the module in
accordance with the instructions on pages 11–16.
If you need application assistance, phone a Brooks Automation /
Granville-Phillips application engineer at
1–303–652–4400 or
1–800–776–6543 within the USA, or email co-csr@brooks.com .
5.3 Operational Tasks
Once the module is operating, you may use RS–232 commands to perform
the tasks listed in Table 3-2 on page 18.
Using the module to measure the pressure of flammable
or explosive gases can cause a fire or explosion resulting
in severe property damage, personal injury, or death.
Do not use the module to measure the pressure of flammable or
explosive gases.