Fluke molbox RFM, Руководство по эксплуатации и обслуживанию

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molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 6
1.2.4.1.3 molbloc-L Ranges with Low Pressure Calibrations
Table 2. molbloc-L Ranges with Low Pressure Calibrations
- full mod, low pressure
- full mod, downstream
- single P, low pressure
molbloc-L SIZE AND FULL SCALE FLOW (sccm)
GASES
SIZE
1E1
SIZE
5E1
SIZE
1E2
SIZE
2E2
SIZE
5E2
SIZE
1E3
SIZE
5E3
SIZE
1E4
SIZE
3E4
SIZE
1E5
Nitrogen N
2
10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Argon Ar 10 50 100 200 500 1 000 5 000 10 000 25 000 80 000
Helium He
10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Sulfur Hexafluoride SF
6
10 50 100 200 500 1 000
2 000
500
6 000
1 000 6 000
4 000
---
---
INERT
Xenon XE 10 40 80 150 400 800
3 500
500
8 000
11 000
3 000
30 000
20 000
Butane C
4
H
10
20 100
130
30
270
50
670
140
2 300 2 200
1 400 7 000
3 000 ---
--- ---
---
Ethane C
2
H
6
20 100 200 400 1
000
2 000 6 000
1 000 18 000
2 000
18 000
6 000
60 000
50 000
Ethylene C
2
H
4
16 80 160 320 800 1 600
7 000
1 000
16 000
20 000
5 000
70 000
40 000
Hydrogen H
2
20 100 200 400 1
000
2 000 10
000
20 000 60 000 200 000
Methane CH
4
16 80 160 320 800 1 600 8 000 16 000
40 000
5 000
120 000
40 000
FLAMMABLE
Propane C
3
H
8
20 100 200 400 1
000
2 000 3 000
1 000 10 000
2 000
10 000
7 000
---
---
Carbon
Tetrafluoride CF
4
10 50 100 200 500 1 000 4 000
600
10 000 12 000
3 000
36 000
25 000
Hexafluorethene C
2
F
6
10 50 100 200 500 1 000 2 000
600
6 000
1 200 6 000
4 000 ---
---
FLUORO-
CARBONS
Trifluoromethane CHF
3
10 50 100 200 500 1 000
4 000
600
10 000
12 000
4 000
38 000
30 000
Air Air 10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Carbon Dioxide CO
2
10 50 100 200 500 1 000 5 000 10 000 20 000
4 000
60 000
30 000
Carbon Monoxide CO
10 50 100 200 500 1 000 5 000 10 000 30 000 100 000
Nitrous Oxide N
2
O 10 50 100 200 500 1 000 5 000 10 000 20 000
4 000
60 000
30 000
Octafluorocyclobutane
[1]
C
4
F
8
15 60
9
65
17 130
34
330
85
1 100
175
1 050
840
3 400
1 700 --- ---
OTHER
Oxygen O
2
10 50 100 200 500 1 000 5 000 10 000 30 000 80 000
A bold value indicates that the maximum flow is limited by the maximum Reynolds number value of 1 200 which is reached
before the normal differential pressure range is reached. In that case, the second value gives the minimum flow for which
relative accuracy is
±
0.5 % of the measured value. With the microrange option, this value is divided by 10 (see Section
1.2.2.2).
Where there is no value in the field (--), this indicates that the maximum Reynolds number is reached before the differential
pressure reaches 5 kPa (1 kPa in the case of the 1E5 molbloc), therefore calibration with that gas is not useful.
[1] Due to low vapor pressure, only downstream calibration type is available.