FEI Quanta FEG 250, Руководство пользователя

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System Options: Cooling Stage / Waterless Cooling Stage
9-32
WATER COOLED TEMPERATURE STAGE
OPERATION TERMINATION
1. Let the stage cool to the room temperature.
2. Shut down the water chiller.
3. Disconnect one of the water hoses coming out the water flow box
to the chamber.
4. Push START FLOW button and push the water out from the lines
with the use of the compressed air (breath).
Make sure the system is drained before disconnecting the inner
hoses. This prevents excess water from dropping into the chamber
and slowing the time it takes for the chamber to pump down again.
5. Install one water line plug into each water fitting on the inside of the
Chamber feed-through plate.
The water fittings on the inside of the feed-through plate are
designed to create a pressure seal whenever the water lines on
stage are not connected. If there is any debris in the cooling water,
it can collect on the fitting o-ring seals and cause a leak. To prevent
this, water plugs must be installed over the fittings on the inside of
the feed-through plate whenever the stage is removed.
FIGURE 9-26 CHAMBER FEED-THROUGH PLATE (INSIDE)
6. Once the stage has been drained and both water lines have been
removed, blot out any remaining water from the connectors using a
cotton swab or paper towel. Another way to remove water from the
connectors is to pump down directly to Wet mode (this causes the
pump down to take longer than usual).
Note:
When pumping down to Hivac mode after the stage use, always
enter Wet mode first, otherwise the system may not pump down to
Hivac mode on the first attempt.
Caution!
To avoid water leaks in the chamber, the stage must be removed
and water plugs installed before going into HiVac mode.
7. Once the water lines are disconnected and the water plugs
installed, the temperature stage can be removed from the chamber
in the reverse order of as described in the Installation procedure.