5-56
5.4 Scanner Adjustment/Maintenance (03)
This procedure calibrates the optical magnification.
[Selection]
[Setup and Maintenance]
→
[03 Scanner Adjustment/
Maintenance]
→
[0346 Optical Magnification
Calibration]
• The current status is displayed.
1. Set the focusing chart jig to the carrier base.
2. Click the [Measure] button.
• The optical magnification calibration is
performed.
• The result is displayed.
3. Click the [Regist.] button.
5.4.12
Optical Magnification Calibration (0346)
z
2
212
Focusing Chart Jig